MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

C76

Built-in magnet CG1 Nil D None Built-in magnet MB Option Type MB1 A B Bottom side mounting Front side mounting R2 Stainless steel piston rod and rod end nut CA2 CS1 Stroke Mounting style Bore size C76 Symbol Standard stroke (mm) Bore size (mm) 32 40 Mounting Front nose Front nose in line port Max. stroke (mm) 200 200 10, 25, 40, 50, 80, 100, 125, 160, 200 F Y C85 C95 CP95 NCM NCA Example

C76

B A 32 6 7 7 8 40 11 13 12 14 Aim at this number.

Series CQ2

variations A wide range of 15 sizes from 12 to 200 Bore size (mm) Compact cylinder series 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 CQ2 Large bore CQ2 CQS Refer to N320 "CQ2" and CAT.E256-A "CQS" regarding series marked with a "" symbol.

Thermo-chiller

Cable size Crimped terminal on the thermo-chiller side Applicable model HRS100-A -20HRS100-W -204 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 HRS150-A -20HRS150-W -2040 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-A -40HRS100-W -403-phase 380 to 415 VAC (50/60

Series SV

A A A A A 98.2 5.5 A B A B 58.9 17.5 29.6 56.3 12.2 Manual override Press and turn for the locking type.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Inclined Operation (At a right angle to operating direction) 25 60 32 105 40 200 Bore size (mm) Allowable load weight (WA) (kg) Data 3.4 + Lo 4.2 + Lo 5.1 + Lo 8.

SV

91.9 A A A A B A B A B A B A Dimensions are the ones for SV1300--.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

(pages 5, 6) Select a model based on the workpiece mass and speed while referencing the speedwork load graph. 0 0 600 400 800 200 1000 1200 Speed: V [mm/s] Selection example) The LEKFS25EB-200 can be temporarily selected as a possible candidate based on the graph shown on the right side. (LEKFS25/Step motor) Step 2 Check the cycle time.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

MY2

If driving a load such as a relay that generates a surge voltage, use a contact protection box. Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if the surge is applied repeatedly.

VFS

Tightening torque for terminal: 0.6 Nm Series VFS4000/5000 Model Terminal block marking A + A side A side A A side A side B + B VFS 100 VFS 200 VFS4 00 VFS5 00 4 5 4 5 B side B side 3 4 3 4 A side A side B side B side Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M There is no polarity.

CY1

Do not use a load that generates surge voltage. If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box.

1.63

speed of 200 mm/s.

HRS100/150

breaker handle is equipped as standard for the 400 V type only. 272 508 Power cable entry (Hole 40) (Grommet with membrane) 583 106 Thermo-chiller Standard Type HRS100/150 Series Dimensions HRS100/150-A-20 (Air-cooled 200 V type) HRS100/150-A-40 (Air-cooled 400 V type) Anchor bolt fixing position A HRS100/150-W-20 (Water-cooled 200 V type) HRS100/150-W-40 (Water-cooled 400 V type) Anchor

Compact Cylinder Series NCQ8

Even if a proper plier (tool for installing type C snap ring) is used, it is likely to inflict damage to a human body or peripheral equipment, as a Allowable kinetic energy 1000.0 100.0 Load weight (lbs) 250 (2-1/2") 200 (2") 10.0 150 (1-1/2") 106 (1-1/16") 1.0 075 (3/4") 056 (9/16") 0.1 1 10 100 Piston speed (inch/sec) Allowable lateral load at rod end Without Auto Switch With Auto Switch

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 Do not use a shock absorber and air cushion together. 100 1 2 3 4 5 10 20 50 40 1001 2 3 4 5 10 20 30 4050 30 Air Cushion Stroke (mm) m3 max. m1 max. m2, m3 max.

Floating Joint

X530 40 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.1 200 JAF200-45-150-X530 45 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.2 Foot Type: JAL JAL180 200--X530 F R K M Center of sphere E 4 x J U U D T C 60 G P A H L B Dimensions (mm) Maximum operating tensile and compressive force (N) Center of Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B C D E F

Cylinder with Lock

C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 36 MWB Series Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol: A24 Symbol: A25 Symbol: A26 Symbol: A27 DA MM DA MM MM MM 30 30 H AL A H L A H AL H AL L K LB K Symbol: A28 Symbol: A29