Battery-less

: LEFS32EA 20 Lead 24: LEFS32EH 10 Lead 24: LEFS32EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40EB Lead 10: LEFS40EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40EA 30 Lead 30: LEFS40EH Lead 20: LEFS40EA Lead 30: LEFS40EH 20 10 10 0 0 0 100 200 300 400 500 600

Integrated Controller

10 80 70 60 50 40 30 20 10 0 100 200 300 400 500 600 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 20 15 10 5000 mm/s2 5 10 mm/s2 0 0 0 Speed: V [mm/s] 50 100 150 200 250 300 350 400 450 Speed: V [mm/s] EQFS40HC/Ball Screw Drive Horizontal/Lead 5 Vertical/Lead 5 90 80 70 60 50 40 30 20 10 0 45 40 35 30 25 20 15 10 5 0 3000 mm/s2 Work load: W [kg] Work load: W [kg] 10 mm

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Cylinder

I z . oG I H K MM I [ flore size; I; # F' B C ~ (mm) . 5" 10" R 5" NN W S!

o

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

o

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

XL

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

Direct Solenoid

mt,y-A,C. tol.|lold, wltioul manual oprrtor, and Nith oorator mounllng hol. pl!09d. 1 Mmod oPralora$omuy wlti Orln! P80601 1 Faoltcrir*rl coll-A-c. solanold l lli/1m V 3y60 Ha. 120t60 Nt@ aa)a) qIA{S c01ar0 qIA.11 10 '| Solanold str. n!

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

10 Torr-0 PSI (10 Torr-Okqt/cm2) 0.012 // Without subplate \\ ( 0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications

High Vacuum Angle Valve, XL Series

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

Cooling Capacity: Cooling Capacity: 1700/1900W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: B + M

Cooling Capacity: Cooling Capacity: 1700/1900W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: B + M + T

Type: Thermo-Chiller, Cooling Method: Water Cooling, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: With earth leakage circuit breaker

Type: -, Cooling Method: -, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: Compatible with deionized water (pure water) piping

Type: -, Cooling Method: -, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: High pump head specification

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: T (High-lift Pump)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: B (Earth Leakage Breaker)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: BM (B + M)