MTS

(N) 32 12 0.3 0.5 Deflection (mm) Deflection (mm) MTS32-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st 0.2 MTS12-100 st 75 st 0.1 50 st 25 st 0 50 100 0 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st Deflection (mm) Deflection (mm) 0.2 0.2 MTS16-100 st 75 st 50 st 25 st 0.1 0.1 0 50 100 150 0 10 Lateral load (N) Lateral

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 32 to 50 25, 50, 75, 100, 125, 150, 175, 200 Manufacturing of Intermediate Strokes Refer to page 24 for cylinders with auto switches.

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 63 80 100 50 54 47 38 42 35 128 128 148 28 28 48 110 140

3

75 23.5 43 25.5 45 40 65 47.5 72.5 20 Extended M With arm CK CLK Retracted 25 20H7 (Arm side I.D

Possible to transfer a workpiece at low-speed.

Auto switch model Lead wire length (m) Load voltage Pre-wired connector Applicable load DC AC Indicator light Electrical entry Wiring (Output) Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 3 (L) 1 (M) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 M9N M9P M9B M9NW M9PW M9BW M9NA1 IC circuit 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

XL-OMY0002

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

Stopper Cylinder

Cylinder model C D Mounting bolt part no. *1RSQB12-10m 5 45 CQ-M3X45L RSQB16-10m 7.5 55 CQ-M3X55L -15m 60 X60L RSQB20-10m 7 Example) CQ-M3X55L 2 pcs. 55 CQ-M5X55L -15m 60 X60L -20m 65 X65L RSQB32-10m 9 Mounting bolt 60 CQ-M5X60L -15m 65 X65L -20m 70 X70L RSQB40-20m 9.5 C D 75 CQ-M5X75L -25m 80 CQ-M5X80L -30m 85 X85L RSQB50-20m 9 75 CQ-M6X75L -25m 80 X80L -30m 85 X85L *1 Be sure to use the

ZCUK

C S D 16 D 20 ZC UK M9B With auto switch Auto switch Built-in magnet Nil Without auto switch Style (Tubing method in vacuum side)/ (Rod end shape) Refer to the table below for applicable auto switches.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 19.5 19.5 15.5 . 40 40 34 17 17 13 60 60 60 40 32 25 20 20-0.033 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 22 200 to 1000 32-0.039 0 66 21 52 247 217 204 200 191 P S H2 H1 Bore size MM 8 6 6 5 N I K ZZ Z NN NA Stroke range 40 32 25 20 26.5 22 20 20 51 42.5 34.5 30 236 181 159 146 146 7 200

1.63

Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Auto switch model Lead wire length (m) Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1 M9BA1 P3DWA M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 M9PAV1 M9BAV1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

Compact

CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12 MXZ12Standard (Pilot port location: Front) 4 x 6 4 x M3 x 0.5 depth 5 17 14 14 2 x 3.4 (Through holes for

RZQ

Full stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 Bore size (mm) Note First-stage stroke Note 2) 5 mm to "Full stroke" 5 mm RS Q G Note 1) RZQB (through hole type) is only available for full strokes 25, 50 and 75. Note 2) Available in 1 mm increments.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Auto switch model Lead wire length (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 1 (M) 5 (Z) 3 (L) None (N) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-

Solid State Auto Switches

Purpose Type, 2-color Indication Type, 2-color Indication Type with Diagnostic Output, Water Resistant 2-color Indication Type, Hygienic Type, Timer Equipped Type, Magnetic Field Resistant Type, Heat Resistant Type, Wide Range Detection Type, Trimmer Auto Switch Solid State Auto Switch Variations Function Type Electrical entry Auto switch model Page Auto switch mounting style D-M9N/M9P/M9B

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

15

Load voltage Wiring (Output) Auto switch model Lead wire length (m) Indicator light Electrical entry Pre-wired Type Special function connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) 1 (M) M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1 M9BA1 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 M9PAV1 M9BAV1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN