Made to Order

Bore size Stroke adjustment range A B MH MT MA MI MM MK ML G L 12 to 25 MM MI 12 16 20 25 25 (15) 57.7 (64.9) 25.2 (32.4) 3.5 29 M4 x 0.7 5.5 14 5 20 8 5 to 30 28 (20) 26 (36) 58.5 (68.5) 3.5 29 M5 x 0.8 5.5 14 5 20 10 G 36 (25) 26 (38) M6 x 1 67.5 (79.5) 4.5 37 7 20 8 24 12 5 to 50 MK MT ML L MA 40 (30) 29 (39) M6 x 1 71 (81) 5 37 7 20 8 24 12 5 to 50 30.5 (40.5) 78.5 (88.5) Stroke 32 38

HRX-OM-X071

capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types

HRX-OM-X084

. 9-9 9.4.3 HRR010-A -20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type) . 9-14 9.7.1 HRR010-W-10/20. 9-14 9.8 Types of Hazard Labels . 9-15 9.8.1

1

) 85 53 254 110 78 279 85 53 256 110 78 281 R Series MGG only Stroke ML MT MH + Stroke Y + Stroke ZZ + 2 strokes Series MGC 20 to 50 Width across flats MA MM A Port B Port MD 10 A A Port B Port A 10 (MI) View A-A Front mounting flange R Stroke ML MT Y + Stroke MH + Stroke ZZ + 2 stroke Series MGP MGPM, MGPL Common Dimensions MB MC (Width across flats) Bore size (mm) MA MB MC MH ML MD MP

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + J + M

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + M

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: High-pressure Pump

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: Earth Leakage Breaker

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: BJM (B + J + M)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: BM (B + M)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: J (Automatic Water Supply Function)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: T (High-pressure Pump)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: B (Earth Leakage Breaker)

1

Connector entry upward direction) 4 A A B 4 A A B 4 A A B 4 A A B A B 4 A PE 3EB X 1P 5EA 106.2 5.5 24.6 23.2 116.6 96.2 20 20 35 81.6 74.1 20 30.2 52.2 43.8 2 x M2.6 2 x 4-40 UNC [For N or T thread] 40.2 40.2 8 2B 2B 2B 2B 2B 12.3 1/8 [4(A), 2(B) port] M5 x 0.8 (External pilot) [External pilot port] 4 x 4.5 (For mounting) One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32"

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A