CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.
CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.
CHKGB Bore size Rod end thread type Auto switch Quantity XC63 Stroke Intermediate stroke Applicable tube For 75mm stroke For 100mm stroke Strokes 55, 60, 65, 70 80, 85, 90, 95 Dimensions CHKGB--XC63 B A 55, 60, 65, 70 80, 85, 90, 95 Stroke Bore size (mm) A B A B 32 141 131 40 150 140 175 165 50 156 145 181 170 63 165 152 190 177 80 180 163 205 188 100 207 181 232 206 Note) Dimensions other
42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600 80 40 19 25
Lead wire length (m) Load voltage Auto switch model Electrical entry direction Indicator light Pre-wired connector 5 (Z) Special function Type Electrical entry Wiring (Output) 0.5 (Nil) 3 (L) Applicable load AC DC Perpendicular In-line 3-wire (NPN) Y59A Y7P Y59B Y7NW Y7PW Y7BW Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) Solid state auto switch Diagnostic indication
length(m)* Auto switch model Lead wire entry Perpendicular In-line Load voltage Special function Indicator light Electrical entry Wiring (Output) Applicable load Model 0.5 (-) 3 (L) 5 (Z) DC AC P P Z76 3 wire 5V IC Grommet Yes Reed switch P P P Z73 100V 24V 12V Relay PLC 2 wire 5V 12V P P Z80 No 100V IC 3 wire (NPN) 5V 12V P P Y59A Y69A p IC 3 wire (PNP) 5V 12V Y7PV Y7P P P p 2 wire P P Y59B
Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) IC circuit 5 V, 12 V 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since
AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Pre-wire connector Wiring (Output) Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire (NPN equivalent) IC circuit Z76 5 V Reed switch Solid state switch Yes Yes Grommet 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire Y69A Y7PV
NDH10 125 140 160 I-12 I-14 I-16 0.1 0.3 25 32 +0.084 0 2033 27 46 54 100 M30 x 1.5 E1 0.1 0.3 28 36 +0.084 0 39 30 48 54 105 M30 x 1.5 NX 0.1 0.3 32 40 +0.100 0 Data 39 34 55 60 110 M36 x 1.5 L1 U1 RR1 Rod End Nut Material: Rolled steel 30 d Applicable bore size (mm) d H B C D Part no.
wire length (m) Load voltage Auto switch model Indicator light Special function Electrical entry Wiring (Output) Pre-wire connector Type 0.5 (Nil) 3 (L) 5 (Z) Applicable load Perpendicular In-line DC AC 3-wire IC circuit Z76 5 V (NPN equivalent) Reed switch Grommet Yes Relay, PLC 2-wire Z73 24 V 12 V 100 V 3-wire (NPN) Y69A Y59A 5 V 12 V IC circuit 3-wire (PNP) Y7P Y7PV 2-wire Y69B Y59B
Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) IC circuit 5 V, 12 V 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since
wire length (m) Load voltage Auto switch model Indicator light Special function Electrical entry Wiring (Output) Pre-wire connector Type 0.5 (Nil) 3 (L) 5 (Z) Applicable load Perpendicular In-line DC AC 3-wire IC circuit Z76 5 V (NPN equivalent) Reed switch Grommet Yes Relay, PLC 2-wire Z73 24 V 12 V 100 V 3-wire (NPN) Y69A Y59A 5 V 12 V IC circuit 3-wire (PNP) Y7P Y7PV 2-wire Y69B Y59B
entry direction Load voltage Indicator light Special function Wiring (output) Electrical entry Type 3 (L) 5 (Z) Applicable load In-line 0.5 (Nil) DC AC Perpendicular Z76 3 wire IC circuit 5V P P Yes Z73 12V 100V P P P Reed switch Grommet Relay, PLC 2 wire 24V 5V 12V 100V or less No Z80 IC circuit P P Y59A Y69A P p P 3 wire (NPN) IC circuit 5V 12V Y7P Y7PV P p P 3 wire (PNP) IC circuit Y59B
Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure
Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure
Bore Size: 20mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 60mm
Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2 blow 60
Y69B 3 m L Y69BL 5 m Z Y69BZ IC circuit 2-wire Y59B Y69B Solid state switch 12 V Relay PLC Grommet 24 V Yes 3-wire (NPN) 3-wire (PNP) Solid state auto switches marked with a are manufactured upon receipt of order. Y7NW Y7NWV 5 V 12 V Diagnostic indication (2 color indication) IC circuit Y7PW Y7PWV Refer to page 8-30-1 for detailed auto switch specifications.
3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60
Electrical entry direction Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) Applicable load Indicator light Special function Electrical entry Wiring (output) Type DC AC IC circuit Z76 5V 3-wire Grommet Yes Reed switches Solid state switches Relay PLC Z73 100V 24V 12V 2-wire 100V or less 5V 12V IC circuit Z80 No 3-wire (NPN) Y59A Y69A 5V 12V IC circuit 3-wire (PNP) Y7PV Y7P Y59B Y69B 2-wire