VQZ1000/2000/3000

(2) Standard: 1W AC High pressure: 1W Low wattage: 0.5 W Series Configuration Model C [dm3/(s.bar)] b Cv C [dm3/(s.bar)] b Cv 4/2 5/3 (A/B EA/EB) 12 or less 15 or less 29 or less VQZ1120 0.13 0.26 0.54 0.13 0.20 0.54 Metal seal 42 Single 12 or less 15 or less 34 or less VQZ1121 0.19 0.40 0.71 0.26 0.40 0.90 Rubber seal 2 position 10 or less 13 or less 13 or less VQZ1220 0.13 0.26 0.54

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Manual override (Pitch) P = 10.5 9 (Pitch) P = 10.5 12.5 L2 3.5 L1 (Station n) (Station 1) (Station 1) (Station n) (Light/surge voltage suppressor) (Light/surge voltage suppressor) 43.5 [50.5] + + + + + + + 28.1 A A B B 15 15 12 12 B B A A 1 1 3 3 (Pitch) P = 10.5 13.5 (Pitch) P = 10.5 M3 x 0.5 (A, B port) M3 x 0.5 (A, B port) 14.5 L plug connector (L) M plug connector (M) M8 connector (W0

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K A B TX TZ H + Stroke ZZ + 2 x strokes (mm) Bore size Stroke range A AL B C D E F G J V W K KA M MM (mm) (mm) -0125 25 to 1000 50 47 143 115 32 71 43 15 M14 x 1.5 15 17 15 27 13 M30x 1.5 0140 30 to 1000 50 47 157 128 32 71 43 15 M14 x 1.5 15 17 15 27 13 M30 x 1.5 0160 35 to 1200 56 I 53 177 14' 38 78.5 42 18 M16 x 1.5 15 20 17 34 15 M36 x 1.5 N P R 5 30.5 112 1 98 30.5 112 1.5 98 34.5 314

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Z + Stroke S + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) 28 28 NA 102.5 101.5 45 45 20 20 NB LB 21.5 23 Bore size A M4 x 0.7 D GC B F H NN Z WW WA WB X 6 6 MM GB GA C S LC 5.5 5.5 Y 9 9 LH 14 14 LT 2.3 2.3 LX 33 33 LY 25 25 LZ 42 42 15 15 16 10 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 29.5 29.5 4 5 74.5 73.5 M10 x 1.0 22.9 22.9 13.4 13.4 M5 x 0.8 M12 x 1.0 5 B Air Cylinder CJ2 10-/1121

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Title not found

Cable length (L) A1 (17.7) (10.2) 1 2 5 6 (14) (18) 1 3 5 8 A B C 1.5 m 3 m 5 m 8 m A6 B1 B3 A1 A3 B6 (13.5) 1 2 5.7 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 10 m LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 8 A B C 15 m Actuator side Controller side 20 m 5.5 6.3 5.7 (14.2) Connector C (Terminal no.)

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mWV D-M9mAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mW 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9mA 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7m/A80 D-A7mH/A80H D-A73C/A80C 5 10 15 + 10

10

(Detection at stroke end) and Its Mounting Height [mm] Auto Switch Proper Mounting Position (Standard type) Auto switch model D-Y59l D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 D-A9l D-A9lV D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5

Vacuum Unit

(Tightening torque: 0.15 Nm) 15) For products with a switch, mount the switch assembly. (Be careful not to drop the O-ring. Tightening torque: 0.08 to 0.10 Nm) Clip How to remove the junction box B The side with Connector recess square hole faces the body. Fig.1 Fig.2 Fig. 3 Protrusion of junction box B Fig. 2 Clip in.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

60534-1:2005 IEC 60534-2-3:1997 JIS B 2005-1:2012 JIS B 2005-2-3:2004 Equipment: JIS B 8471, 8472, 8473 Cv Process fluid control equipment 2.

ISO Standard Hydraulic Cylinder

4.5 7 6 8 10 14.5 A 15.5 24 24 26 29 32.5 B 9.5 12 11 13 15 19.5 A 16 16 18 21 24.5 B 4 3 5 7 11.5 A 12.5 12.5 14.5 17.5 21 B 0.5 0 1.5 3.5 8 A 16.5 16.5 18.5 21.5 25 B 4.5 3.5 5.5 7.5 12 32 40 50 63 80 100 32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.

Electric Actuator with Integrated Guide

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

0.4

screw R R B B B B B B B B X X P P 7.7 18.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view

7

flow ratio to be b = 0.3.

LEC-OM02904

(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

V

Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8 ZPT40U C 40 43 18.5 24.5 3 15 50.5 4.5 15 40.5 6.5 3.3 ZPT16 U C 16 18 12.5 17.5 20 38.5 25 43.5 3.5 1.2 ZPT50U C 50 53 19.5 25.5 3 15 51.5 4.5 15 41.5 7.5 3.8 D E E P T Y P E D E E P T Y P E G:M5x0.8 G:M6x1 Model A B C D E F E F Y H:M6x1 H:M6x1 H O W T O O R D E R S E E N E X T P A G E Model A B D E Y C