Aluminum High Vacuum Angle Valve XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b
x 1.5 22.5 26 Polished round 20 100 Y-10C 4 x 30l MVGQ 30 + 0.3 + 0.1 37 40 83 M26 x 1.5 21 83 38 20 61 + 0.084 0 20 0.1 0.3 30 105 37 40 83 M26 x 1.5 24.5 28 Knuckle pin, cotter pin, and plain washer are shipped together.
x 1.5 22.5 26 Polished round 20 100 Y-10C 4 x 30l MVGQ 30 + 0.3 + 0.1 37 40 83 M26 x 1.5 21 83 38 20 61 + 0.084 0 20 0.1 0.3 30 105 37 40 83 M26 x 1.5 24.5 28 Knuckle pin, cotter pin, and plain washer are shipped together.
Note 2) 15 has internal magnets in the body. 15 Series REAR Construction/20 to 40 y Parts list Parts list No. Description Material Note No.
12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room
2 @8 t o u y !8 !9 @2 @7 CY1R10H @0 !5 @4 !4 !1 !0 i @6 q @9 r 2a 3a With switch rail !9 !8 @0 @2 @7 t @3 !6 !2 y u o @5 @8 CY1R15H to 63H @0 !6 @4 !4 !1 @9 @6 !0 i q r 2a For CY1R15 For CY1R15, 20 3a !9 !8 @2 @0 @3 !5 @7 !7 o u y @5 t @8 !2 !3 With switch rail Parts list No. Description No.
0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500 500
Write the following data to Y10 to Y1F of the controller with controller ID: 1 (Turn ON Y contacts that instigate an operation command for Step Data 1).
Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (
600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20
HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250-W-20/40. 8-17 8.5 Pump Capacity . 8-18 8.5.1 HRSH100-A-20/40-, HRSH100-W-20/40. 8-18 8.5.2 HRSH150/200-A-20/40-HRSH150/200/250-W-20/40. 8-18 8.5.3 HRSH250/300
A A1 E1 L1 M10 x 1.25 +0.058 0 0.2 0.4 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 25 30 30 40 50 55 M8 x 1.25 16 20 36 44 56 64 11.5 14 14 20 27 31 21 25.6 41.6 50.6 64 72 8 10 10 14 18 22 8.5 10.5 16 20 23 24 8 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 M14 x 1.5 34 41 42 56 71 79 20 25, 32 40 50, 63 80 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-
[mm] Release button shape KQ2C-00A1 4, 6 Oval type KQ2C-00A 8 to 16 Round type U Union Y v Different diameter union Y v UD Different diameter double union Y v R Plug-in reducer v v Applicable tubing O.D.
Twist selector (3 position) VM133-M5-35R/B/G/Y VM153-M5-35R/B/G/Y Panel mounting hole JIS Symbol 3 port 5 port 3-M5 x 0.8 Depth 4 R port (5 port only) 0.5 MPa supply 20 N F.O.F. 45 T.T. 5-6-19 18 2/3 Port Mechanical Valve Series VM200 Large flow capacity. A variety of actuator types.
22 22 14 14 20 30 30 Y-03M Y-04M Y-05M Y-08M Y-10M I-03M I-04M I-05M I-08M I-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and flat washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8
30 30 20 22 28 40 40 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M Y-03M Y-04M Y-05M Y-08M Y-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 -
1(R)-L-C6/C8/C10/02 DIN terminal (Y): VQZ3 20 1(R)-Y-C6/C8/C10/02 300 157 (Lead wire length) 72 Indicator light 30.5 <35.5> 163.5 MAX.10 75 Applicable cable O.D. 3.5 to 7 Pg.7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 3 4 5 M plug connector (M): VQZ3 20 1(R)-M-C6/C8/C10/02 35.5 Cross section 0.23 mm2 Cover diameter 1.5 (Lead wire length) 37 <42> 300 77 145