CL Without rod boot With rod boot Bore size (mm) M MM N S W P H ZZ e f h ZZ l 51 58 58 71 72 110 110 120 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 40 50 63 80 100 125 140 160 11 11 14 17 17 27 27 30.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 215 237 254 296 315 376.5 385 423.5
SUP side pressure (P1) Specifications Max. operating pressure Min. operating pressure Ambient and fluid temperature Flow rate characteristics: C Max. operating frequency 0.7 MPa 0.15 MPa 5 to 50C 1.8 dm3/(sbar) 180 c.p.m Dimensions Residual pressure release Manual override Single unit When the manifold is mounted. 120 180.2 180.2 10 55 15.8 120 20 Perfect output port A B 80 65 Manifold output
CX Dimensions Dimensions DM5 x 0.8 Relief port (Vacuum port) -X 20Data FB B + Stroke A + Stroke 5 10 FB B + Stroke A B Bore size (mm) FB A + Stroke 50 stroke or less 66 67.5 109 109 117.5 117.5 121 141 51 stroke or more 97.5 99 114 114 129 129 148 166 20 25 32 40 50 63 80 100 19 20 22 22 23 23 24 29 Other dimensions are the same as standard type. 66 67.5 71.5 78 83 88 102.5 120 A Over 30
125 150 175 M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l x 165l M5 x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 150l x 175l 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 M6 x 90l 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 M10 x 110l -10D -15D -15D -15D x 95l x 115l
) 80(136) 86(147) NPT1 107(182) 120(205) 130(221) LLB NPT1 1/2 161(273) 173(294) 181(308) 226(384) 258(438) 297(504) NPT2 AD 300(510) 353(600) 406(690) Note) Air flow capacity for each dew point is indicated.
With or without the terminating resistor (120) of this product can be set by the operation display panel.
m) AT IDF IDU SFB 20 02 0 IDF FS Clean gas strainers made of an element (120 m, stainless steel 316 sintered metal) to protect regulators and vacuum regulators are also available.
155 180 90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB32-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB40-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB50-10D -15D -20D
A B C E 141 120 85 1/2 725 410 IDU6D IDF6D 165 445 165 141 915 IDU-BP6C IDF-BP6C 1/2 141 3/4 120 85 755 410 196 IDU8D IDF8D 445 196 141 1045 IDU-BP8C IDF-BP8C 3/4 152 3/4 1 131 91 815 405 IDU11C IDF11C 196 445 196 1155 152 IDU-BP11C IDF-BP11C 3/4 1 175 131 91 890 405 222 IDU15C IDF15C 445 222 175 1230 IDU-BP15C IDF-BP15C 1 1 183 91 70 970 405 IDU22C1 IDF22C1 222 445 222 1445 71 IDU-BP22C
155 180 90 95 100 105 110 115 120 125 130 165 190 100 105 110 115 120 125 130 135 140 175 200 115 120 125 130 135 140 145 150 155 190 215 CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB32-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB40-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB50-10D -15D -20D
Refer to page 100 for part numbers. 109 Made to Order/Dust Seal Specification Series LJ1H10 Dimensions/LJ1H10 (X70) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting groove The two grooves at the bottom cannot be used. 6-M5 x 0.8 thread depth 9 90 203 (258) Work piece mounting reference plane 80 Stroke + 115 (table movement
PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB19 VRF1 50 Hz PB20 VRF2 50 Hz PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0001 ( ) PB28 CDT 100 ms PB33 VRF1B 60 Hz PB34 VRF2B 60 Hz (b) OFF OFF ON 63.4 CDT100ms 100 4.0 10.0 4.0 120 84 120 3000 4000 3000 20 50 20 50 60 50
(b) OFF ON OFF 63.4% CDT = 100 ms 100 50 100 4.00 10.00 4.00 120 84 120 3000 4000 3000 20 50 20 1 50 60 50 1 50 60 50 1 0.20 0.15 0.20 1 0.20 0.15 0.20 2 20 30 20 2 20 30 20 2 0.10 0.05 0.10 2 0.10 0.05 0.10 (2) (a) PB06 GD2 4.00 [] PB08 PG2 120 [rad/s] PB09 VG2 3000 [rad/s] PB10 VIC 20 [ms] PB29 GD2B 10.00 [] PB30 PG2B 84 [rad/s] PB31 VG2B
115/00 120/60 0,01s 0.018 115/60 120/60 0.014 0_014 .011 liho lo Dedr.rgiz: (S@nds) tLts: R.9or'6 liir'.6 et r|easurd with solsoid5 al 70'F (21iC.), 10o% voltags, srtd tr vstu clan ed lobdtod. At tin6s ft mGUd by mizirE ar rhe 160 ooint m f|o sm waw.
I~} a: D-A59W -25 60 70 65 11 0 115 120 1 pC. 15 .. I ~ .pa. (':'!." 15 . I~ _OJ ~I~) -25 60 70 65 11 0 115 120 OF5J5 1 pC. 10 :!l. 2 pes , ~~~
The rotation range under the adjustment of an angle at 120 is indicated below. The rotation range under the adjustment of an angle at 120 is indicated below. R o t a ti o n r a n g e e R g Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clock-wise direction.
The rotation range under the adjustment of an angle at 120 is indicated below. The rotation range under the adjustment of an angle at 120 is indicated below. R o t a ti o n r a n g e e R g Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clock-wise direction.
LECSB2-S 200 to 230 V V V C1 LECSC1-S 100 to 120 V V C2 LECSC2-S 200 to 230 V V V S1 LECSS1-S 100 to 120 V V S2 LECSS2-S 200 to 230 V V V Note 1) The motor and encoder cables are included.
9 P3313128 P3313228 MHR3-10 MHR3-15 Description Cover Main parts MA D533 MHR3/MDHR3 Series Nominal Size 10 Without auto switch: MHR3-10R 3 x M3 x 0.5 thread depth 6 P.C.D.24 (Mounting thread) 120 120 25 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 44 29 9h9 0 0.036 33.5 1 5 4 16 (36.5) 12 2 2 3e8 0.014 0.028 Open: 11 Closed: 8 8 0 0.05 4 3 x M3 x 0.5 thread depth 6 (Thread
PP-700-5 PP-700-15 PP-700-30 PP-700-60 PP-700-100 1 1 1 3 5 5 15 30 60 100 30 60 60 120 120 0.2 0.3 0.3 0.5 0.7 0.4 0.6 1.0 2.0 3.5 PPMOUNTING STYLE BARBED FITTING (FM & PM ONLY) VALVE FUNCTION RANGE (PSI) FM = FLUSH MOUNT PM = PANEL MOUNT PT = PIPE THREAD MM = MANIFOLD B80 = NYLON 1/16" I.D. TUBE B85 = NYLON 1/8" I.D.