SY

11 13 14 15 16 17 18 19 20 Stations n L1 L2 L3 L4 298 310.5 323 348 360.5 373 398 410.5 423 435.5 287.5 300 312.5 337.5 350 362.5 387.5 400 412.5 425 267 283 299 315 331 347 363 379 395 411 15.5 13.5 12 16.5 14.5 13 17.5 15.5 14 12 SS5Y5-45FU-D .

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

I J 25.3 37 26 5 14 8 12.5 15.5 Up to 350 18 13 12 2 12 12 35 M4 x 0.7 depth 7 20 40 31 28.3 10 12.5 6 16.5 19.5 Up to 400 22 17 14 2 12 12 40 M5 x 0.8 depth 7.5 25 38 43 12 6 31.3 12 19.5 20 Up to 450 22 17 18 2 12 12 40 M5 x 0.8 depth 8 32 47 8 38.3 52.5 15 27 26 16 Up to 800 30 19 25 2 13 13 50 M6 x 1 depth 12 40 44.5 58.5 58 11 32 20 16.5 32 Up to 1200 35 27 30 2 14 14 58 M8 x 1.25 depth

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

CXS

Stroke (mm) up to 10 up to 30 up to 75 up to 100 up to 50 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 Max. speed (mm/s) 7 8 9 6 10 15 Selection graph 10 11 12 13 14 15 17 16 20 25 32 The maximum speeds for 10 to 32

CL

to 400 301 to 450 301 to 800 GB GB TB GB ZZ ZZ 210 227.5 230.5 255 ZZ ZZ 206 223 226 250 ZZ ZZ 206 223 226 250 20 25 32 40 186 201 204 230 149 159 162 178 12 12 12 13 20 25 32 40 190 205.5 208.5 235 149 159 162 178 12 12 12 13 125 135 136 151 186 201 204 230 149 159 162 178 14 14 14 15 12 12 12 13 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 31 Series CLG1 Fine

CNG

2 85 10 (12) 18 5.5 6 4 8 5 to 200 201 to 350 201 to 350 20 to 300 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 to 300 301 to 400 301 to 400 20 to 300 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 to 300 301 to 450 301 to 450 20 to 300 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 to 300 301 to 800 301 to 800 (mm) Without

Cylinder with Lock Series CNG

2 85 10 (12) 18 5.5 6 4 8 5 201 to 350 to 200 201 to 350 20 to 300 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 301 to 400 to 300 301 to 400 20 to 300 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 301 to 450 to 300 301 to 450 20 to 300 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 301 to 800 to 300 301 to 800 (mm) Without

MLGP

mm/s (15) 50 Stroke or Less V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 10 40 40 32 32 25 25 1 20 20 1 10 50 100 200 0.7 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) 9-11-12 12 Compact Guide Cylinder with Lock Series MLGP Operating pressure 0.4 MPa Operating pressure 0.5 MPa or more Vertical Downward Mounting (Ball

MLGP

mm/s (10) Over 30 Stroke V = 400 mm/s 1 5 CL CL1 0.5 MLGC 25 Load weight m (kg) Load weight m (kg) CNG 25 MNB CNA 20 CNS 20 CLS 1 CLQ MLGP 0.1 10 50 100 200 0.7 10 50 100 200 RLQ Eccentric distance l1 (mm) Eccentric distance l1 (mm) MLU MLGPL32 to 100 ML1C (12) Over 50 Stroke V = 400 mm/s (11) 50 Stroke or Less V = 400 mm/s D100 50 100 -X 100 2080 80 Data 10 63 63 Load weight m (kg) Load

Profile Design ISO/VDMA Air Cylinder Series CP95

11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR Rear clevis with ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6

Compact 5-Port Solenoid Valve

312.5 337.5 350 362.5 387.5 400 412.5 425 L5 12 16.5 14.5 13 17.5 15.5 14 12 16.5 15 13 17.5 16 14 12.5 Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions n L 17 18 19 20 L1 426.8 442.8 458.8 474.8 L2 325.5 341.5 357.5 373.5 L3 460.5 473 485.5 498 L4 450 462.5 475 487.5 L5 17 15 13.5 11.5 52 JSY1000/3000/5000 Series Spring Type Terminal Block TC Connection Step

C85

12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4

Thermo-chiller

V type) Anchor bolt xing position B HRS100/150-A-20 (Air-cooled 200 V type) HRS100/150-A-40 (Air-cooled 400 V type) Anchor bolt xing position A (27.0 [687]) (Thermo-chiller dimension) (37.5 [954]) (Thermo-chiller dimension) 0.16 x 0.47 [4 x 12] 5.43 [138] 0.16 x 0.47 [4 x 12] 26.4 [670] 16.1 [410] 5.43 [138] (24.2 [616]) (Thermo-chiller dimension) (28.1 [715]) (Thermo-chiller dimension)

Thermo-con/Rack Mount Type

Heat generation amount: 400 W Cooling capacity = Considering a safety factor of 20%, 400 W x 1.2 = 480 W Thermo-con/HEC Series High-precision temperature control type for semiconductor manufacturing equipment, medical equipment, etc.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Series IDG

800 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow

Table of Contents

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

1.63

V Solid state auto switch Reed auto switch 12 V IC circuit Diagnostic indication (2-color indicator) 5 V,12 V Relay, PLC Grommet Yes 24 V 12 V 5 V,12 V Water-resistant (2-color indicator) IC circuit 12 V Magnetic field resistant (2-color indicator) 2-wire (Non-polar) 3-wire (NPN equivalent) A96V A96 5 V IC circuit Yes Grommet A93V2 A90V A93 A90 100 V Relay, PLC 2-wire 12 V 24 V 100

Support Guide/11-LEFG Series

14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000

CLS

, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 CL 2 (Different sides, Same side), 1 155 170 35 145 CL1 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 170 + 55 35 + 55 145 + 55 MLGC n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Different sides Same side Different sides Same side CNG 110 150 2 35 110 150 100 D-A3 D-G39 D-K39 MNB 150 + 30 (n 2) n = 2, 4, 6, 8