Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

C11.2 1218 MY1H Series Mechanically Jointed Rodless Cylinder Linear Guide Type Side Support Side support A MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB MY1B 2 x J MY1H MY1H MY1B E A B C D MY1M MY1C (mm) MY1H Part no.

JIS Standard Hydraulic Cylinder

69 26 M48 x 1.5 t +0.15 0 m 40 NTH-040 22 25.4 21 10 M16 x 1.5 C 50 NTH-050 27 31.2 26 12 M20 x 1.5 Df8 63 H 0 0.15 NTH-060 32 37 31 14 M24 x 1.5 C-series 80 NTH-080 41 47.3 40 17 M30 x 1.5 C L 100 NTH-100 55 63.5 54 20 M39 x 1.5 Material: Rolled steel Bore size (mm) C L m t H Df8 Part no. 32, 40 0.016 0.043 16 CDH-04 1 62 2.5 4.8 14 50 0.016 0.043 20 CDH-05 1 76.5 3.5 4.8 18 0.016 0.043

MK

C MK2B20-10 MK2B20-20 MK2B25-10 MK2B25-20 MK2B32-10 MK2B32-20 MK2B40-10 MK2B40-20 MK2B50-20 MK2B50-50 MK2B63-20 MK2B63-50 6 8.5 Moment of inertia (kgm2) 4 MK2l20/25 10.5 2 10 103 6 6 10.5 10.5 4 Operating range 2 9 104 50 100 200 66 120 Cylinder speed (mm/s) ITo attach and detach the arm to and from the piston rod, fix the arm with a wrench or vise and then tighten the bolt.

Series MXP Precision Air Slide Table

16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 1 N = 0.2248 lbf 165 Series

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

XL-OMY0002

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

Air Slide Table Series MXQ

Nil (Example) A93 3m .

CLQ

200 100 100 1.

Round Type Hydraulic Cylinder

Yes A90V Grommet IC circuit 100 V or less No Yes No Yes No 100 V, 200 V Relay PLC 200 V or less 12 V Connector 2-wire 24 V IC circuit 24 V or less PLC Terminal conduit 100 V, 200 V Yes Relay PLC DIN terminal Grommet Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 GMY20 GMY16 GMY25 GMY32 MYB20-15-A7164 MYB16-15-A7163 RCS-8 RCS-10 P16 P12 TMY-25 TMY-32 5.1 x 3 x 1.05 4 x 1.8 x 1.1 7.15 x 3.75 x 1.7 8.3 x 4.5 x 1.9 7 x 4 x 1.5 7 x 4 x 1.5 C-6 C-7 MYMK-20-stroke Side seal assembly Polyurethane MYMK-16-stroke MYMK-40-stroke MYMK-25-stroke MYMK-32-stroke Note) Two

Heavy Duty Stopper Cylinder

200 Lower limit 100 100 Lower limit 0 0 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] RS2H63-30 The graphs indicate the values at normal temperature. (20 to 25C) = 0.2 = 0.1 1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] 63 Operating range Upper limit

MXF

160 200 50 100 150 200 Load (N) Load (N) Load (N) 8-6-5 6 Series MXF Model Selection Model Selection Step Formula/Data Selection Example Operating Conditions 1 Cylinder: MXF20-50 Cushion: Rubber bumper Workpiece table mounting Mounting: Horizontal wall mounting Average speed: Va = 300 [mm/s] Allowable load: W = 0.5 [kg] L1 = 10 mm L2 = 30 mm L3 = 30 mm Kinetic Energy Model to be used Type

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

CXT

Lead wire length (m) Load voltage Rail mounting Direct mounting Indicator light Special function Type Electrical entry Wiring (Output) Pre-wire connector Applicable load 12 to 40 32, 40 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC In-line In-line Perpendicular Perpendicular 3-wire (NPN equivalent) IC circuit 5 V A76H A96V A96 A93V A93 A72H A73H A72 A73 A73C 200 V Grommet Reed switch Solid

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size Dd9 d L L1 m t Included retaining ring I-J010C 10 8 21 M4 x 0.7 3.3 +0.048 0 3.1 8 9 CD-J010 10 3.30.030 0.060 3 15.2 12.2 1.2 0.3 Type C 3.2 CD-J010 10 3.30.030 0.060 3 15.2 12.2 1.2 0.3 Type C 3.2 I-J016C 16 8 25 M5 x 0.8 5+0.048 0 6.4 12 14 IY-J015 16 50.030 0.060 4.8 16.6 12.2 1.5 0.7 Type C 5 CD-Z015 16 50.030 0.060 4.8 22.7 18.3 1.5 0.7 Type C 5 * Retaining rings

SMC

Line A IDG5 Fitting: Oil-free one-touch fitting Piping: Urethane tuing Oil-free: Wetted parts oil-free AME AMF Oil-free regulator Oil-free solenoid valve SUP Oil-free needle valve Line A Line B Example of clean air equipment Line B Line C Fittings: Clean one-touch fittings Piping : Polyolefine tubing Clean: Oil-free, Assembled in clean room Line C Clean precision regulator Stainless steel

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C