Series IDG

Accessories Nil B None (standard) With bracket Note) When symbol B is indicated, a bracket assembly with a part number shown in the table below is included as an accessory.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

6.6 6.6 9 11 25 30 35 40 50 60 39 43 54.5 65.5 80 98 28 33 40 49 60 74 3.2 3.2 4.5 4.5 6 8 202-TD8 (Pin O.D.)

Compressed Air Preparation Filter

20 0.19 b 0.3 37 30 0.39 b 0.48 19 40 0.79 b 0.8 1.3 1 Compared with existing products (AFFmC, AMmC, and AMDmC series) 2 Compared with existing products (AMFmC series) 50 1.25 b 1.3 4 60 1.50 b 2.0 25 Color-identifiable elements This eliminates the accumulation of condensate.

AC

AWD ITV VBA VE VY G AL Model Port size B J A F G H I C D E 100 100 60 60 73 73 230 230 431(481) 437(487) 59 63 166 162 117 117 3-M5 X 0.8 X 6 3-M5 X 0.8 X 6 AL800-12 to 14-1 AL900-20-1 11/4 / 11/2 2 ( ) With float switch 1.17-10

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Function Coil voltage Dust-tight, Water-jet-proof (IP65) 1 2 3 4 5 6 Symbol Specifications DC AC 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC A (0.4 W) Note 1) Nil Standard B Dust-protected (0.95 W) High-speed response type B (0.95 W) High-pressure type (1.0 MPa) K Note 1) Refer to page 522 for power consumption of AC type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Function Coil voltage Dust-tight, Water-jet-proof (IP65) 1 2 3 4 5 6 Symbol Specifications DC AC 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC A (0.4 W) Note 1) Nil Standard B Dust-protected (0.95 W) High-speed response type B (0.95 W) High-pressure type (1.0 MPa) K Note 1) Refer to page 522 for power consumption of AC type.

Slider Type Ball Screw Drive/11-LEFS Series

300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 30 50 Lead B Lead B 40 Work load: W [kg] Work load: W [kg] 20 30 Lead A Lead A 20 Lead H 10 Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 30 60 Lead B Work load:

MQQ

+ Stroke Bore size (mm) Stroke range (mm) A B L LD LG LH LY LH 10 10 to 40 44.3 31.5 8 4.5 2.8 19 4-LD X X LG Y Y RE A B LT 16 10 to 60 51.2 34 10 6.6 4 24 LS + Stroke LX LZ 20 10 to 60 54.7 37.5 10 6.6 4 26 A + Stroke REC 25 10 to 50, 75, 100 61.2 42 12 6.6 4 30 28 10 to 50, 75, 100 67.7 48.5 12 6.6 4 33 25, 28 CX L B + Stroke Bore size (mm) LS LT LX LY LZ X Y CY 10 19.5 2 38 33.5 48 8 5

MQQ

(mm) Stroke range (mm) A B L LD LG LH LY LH 10 10 to 40 44.3 31.5 8 4.5 2.8 19 4-LD X X LG Y Y RE A B LT 16 10 to 60 51.2 34 10 6.6 4 24 LS + Stroke LX LZ 20 10 to 60 54.7 37.5 10 6.6 4 26 A + Stroke REC 25 10 to 50, 75, 100 61.2 42 12 6.6 4 30 28 10 to 50, 75, 100 67.7 48.5 12 6.6 4 33 25, 28 CX L B + Stroke Bore size (mm) LS LT LX LY LZ X Y CY 10 19.5 2 38 33.5 48 8 5 M LY 16 22 3.2 48

LX

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

CY1

32 7 40 93 148 64 26 CY1R50 25 110 8.6 10 M8 x 1.25 15 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 171 60 48 70 47 10 60 121 188 94 32 With auto switch CY1R6H .

Cylinder with Lock

0.6 55 50 70 15 76 96 13.5 20 19 11 353.5 393.5 Rotating Angle Bore size [mm] A B A + B + 90 32, 40 25 45 160 50, 63 40 60 190 80, 100 30 55 175 32 C96N Series Construction (Double Rod) @0!

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

Environment

Force [N] 1 to 4 20% to 85% 400 LEY32 5 to 20 35% to 85% 300 21 to 30 60% to 85% 200 For vertical loads (upward), set the pushing force to the maximum value shown below, and operate at the work load or less. 100 0 10 20 30 40 50 60 70 80 90 Max. 85% Model LEY25 LEY32 LEY25A Lead A B C A B C A B C Work load [kg] 2.5 5 10 4.5 9 18

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-H7NF D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W A B B B B B B A A A A A Hs Hs Hs Hs 20 25 32 40 50 63 80 100 35 Series MGG Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height/End Lock Type: With Rod End Lock A B 8.5 Hs 11.5 16 Auto switch D-C7/C8 D-H7 A B 12 Hs 14.5 Courtesy of Steven Engineering

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

resin Wear ring B !

Vacuum Unit

C A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown

energy saving effect

Applicable model Rated current [A] Sensitivity of leak current [mA] Short circuit display method HRSH100--20-B 30 Earth leakage breaker HRSH150--20-B HRSH200--20-B 40 HRSH250--20-B 50 HRSH300--20-B 30 Mechanical button * 400 V type is equipped as standard.