Bore Size: 32mm, Control Method: Brake and Scale, Stroke: 1600mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 15mm, Stroke: 150mm, Piping Port Position: Port Location c, d Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 32mm, Stroke: 150mm, Piping Port Position: Port Location c, d Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 15mm, Stroke: 200mm, Piping Port Position: Port Location c, d Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 15mm, Stroke: 300mm, Piping Port Position: Port Location c, d Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 15mm, Stroke: 300mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 15mm, Stroke: 400mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 32mm, Stroke: 150mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 15mm, Stroke: 200mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

This is a legacy product, and replaced byMGQL20TN-20-Y59AL

Specification: 12 (Clean Series, Relief Type w/Specially Treated Sliding Parts), Bearing Type: L (Ball Bushing Bearing), Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: 22 (Copper, Fluorine & Silicon-free + Low Particle Generation, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber bumper at both ends, Specification: Clean series (relief type sliding

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber bumper at both ends, Specification: Clean series (relief type sliding

Specification: Copper, Fluorine & Silicon-free + Low Particle Generation, Vacuum Suction Type, Bearing Type: Ball Bushing Bearing, Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 100mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Table of Contents

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Air Slide Table

For details, refer to page 126. 40 MXQA Series Dimensions: MXQ 20A [Standard] MXQ 20A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.