Air Cylinder

Contents 20 CBG1N20-PS Set of the nos. @5, @6, @7, @8 and grease pack 20 CBG1N20-PS-W Set of the nos. @5, @6, @7, @8 and grease pack CBG1lN Rubber bumper type CBG1lN Rubber bumper type 25 CBG1N25-PS 32 CBG1N32-PS 40 CBG1N40-PS 25 CBG1N25-PS-W 32 CBG1N32-PS-W 40 CBG1N40-PS-W Order seal kit in accordance with the bore size. * The seal kit includes a grease pack (10 g).

Integrated Controller

/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2 0 0 Speed: V [mm/s] 200

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

(kg) Data Pitch moment Yaw moment Roll moment W L2 A2 L1 A1 L3 A3 Mp Mr Static moment Dynamic moment My W W W L2 A2 L3 A3 L1 A1 Mp Mr My W W W W Mey Mep We We L3 A3 L2 A2 W Note) It is not necessary to consider load factor when using this device vertically perpendicular.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

2–4

D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type.

Magnet: D (Built-in), Type: Pneumatic, Mounting: D (Double Clevis), Bore: 32mm, Port Thread: Rc, Stroke: 25mm, Cushion: A (Air Cushion), Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 25mm, Cushion: A (Air Cushion), Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State, Gen.

Magnet: Built-in, Type: Pneumatic, Mounting: Double Clevis, Bore: 32mm, Port Thread: Rc, Stroke: 25mm, Cushion: Air Cushion, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Leadwire or Prewired Connector: -, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Boss-Cut, Rod Trunnion, Bore: 32mm, Port Thread: Rc, Stroke: 25mm, Cushion: Air Cushion, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Leadwire or Prewired Connector: 0.5m Cord Length, M8-4 Pin Connector, Number: -

Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

Compact Cylinder

(mm) D-A9 D-M9 D-F9 W D-F9BAL Auto switch model Symbol A B W A B W A B W Hs 22 24 27 30 36 41 20 25 32 40 50 63 15.5 15.5 19 20 13.5 15.5 8.5 10.5 12 12 18.5 20.5 11.5 11.5 15 16 9.5 11.5 5.5 7.5 9 9 15.5 17.5 3.5(1) 14.5 14.5 18 19 12.5 14.5 9.5 11.5 13 13 19.5 21.5 -9.5 -7.5 -6 -6 0.5 2.5 -0.5 1.5 3 3 9.5 11.5 5.5(3) Bore size (mm) 7 (4.5) 7 (4.5) 13.5(11.5) 15.5(13.5) The dimension inside

CQS

(N) Allowable lateral load W (N) Allowable lateral load W (N) 2025 Data 20 Caution 20 16 Snap Ring Installation/Removal 16 1.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

XLAQ/XLDQ

Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface

MY1

3 e w !6 r !9 Note) With top cover removed !

Compact Type

Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

2 r w e i !0 !5 t u y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR2 !4 q !3 @0 o !2 !1 !9 w !8 i !6 !7 i e r !5 !0 y u t Component Parts Note Description Material Note Description Material No. q w e r t y No. !1 !

Compact Type Dual-Rod Cylinder Series CXSJ

Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (

10

Contents 32 MBB32-PS-W 40 MBB40-PS 50 MBB50-PS 63 MBB63-PS 80 MBB80-PS 100 MBB100-PS 40 MBB40-PS-W 50 MBB50-PS-W 63 MBB63-PS-W 80 MBB80-PS-W 100 MBB100-PS-W Set of the nos. @9, #0, #1, #2, #3 Set of the nos. @9, #0, #1, #2, #3 * Seal kits consist of items @9 to #3, and can be ordered by using the seal kit number corresponding to each bore size. * Trunnion type should not be disassembled.

Compact Cylinder with Solenoid Valve/

Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)