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1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

ISO Cylinder

A B Hs Hs Hs Hs Hs Hs Hs Hs Hs Hs D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9lV D-M9lWV D-M9lAV D-A9lV 17 B A A B D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 D-F7l D-F7lW D-J79 D-J79W D-F7BA D-F79F D-A7lH D-A80H 17 A B A B D-F7lV D-F7lWV D-F7BAV D-A7l D-A80 D-A79W D-H7C 17 A B A B D-C73C D-C80C D-J79C D-A73C D-A80C 17 Auto Switch Made to Order B A B A 102 C85/C75 Series Auto Switch Proper Mounting

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Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Auto switch type Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Smooth Cylinder/Low Speed Cylinder

A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

NCQ8

A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

Bearing Type: M (Slide bearing), Bore Size: 40mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 150mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: D (Built-in), Series: A2 (Standard), Mounting: L (Axial Foot), Tube Material: Aluminum, Bore Size: 40mm, Port Thread: Rc, Stroke: 150mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: D (Built-in), Series: A2 (Standard), Mounting: F (Rod Flange), Tube Material: Aluminum, Bore Size: 80mm, Port Thread: Rc, Stroke: 150mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: Built-in Magnet, Mounting: Clevis, Type: Rubber Bumper, Bore: 25mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen.

Magnet: D (Built-in), Type: Pneumatic, Mounting: B (Basic), Bore: 25mm, Port Thread: Rc, Stroke: 150mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: M9N, Lead Wire

Inner Diameter(φ): 50, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard / With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): -, Cushion: Rubber bumper at both ends, Port thread type: NPT, Auto Switches: M9N

Inner Diameter(φ): 25, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard / With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): -, Cushion: Rubber bumper at both ends, Port thread type: NPT, Auto Switches: M9N

Inner Diameter(φ): 32, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard / With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): -, Cushion: Rubber bumper at both ends, Port thread type: Rc, Auto Switches: M9N

Inner Diameter(φ): 40, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard / With rod detent function, Environment, Applications: Standard, Operating Temperature(°C): -10～60, Operating Pressure(MPa): -, Cushion: Rubber bumper at both ends, Port thread type: Rc, Auto Switches: M9N

Magnet: D (Built-in Magnet), Mounting: B (Basic), Type: A (Air Cushion), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 50mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 150mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal