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Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510

4.5 58.4 56 30 30 150 (159) 178 (187) 50 79 20 9 50 6 72.4 64 36 36 173 (185) 205 (217) 63 96 20 11 60 8 90.4 74 46 46 178 (190) 215 (227) Bore size Z ZZ 20 96 (104) 117 (125) 25 99 (107) 120 (128) 32 105 (113) 129 (137) 40 115 (124) 143 (152) 50 131 (143) 163 (175) 63 136 (148) 173 (185) Clevis (D) with Pivot Bracket 80, 100 4 x TF B TT TH TW TY TV TX ZZ + Stroke Z + Stroke Male Thread

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.

VHS 16.5 1.5 1.5 Max. 6 18.5 3 (Pilot exhaust port) M5 x 0.8 PE R2 P R1 (121.5) Symbol (105) 86.5 (B) 2 (A) 4 13.6 B A 14.7 13.6 12 14 3 (R2) 1 (P) 5 (R1) 35 10.8 17 19.8 35 10.8 0.5 MPa supply 1.6 18 28 25 21 3 13 T.T. O.T. P.T.

of Greene, Tweed Technologies, Inc. 11 Aluminum High Vacuum Angle Valve XLF/XLFV Series Specifications Model XLF(V)-16-2 XLF(V)-25-2 XLF(V)-40-2 XLF(V)-50-2 XLF(V)-63-2 XLF(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLF 5 to 60 (High-temperature type: 5 to 150) XLFV 5 to 50 Operating pressure [Pa(abs)] 1 x 105

Model 10 13 16 J K: 4 K: 6 G H G H Model ZPRB 6-0-A8 G H G H G H L M L M 79.5 15 53.5 ZPRB10-0-A8 ZPRB10-0-A10 110.5 56.5 63.5 65 99 23 61 97.5 95 43 10.4 20.6 12.8 21.6 ZPRB15-0-A8 ZPRB20-0-A10 115.5 61.5 133 135.5 137 73.5 75 71 51 ZPRB25-0-A8 ZPRB30-0-A10 125.5 71.5 10.4 20.6 12.8 21.6 143 145.5 147 83.5 85 81 ZPRB40-0-A10 179 181.5 183 93.5 95 91 77 193 ZPRB50-0-A10 101 189 103.5 191.5 105

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10 MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B50 MY1B63 MY1B80 MY1B100 35

to 300 41.5 53.5 25 30 to 100 27 62.5 39 50.5 (2) 4.2 105 to 400 52 64 32 30 to 100 30.5 65.5 42.5 53.5 (2) 4.9 105 to 500 60.5 72.5 The values in the table above are to be used as a reference when mounting auto switches for stroke end detection.

Click here for details Port size (Rc) 06 08 10 12 16 20 24 3/4 1 1 1/4 1 1/2 2 2 1/2 3 Differential pressure indication Nominal filtration 0 4 5 005 010 020 074 105 5 m 10 m 20 m 74 m 105 m None Differential pressure indicator Differential pressure indication switch Note) Note) N.C. and N.O. common Note) The paper elements for water-glycol or emulsion is 10 m only.

(Including O-ring for element) FH FH With relief valve Without relief valve 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Model Element size HOW FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 65 x 90 82 x 133 104 x 177 104 x 177 132 x 212 132 x 212 155 x 193 EM520-074N EM620-074N EM720-074N EM820-074N EM920-074N

.: 4 and 5/32" M5 x 0.8 (A, B port) 15 Stations n L1 L2 3 50 42 6 81.5 73.5 8 102.5 94.5 10 123.5 115.5 4 60.5 52.5 5 71 63 7 92 84 9 113 105 11 134 126 12 144.5 136.5 13 155 147 14 165.5 157.5 15 176 168 16 186.5 178.5 17 197 189 18 207.5 199.5 19 218 210 2 stations 39.5 31.5 20 stations 228.5 220.5 512 10-SYJ3000 Manifold specifications Type 46 manifold: Side ported / 10-SS5YJ3-46Stations

(variations as much as 30%) There may be large changes depending on the ambient environment. + Minimum length [mm] with bracket T Auto Switch 32 40 50 63 80 100 D-Z7/Z8, D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA 80 85 90 90 95 100 60 55 85 90 65 90 70 100 75 105 85 110 Mounting and Movement of Auto Switches Caution!

Nylon Urethane L2 L1 M KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 1 4 1 4 3 8 3 8 3 8 2.6 6.8 16.2 25.6 35.4 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 M12 X 1 M14 X 1 M16 X 1 M20 X 1 M22 X 1 2.6 32 36 42 79 105 14 17 19 24 27 40.5 42.7 49.4 53.9 56.1 6.8 13.1 20.4 30.4 Straight union: KCH Effective area (mm2) Weight (g) Tube O.D.

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

N.O. 105 (Without sub-plate: 75) Base mounted (With sub-plate) 1 8 Note) Weight stands for grommet type. Option Description Foot bracket Part no. DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

2n-Rc , 3 8 1 2 Pilot valve manual override Double check spacer U side Individual SUP spacer Air release valve Pressure switch Air release valve Pressure switch Stations Outlet for check Air filter regulator D side 105 Control unit Rc 3/4 (Po port) 209.5 n: Stations Pilot EXH port: PE 2-Rc 1 8 Stations 4 5 6 7 8 9 10 Formula L1 = 43 x n + 70 3 199 211 L L1 L2 L3 (MP) L3 (AP) 242 254 428.5

AXT632-54-1 AXT632-54-2 AXT632-54-3 AXT632-54-5 AXT632-54-6 AXT632-54-7 AXT632-54-8 AXT632-54-9 AXT632-54-10 AXT632-54-11 Mounting bolt Size M6 x 45 with SW M6 x 18 with SW M6 x 55 with SW M6 x 85 with SW M6 x 100 with SW M6 x 105 with SW M6 x 125 with SW M6 x 140 with SW M6 x 145 with SW M6 x 160 with SW Option mounting diagram Interface regulator Interface regulator Double check spacer

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing April, 2001 D-SMC.L.A. P-80 (D) This catalog is printed on recycled paper with concern for the global environment.

P. 105 DY Use to branch line in the same direction from female thread and in 90 direction. Male elbow Bulkhead union P. 104 DL Use to pipe at right angle to female thread portion. Most general type. P. 105 DE Use to junction connection of tubes for panel. Union tee Bulkhead connector P. 104 DT Use to branch connection of tubes of both sides 90 direction.