Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4

AC Servo Motor Driver (CC-Link Type)

Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 2500 1500 750 3000 2000 1000 3750 2500 1250 Feel length multiplication (STM) (Multiplier) PA05 0 0(Less than stroke 1000)/ 0001(Stroke 1000 or more) Home position return type PC02 0 3Stopper type Home position return direction PC03 0001 1 (Motor side) Home position return Speed (rpm) PC04 500 90 150 300 75 113

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Lead wire electrical entry D-A90 Reed switch Grommet (In-line) D-A90V Grommet (Perpendicular) Type Model Features Without indicator light The normally closed type (NC = b contact) solid state switches (D-F9G/F9H) are also available.

3-Position Rotary Table

150 130 120 50 50 MSZA30A (High precision type) MSZA50A(High precision type) D70 60 50 40 30 20 10 0 120 100 80 60 40 20 0 Load N Load N 291 Rotary Table Air Consumption Air consumption is the volume of air which is expended by the rotary tables reciprocal operation inside the actuator and in the piping between the actuator and the switching valve, etc.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Overall Length: Z (Super Compact), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: Standard (Rod End Female Thread), Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Z (Super Compact), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: M (Male Rod End), Auto Switch: A90--Reed, AC Volt, Horizontal

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: M (1m)

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 150, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 150, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 150, Max.

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)