Bore Size: 15mm, Stroke: 200mm, Piping Port Position: Port Location c, d Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 15mm, Stroke: 300mm, Piping Port Position: Port Location c, d Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 15mm, Stroke: 300mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 15mm, Stroke: 400mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 32mm, Stroke: 150mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

Bore Size: 15mm, Stroke: 200mm, Piping Port Position: Port Location a, b Operating Direction Right Left, Auto Switch: Y59AL--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 3M, Number: -

This is a legacy product, and replaced byMGQL20TN-20-Y59AL

Bore Size: 20mm, Port Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 20mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 20mm, Port Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 25mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 20mm, Port Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 100mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 20mm, Port Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 25mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m

Bore Size: 20mm, Port Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 100mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Table of Contents

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Air Slide Table

For details, refer to page 126. 40 MXQA Series Dimensions: MXQ 20A [Standard] MXQ 20A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

VFR

Body type Plug-in type Non plug-in type 1 8 Plug-in type Non plug-in type Body type VVFS2000-20A-1 VVFS2000-20A-2 Part no. Body type Plug-in type Non plug-in type VVFS2000-10A Part no.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

7

F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C.