MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

C95

A B A B A B A B A B A 125 160 200 250 6.5 18.5 17 45.5 19.5 17 10 22 20.5 49 23 20.5 18 30 28.5 41.5 57 31 28.5 31.5 13 25 23.5 36.5 52 26 23.5 26.5 10.5 22.5 21 34 49.5 23.5 21 24 6.5 18.5 17 30 45.5 19.5 17 20 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

TABLE OF CONTENTS

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

SV

is mounted) 7.5 B B B B 102.9 111.4 118 100.4 91.9 A A A A B A B A B A B A Dimensions are the ones for SV1300--.

REA/REB

Order Made Auto Switches Strokes Bore size REAH10 RE H15 REAH20 RE H25 RE HT25 RE HT32 150 850 900 1000 950 275 325 225 375 400 175 200 250 300 350 500 425 475 450 525 550 575 600 650 700 750 800 A B A B A B A B : Standard strokes : Strokes available with -XB10 : Not available 91 Series REA/REB Safety Instructions These safety instructions are intended to prevent a hazardous situation and

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Bore size (mm) AC AB AA N F M E L AP D K AE C J A AD B I G H AF 25 25 100 66 200 180 60 140 135 200 15 13.5 50 30 117 170 228 65 63 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 75, 100, 125 150, 200 250, 300 27 30 115 76 234 214 230 15 70 170 13.5 160 55 30 138 200 262 75 80 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 30 32 125 80 274 245 80 210 190 280 17.5

MLGP

93 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 112 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st25 24 24 st30 30200200 200 200 25 24 44 44

MLGP

93 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 112 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st25 24 24 st30 30200200 200 200 25 24 44 44

IDU/IDF

C F [100VAC specification] Power cord (900) J H L Drain tube N M K [200 to 240VAC specification] Power cord outlet [200 to 240VAC specification] Terminal block N M L H J K G F E D C B Port size A Model 36 247 74 59 395 198 38 132 34 328 200 IDF1D Rc 3/8 138 232 125 51 410 217 24 150 38 328 226 IDF2D 103 33 304 125 67 470 28 236 21 154 36 358 226 IDF3D : Power source 200 to 240VAC IDF4D Illuminated

Compact

load [kg] Work load [kg] Work load [kg] Work load [kg] 500 500 500 500 m 400 400 400 400 Wall mounting L5 [mm] L5 [mm] L5 [mm] L5 [mm] L5 300 300 300 300 Y 200 200 200 200 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 L6 200 200 200 200 L6 [mm] L6 [mm] L6 [mm] L6 [mm] m Z 100 100 100

VFS

Tightening torque for terminal: 0.6 Nm Series VFS4000/5000 Model Terminal block marking A + A side A side A A side A side B + B VFS 100 VFS 200 VFS4 00 VFS5 00 4 5 4 5 B side B side 3 4 3 4 A side A side B side B side Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

NCA1

B PB + Stroke A 4-EE (NPTF) 4-DD D across flats Stroke A Stroke B 4-NT Depth ND SN + Stroke A + Stroke B LF + Stroke A + Stroke B ZB + Stroke A + Stroke B Bore size (in) MM KK A AA B BA C D DD E EA EE G J R TN WF XT Y LF P A PB PC 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 1

NCA1

Auto switch capable How to Order NC D A1 B 150 0400 + 0200 H XC11 R Mounting Bore size Auto switch Stroke B-A Dual operationSingle rod Stroke A Cushion Both ends N W/o cushions H Head end R Rod end Dimensions PA + Stroke B PB + Stroke A 4-EE (NPTF) 4-DD D across flats Stroke A Stroke B 4-NT Depth ND SN + Stroke A + Stroke B LF + Stroke A + Stroke B ZB + Stroke A + Stroke B Bore size (in)

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

B 89 A A B Section BB Coupling P.C.D.

Smooth Cylinder/Low Speed Cylinder

A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

Series KV2 Fittings

100/200 100/200 100/200 100/200 100/200 100/200 * Dimension A reference after installation. 11 Series KV2 Union Y KV2U_ _-_ _ Applicable Tube A Applicable Tube B P MB MA L2 L1 4.2 8 Q MC D1 Applicable Tube C D2 L3 D3 App.