ZP

K Y A J K B Y C D Misc.

CL

601 to 1000 601 to 1000 751 to 1000 751 to 1000 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) FV GA GB GC J H1 K KA M M1 P MM N S W H ZZ e f h ZZ l 59 66 66 80 81 133 133 141 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4

CJ2

Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions.

Electric Actuator/Slider Type

LEFS16/Ball Screw Drive (1 kg = 2.2 lb) Horizontal Vertical 12 12 Lead 5: LEFS16B 10 10 Work load: W [kg] Work load: W [kg] 8 8 Lead 10: LEFS16A 6 6 Lead 5: LEFS16B 4 4 Lead 10: LEFS16A 2 2 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 Speed: V [mm/s] 0 100 200 300 400 500 600 LEFS25/Ball Screw Drive Vertical Horizontal 20 20 Lead 6: LEFS25B Work load: W [kg] Work load: W [kg] 15 15 Lead

MK

J D-X 20Data Fig. (5) Fig. (6) 10-7-3 4 Rotary Clamp Cylinder: Standard Type Series MK 12, 16, 20, 25, 32, 40, 50, 63 How to Order MK A S F9BW 20 10 R F Number of auto switches Nil S 2 pcs. 1 pc.

MNB

30 30 20 19 37.5 116 20 170 96 1/4 17 26 37 to 750 Bore size (mm) MM J T S U V GF K L Q RR H VA W Z ZZ P GE N 32 M6 x 1.0 34 154 M10 x 1.25 13 6.5 18.3 6 23 37 10.5 47 13 6.5 224 234.5 1/8 88.5 27 40 M6 x 1.0 39.5 161 M14 x 1.5 13 8 19.5 6 23 41.5 11 51 16.5 9 235 246 1/4 96.5 27 50 M8 x 1.25 47 183 M18 x 1.5 17 9 22.4 7 30 47.5 15 58 20 10.5 271 286 1/4 111.2 31.5 63 M8 x 1.25 55.5 197

MNB

14 20 12.5 19 63 1/4 134.5 12 Up to 600 45 18 32 22 75 56.5 11 90 119.5 16.5 68 35 27 40 20 14 20 17.5 23 80 1/4 169 18 Up to 750 45 22 37 22 95 72 13 102 150 19 81 40 32 60 25 20 30 22 33 100 1/4 189 20 Up to 750 55 26 37 22 114 89 16 116 170 19 96 40 41 60 30 20 30 25 37.5 Bore size (mm) T U V RR S GR GE GF J K MM N P Q H VA W ZZ L Z 32 154 47 224 6.5 13 1/8 6.5 M10 x 1.25 10.5 23 6 M6

MNB

12.5 35 27 1/4 40 18 65 58.5 75 120.5 Up to 600 15 14 104.5 19 15.5 32 -X 56.5 63 11 20 17.5 35 27 1/4 45 18 75 68 90 134.5 Up to 600 12 14 119.5 23 16.5 32 72 80 13 25 22 40 32 1/4 45 22 95 81 102 169 Up to 750 18 20 150 19 33 37 2089 100 16 30 25 40 41 1/4 55 26 114 96 116 189 Up to 750 20 20 170 19 37.5 37 Data T V VA W ZZ MB K MM N P S GR GE GF J Q H Bore size (mm) 32 6.5 6 27 4 205

High Purity Fluoropolymer

J type fitting assembly procedure J type Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

Free Mount Cylinder

D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 9.5 1.5 17.5 0.5 5.5 9.5 13.5 17.5 3.5(1) 13.5 5.5 16.5 3.5 9.5 13.5 12.5 16.5 7.5(5) 15.5 7.5 20 5.5 11.5 15.5 16 20 9.5(7) 19 11 24 9 15 19 20 24 13(10.5) 20 12.5 26.5 10.5 16 20 22.5 26.5 14.5(12) 22.5 14.5 27.5 12.5 18.5 22.5 23.5 27.5 16.5(14) Note 1) Figures in the table above are used as a reference

REA/REB

12.5 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8

MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

HRX-OM-W038

(HRS050-A-20-(BJMTW)) 9.5.2 HRS040-W-20-(BJMTW) 1500 1500 Facility water temperature Facility water temperature 1200 1200 Heating capacity[W] Heating capacity[W] 40 40 900 900 32 32 25 25 600 600 20 20 5 5 300 300 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60H 50H Fig. 9-6 Heating capacity(HRS050-W-20-(BJMTW)) HRS Series

V

VVQ1000 J I 1 Plug-in Unit M A N I F O L D T Y P E H O W T O O R D E R C O N N E C T O R S W I T C H T Y P E/V O LTA G E (S O L I D S TAT E: 12~24 VDC) Without lead wire (connector 1pc, socket 4pcs) .ZS-20-A With lead wire .ZS-20-5A-50 14 NPN/1 setting, three revolution adjustment 15 NPN/1 setting, 200 0 adjustment 16 NPN/2 setting, three revolution adjustment 17 NPN/2 setting, 200 0 adjustment

Shock Absorbers and Rate Controls

resred lIr) flor. l{rn/rytle (lloloq l{0. tt odell OEtl l ,5lllx l 20 25.0 0.3.3.J 260 126,000 t3,000 19 58 2,890 0.9 lR0tl.5lltxl 20 25.0 0.08-t.3 260 t26,000 13,000 49 68 6,660 0.9 Offll.5Xtx2 20 50.0 0.3-3.5 520 167.000 t3,000 JI 68 2,890 1.0 tR0tXll.5ltlx2 20 50.0 0.08-1.3 520 1o,000 r3,000 49 80 6,660 L0 0tlSl.5flr3 20 75.0 0.3-3.5 7S0 201,000 ,000 32 80 2,890 1.2 0IIlt2.0tltx2 30 50.0

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C D d F G GA GB J K M MA MM NA NB P Q R S T V W E 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 17 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 13 20 M14 x 1.5 30 22 1/4 5 37 106

MVGQ

ML2B C J G5-S Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

J type J type fitting assembly procedure Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 !

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08