CNG

40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg

MY2

RR 5.3 8.5 11 Q 152 198 312 NX 5.8 8.5 10.5 PA 40 60 100 PB 43 67 77 PG 4 6 9 PP 5.3 8 16 P M5 x 0.8 1/8 1/4 "P" indicates cylinder supply ports.

Integrated Controller

Motor Maintain a space of 40 mm or more. e-Actuator rod type built-in magnet portion (Piston) 40 40 40 Maintain a space of 40 mm or more. 40 40 e-Actuator slider type built-in magnet portion (Table unit) An air cylinder with an auto switch cannot be installed in the shaded area. 63 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Vacuum

-Pad ;;rol2 25 40 Flat type I a o o o a o a o o a o o Flat with rblo o a o o a a o eep tvpe lo a o a Bellows | a a a a a a o a a a 132 ZCDUKC Male Cap porting zPf (v&uum pad !

Vacuum

-Pad ;;rol2 25 40 Flat type I a o o o a o a o o a o o Flat with rblo o a o o a a o eep tvpe lo a o a Bellows | a a a a a a o a a a 132 I ZCDUKC Male Cap porting zPf (v&uum pad !

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

8 PCA-1557727 Terminating resistor for PROFIBUS DP (M12/B-coded) 217 A M8/M12 Connector PCA/EX9/EX500 Series Power Supply Cable/Connector p. 229 to 236 EX600 EX500 p. 229 p. 231 !

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

CQS

except "A", and "B".)

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

16 N 20 25 40 NC 14 21.3 32.4 A 80 105 165 B 9.5 14 17.5 C 5.4 8.6 10.8 LB 87.4 124.7 148.3 LE 5 6 8 (LL) 40 49.6 75 LD 5.5 9 11 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 1/8 1/4 PF 10 12 20 PC 4 9.4 8.5 PD 23 29.2 36 PG 10 12.5 20 PH 10.2 13 18.5 PI 41 57.6 72 PA 44 63 113 PB 80 110 132 PE 1 3.4 0.5 R 5 8 12 RR 5.3 8.5 11 RW 69 100 116 SS 9.7 14 21.5 TT 12.5 19.3 35.4 NW 85.2 124.8 150.1

KJ

P. 19 Union Y Bulkhead male elbow Union tee Use to connect tubes through a panel, changing by 90 in a tube fetching direction. KQ2U KQ2LE KQ2T P. 22 P. 21 Use to connect tubes in both 90 directions. Use to branch line in the same direction.

MXS

26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 Refer to "Dimensions" of MXS 16 on p.3.11-19 for one with shock absorber as symmetric.

100

With unit switching function (Initial value psi)*1 * For output types N and P, a 3-core lead wire is included.

Possible to transfer a workpiece at low-speed.

The rotation angle can be adjusted between 90 and 190. n io r a at n t g o Rotation starting point e R End of rotation DL L R B B L e o g t B a n ti a o r n n o r a ti n a g t Rotation starting point End of rotation o A A e Operating size 20 30 40 Operating size 20 30 40 R A Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Rotation starting point End of rotation Lmax 24 27 31.5 Lmax 24 27 31.5 Size

5 Port Solenoid Valve SY Series

EA P EB Type 41P Compact bar stock type Flat ribbon cable SY3 40 SY5 40 P. 95 A 26 pins MIL connector permits one-touch wiring of external cables in a bundle. EA P EB In common Type 42 Bar stock type/Common External EXH Individual wiring SY3 40 SY5 40 P. 79 The base mounting facilitates maintenance after valves are changed.

New

E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part (mm) Faston connector Electrical entry 250 Series Grommet (with Size Port size P A B B1 C D E F Grommet surge voltage suppressor) 11 Q R Q R 9 6.5 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 19 24 24 30 43 45 45 50 21 22.5 22.5 25 61 76 81 86.5 30 35 40 40 9.5 12 12 15 20 22 24.5 24.5 27 29.5 32 32 42 53.5 58 61 30 32.5 35 35 28.5 39.5 44.5

Fluoropolymer Piping Equipment

3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 Blanking plug LQ3-P-1 P.937 Tubing plug LQ3-P-2 P.937 Nut LQ3-N P.937 872 A Needle Valve /Bore Through Connector /High Purity Fluoropolymer Tubing LVN/LQHB Series/ / / TL TIL TD TID TH TIH Needle Valve P.938 Tubing O.D.

SV

With External Pilot Specifications (Pitch) 25 (6) 40 24 P = 24 20 11 13.7 E 3/5 E 3/5 E 3 E 3 4 A 4 A 4 A 4 A 4 A 4 A A 4 A 4 A 4 A 4 14.5 35.8 (43.9) 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting (Lateral connector entry) [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/

CNG

Stroke F H A F K Rc(PT) P TS TR Bracket mounting range BN GB AL TA 2TDe8 Rear cylinder port (Pin O.D.)

48

Size 20 (16 x 2) to 40 (32 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL GD 40 Bottom view WA + Stroke/2 Z 2 x P (Plug) 4 x MM depth ML 4 x OA through 4 x OB counterbore depth OL L (OL) 4 x NN through U X PW PE VA 2 x P (Plug) H R T 2 x P D GB GC S Q 2 x P (Plug) GA JC PD C + Stroke FB FA K J G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN

0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)