With end lock (20) MXS20R With buffer (20) MXS20F 2-M6 X 1 thread 13 deep Operating port 2-Rc(PT)1/8 J 15.5 15 20 58 25 44.5 30.5 0.5 45.5 Dimensions not indicated are the same as basic type.
(mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8 M8 x 1.25 Up to 800 Data 35 32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 M8 x 1.25 Up to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 11.5 15 86 105 59 130 102 17 67 20 18 12
13 15 12 11 Up to 600 200.1 0.3 25 35 32 86 27 115 1/4 1/4 64 16 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 J KA L MM N P Q H S T U V W Z ZZ K RR 6 M8 x 1.25 14 30 M14 x 1.5 27
0.03 J 0.04 J 0.09 J 0.27 J 0.4 J Air cushion 0.17 J 0.19 J 0.4 J 0.66 J 0.97 J Standard Strokes Air cushion Bore size [mm] Standard stroke [mm]*2*4 Max. stroke*3 [mm] 8*1 10, 25, 40, 50, 80, 100 100 10 12 10, 25, 40, 50, 80, 100, 125, 160, 200 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 500 25 Refer to pages 101 to 111 for cylinders with auto switches. *1 Not available with
When the conduit type is used as equivalent to an IP65 enclosure, install a wiring conduit, etc. 9. When an impact, such as water hammer, etc., caused by the rapid pressure fluctuation is applied, the solenoid valve may be damaged.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
M14 K 1.5 '5, 1->"14",5' 18 1M16xl.5 15 17 1M) Up to 1000 ' 50 47 157 126 160 281 17 36 ::1 36 ~~ 72 :.g;' 32 ' 71 43 15"" 'l7 15 20 160 Up to 1200 56 53 I 177 144 180 32 1'00 20 40 j~ 40 :g l 80 .2, 38 78.S 42 (mm) H Z ZZ f h , Bpre sige ' K K-A' 'L ' MM N P 5 U RR WithoUt ron-:bO'O't . ,.. ,', 'i":"WitH rod boot """ , ii' ', J!
3 4.5 8 9.5 4 Section AA' 6-M3 x 0.5, depth 14 15 15 Mounting reference planes D B Q QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27
40 120.5 46.5 104.5 65 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 18 32 9 Up to 600 90 1/4 20 45 134.5 56.5 119.5 75 17.5 23 68 35 27 14 20 14 12 80 19 13 22 37 11.5 Up to 750 30 102 1/4 45 169 72 150 95 22 33 81 40 32 22 25 20 18 Data 100 19 16 26 37 17 Up to 750 30 116 1/4 55 189 114 89 170 25 37.5 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE GF J K MM N P Q H Z 32 M10
12.5 35 27 1/4 40 18 65 58.5 75 120.5 Up to 600 15 14 104.5 19 15.5 32 -X 56.5 63 11 20 17.5 35 27 1/4 45 18 75 68 90 134.5 Up to 600 12 14 119.5 23 16.5 32 72 80 13 25 22 40 32 1/4 45 22 95 81 102 169 Up to 750 18 20 150 19 33 37 2089 100 16 30 25 40 41 1/4 55 26 114 96 116 189 Up to 750 20 20 170 19 37.5 37 Data T V VA W ZZ MB K MM N P S GR GE GF J Q H Bore size (mm) 32 6.5 6 27 4 205
1 Stroke Reading Cylinder and Counter Series CE RE A B REC CEP1/CEU5 Resolution: 0.01 mm (Accuracy 0.02 mm) Output function: RS-232C BCD Output: 5 points (Bank switching: 20 points) 31 points (Binary output) CX CY MQQ M RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J DHigh Precision Stroke Reading Cylinder Series CEP1 12, 20 Multi-counter Series CEU5 Stroke
RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J DHigh Precision Stroke Reading Cylinder Series CEP1 12, 20 Multi-counter Series CEU5 Stroke Reading Cylinder Series CE1 12, 20, 32, 40 50, 63 3-point Preset Counter Series CEU1 -X 20Data P . 10-12-8 P . 10-12-30 P . 10-12-18 P . 10-12-27 10-12-1 2 Achieve rationalization of production lines with position feedback
Slider Type/Ball Bushing Bearing CY1L Series 6, 10, 15, 20, 25, 32, 40 CY3B CY3R CY1S CY1L CY1L CY1H CY1F CYP D-X Technical Data 1511 CY1L Series Model Selection Operating Conditions E: Kinetic energy of load (J) W V 2 E = () 2 1000 Es: Allowable kinetic energy for intermediate stop using an air pressure circuit (J) Ps: Operating pressure limit for intermediate stop using an external stopper
, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15
Both sdes (2 to 20 siaiions) '!
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8
100 263 100 35 123 286 1/5 stroke 125 137 20 16 77 12 100 267 100 35 123 290 160 155 24 20 94 12 108 297 120 38 131 320 402 CHA Series Tie-rod Type Hydraulic Cylinder Double Acting/Single Rod Head flange type: CHAG V T 2 x Rc P 4 x J 4 x FD CHQ Width across flats G GA 4 x J Air release GB Cushion adjustment screw CHK MM R (max.)
An EXH block base ass'y is used in the blocking position when ordering an EXH spacer incorporated with a manifold No. However, do not order an EXH block base ass'y because it is attached to the spacer. When separately ordering an individual EXH spacer, separately order an EXH block base ass'y because it is not attached to the spacer.
AFF/AM/AMD AMK Modular Connection Example 2 x P (Port size) J M R V1 V2 Q1 C Q21 Q1 AR30-03-D U AFF30-03-D E G Maintenance space *1 Q2 (Sizes 20, 40) Q1 (Size 30) Standard specifications Optional specifications Bracket mount P A C E F G J M Q1 Q2 R S U V1 V2 Size 20 2 1/8, 1/4 83.2 26.5 41.6 25 21 30 24 33 5.5 11.5 3.5 29 38 Size 30 2 1/4, 3/8 110.2 30.5 30 55.1 35 26.5 41 35 7 14 6 42.5