Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Applicable tubing O.D. 1021-VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable

0.4

VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable tubing 1/4" Applicable

0.4

VQC1000 VQC2000 [SOL.A] () Applicable tubing 3.2 VVQ1000-50A-C3 COM (+) Applicable tubing 4 VVQ1000-51A-C4 VVQ1000-50A-C4 LED (Green) Coil LED Coil Applicable tubing 6 VVQ1000-51A-C6 VVQ1000-50A-C6 COM (+) [SOL.A] () Applicable tubing 8 VVQ1000-51A-C8 M5 VVQ1000-50A-M5 Coil LED (Orange) Applicable tubing 1/8" VVQ1000-50A-N1 [SOL.B] () Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-50A-N3

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Applicable tubing O.D. 1021-VQ2000 Caution Applicable tubing 3.2 Applicable tubing 4 Applicable tubing 6 Applicable tubing 8 M5 Applicable tubing 1/8" VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 A B A B VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 A B B A Applicable tubing 5/32" VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 Applicable

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism (stop diode) Note) A-side energized: Light (orange) ON B-side energized: Light (green) ON With surge absorbing mechanism

VQ1000V-OMV0001

4 VVQ1000-50A-C4 VVQ1000-51A-C4 6 VVQ1000-50A-C6 VVQ1000-51A-C6 8 VVQ1000-51A-C8 M5 VVQ1000-50A-M5 1/8" VVQ1000-50A-N1 5/32" VVQ1000-50A-N3 VVQ1000-51A-N3 1/4" VVQ1000-50A-N7 VVQ1000-51A-N7 5/16" VVQ1000-51A-N9 DIN DIN DIN DIN C S=5.0XC Q = [dm 3/min(ANR)] S [mm 2] P1 [MPa] P2 [MPa] t = [] ) ) ) DIN ) DIN 0.40.6Nm No.VQ1000V-OMV0001 9 - 1) 2) 1) 1) 2) OFF DC 3% AC 8% 3 Assy Assy

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism With surge absorbing mechanism (surge absorbing diode) mechanism Note) A-side energized: Light (orange) ON B-side

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 VVQ1000-50A-C3 Applicable tube 3.2 VVQ1000-50A-C4 Applicable tube 4 VVQ1000-50A-C6 Applicable tube 6 The minimum order quantity is 10 pcs. Precautions 1) Protect O rings from scratches and dust to prevent air leakage. 2) The tightening torque for inserting fittings to the M5 thread ass'y should be 0.8 to 1.4 Nm.

Steam Valve

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

ZQ-OM01401

(1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

VND

-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120 130 240 380 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 VC 1 4 1 440 32 32 1 2 1 VDW 920 40 40 2 VQ 1500 50 50 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

SQ1000/2000

(mm) SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 Part numbers above are for a set of ten elements. 3.2 4 6 8 Tightening torque: 0.5 to 0.7Nm Part numbers above are for one fitting; however, order them in 10 piece units. Caution Element Do not scratch or put foreign matter on the O-rings as this will cause air leakage.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Type Electrical entry Features Series C85 Series CP96 Series C96 Series C55 D-M9NV, M9PV, M9BV D-Y69A, Y69B, Y7PV D-M9NWV, M9PWV, M9BWV Grommet (Perpendicular) Diagnostic indication (2-color indication) D-Y7NWV, Y7PWV, Y7BWV D-M9NAV, M9PAV, M9BAV Water resistant (2-color indication) D-Y59A, Y59B, Y7P Sold state D-F59, F5P, J59 D-Y7NW, Y7PW, Y7BW Diagnostic indication (2-color indication

Smooth Cylinder/Low Speed Cylinder

Type Model Features Electrical entry (Direction) Without indicator light D-A90V D-A93V, A96V D-Z73, Z76 D-A53, A56 D-A67 D-Z80 D-F59, F5P, J59 D-Y59A, Y59B, Y7P D-F59W, F5PW, J59W D-Y7NW, Y7PW, Y7BW D-F5BAL, Y7BA D-F5NT D-M9NV, M9PV, M9BV D-Y69A, Y69B, Y7PV D-M9NWV, M9PWV, M9BWV D-Y7NWV, Y7PWV, Y7BWV D-M9NAV, M9PAV, M9BAV Grommet (Perpendicular) Reed auto switch Grommet (in-line) Without

CP95

Single rod Double rod Nil 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm W Applicable Auto Switch/Tie-rod Mounting Type Load voltage Auto switch model Electrical entry direction Lead wire length (m) Note) Electrical entry Indicator light Wiring (Output) Applicable load Mounting bracket Type Special function AC Vertical Lateral 0.5 (Nil) 3 (L) 5 (Z) DC Z76 Z73 Z80 Y59A Y7P Y59B Y7NW

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

) 5 (Z) None (N) AC DC In-line In-line Perpendicular Perpendicular 3-wire (NPN equivalent) IC circuit A76H Z76 5 V Reed switch Solid state switch Grommet A72 A73 A73C A72H A73H Z73 200 V 100 V 12 V Yes Relay, PLC Connector 2-wire 12 V 24 V Diagnostic indication (2-color indication) A79W Grommet F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV F79 F7P J79 F79W F7PW J79W F7BA Y59A Y7P Y59B Y7NW

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

-11-21 D-F59/F5P/J51/J59 Grommet 11-11-22 D-S991/S992/S99V1/S99V2 11-11-22 D-T991/T992/T99V1/T99V2 11-11-22 D-S9P1/S9P2/S9PV1/S9PV2 Grommet 11-11-23 D-S791/S792 11-11-23 D-T791/T792 Direct 11-11-23 D-S7P1/S7P2 11-11-23 Connector D-T791C/T792C 11-11-30 D-F8N/F8P/F8B D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 11-11-31 Grommet 11-11-24 D-F79W/F7PW/J79W Rail Grommet D-Y7NW

RSH/RS1H

entry direction Special function Applicable load 0.5 (Nil) 3 (L) 5 (Z) AC DC Perpendicular In-line IC circuit IC circuit 3-wire (NPN equiv) Z76 5V Reed switch Yes Grommet 100V 12V Z73 Relay, PLC 24V 2-wire No 100V or less 5V, 12V Z80 3-wire (NPN) Y69A Y59A IC circuit 5V, 12V RE A B Y7PV Y7P 3-wire (PNP) Solid state switch Y69B Y59B 12V 2-wire 3-wire (NPN) Relay, PLC REC Grommet Y7NWV Y7NW

CP95

Single rod Double rod Nil 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm W Applicable Auto Switch/Tie-rod Mounting Type Load voltage Auto switch model Electrical entry direction Lead wire length (m) Note) Electrical entry Indicator light Wiring (Output) Applicable load Mounting bracket Type Special function AC Vertical Lateral 0.5 (Nil) 3 (L) 5 (Z) DC Z76 Z73 Z80 Y59A Y7P Y59B Y7NW

MNB

Lead wire length (m) Load voltage Auto switch model Pre-wire connector Indicator light Applicable load Tie-rod mounting Band mounting Special function Type Electrical entry Wiring (Output) 0.5 (Nil) 3 (L) 5 (Z) AC DC 3-wire (NPN equivalent) IC circuit Z76 5 V Grommet A33 A34 A44 G39 K39 Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V Reed switch Solid state switch Relay