Specification: Clean Series, Vacuum Suction, Bearing: Slide Bearing, Bore Size: 10mm, Stroke: 20mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

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COM. () 20 COM.

Table of Contents

SB) 4 7 7 5 5 5 3 7.5 5 MRHQ 3 5 3 90 90 5 90 5 AI Misc. 20 20 20 20 D(3-SA) 20 20 20Section SD SD MHSJ3-63D MHSJ3-80D 4 10 4 11 3 5 3 5 90 90 5 20 20 20 20 (mm) AI 54 57 70 79 93 L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 M 2 2 2 3 4 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 NB

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Table of Contents

20 20 1.

ISO Cylinder

GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Rotary Actuator/Vane Type

, 30, 40 RoHS How to Order B S E 20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

Air Cylinder

10.5 40 41 46 20 77 90 102 115 140 12.5 25 37.5 50 75 181 194 206 219 244 27 10.5 Symbol Stroke (mm) With Air Cushion Boss-cut Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 25 8 20 M5 x 0.8 95 32 12 20 M6 x 1 97 40 13 21 M8 x 1.25 125 Bore size WA 20 13 25 13 32 13 40 16 Bore size ZZ Without With rod boot 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 20 103 130 143

e-Rodless Actuator

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Made to Order

15 15 16 16 20 20 22 22 28 35 The standard stroke for 12 and 16 is 100 st.

Electric Actuator/Slider Type

30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

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(mm) Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 Bore size S TD TT TX TY TZ Z ZZ 20 62 8 10 32 32 52 36 116 Bore size ZZ 20 103 25 8 20 M5 x 0.8 95 25 62 9 10 40 40 60 40 120 25 107 32 12 20 M6 x 1 97 32 64 9 10 40 40 60 40 122 32 109 40 13 21 M8 x 1.25 125 40 88 10 11 53 53 77 44.5 154 40 138 * When female thread is used, use a thin wrench when tightening the piston

Auto Switch Guide

/J59/J51 Grommet Tie-rod Terminal conduit 10-20-36 D-G39C/K39C D-M9N/M9P/M9B 10-20-37 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B D-F9G/F9H 10-20-40 Direct Grommet D-Y59A/Y59B/Y7P 10-20-38 D-Y69A/Y69B /Y7PV 10-20-41 D-Y7G/7H 10-20-39 D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 10-20-42 Band Grommet D-G59W/G5PW/K59W 10-20-43 2-color indication D-F79W/F7PW/J79W 10-20-44 Solid State Switch Rail Grommet D-F7NWV/F7BWV

NCQ8

Weight Unit: OZ, ( ): g Caution Auto switch model 20 (0.5) D-M9N(V) D-M9B(V) D-M9P(V) Operating Precautions 0.28 ( 8) 0.25 ( 7) 0.28 ( 8) Lead wire length in(m) 118 (3 ) 1.45 (41) 1.34 (38) 1.45 (41) Fix the switch with the existing screw installed on the switch body.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

, 30, 50, 70, 100, 200 How to Order Size 10 20 30 50 MSQ A 10 A M9B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com High precision type MSQ B 10 A M9B Basic type Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

2–4

Variations Standard stroke (mm) Series Bore size (mm) Cushion 5 10 15 20 25 30 35 40 45 50 75 100 12, 16 20, 25 Rubber cushion CQM 32, 40 50 Compact Cylinder/Guide Rod Type 12, 16, 20, 25, 32, 40, 50 Series CQM How to Order Without auto switch B 20 10 CQM B 20 10 M9B S CDQM With auto switch With auto switch Number of auto switches Mounting Bore size 12 16 20 25 32 40 50 Nil S n 2 pcs. 1 pc