Direct Solenoid

NPTF PodLocallon P A B EA EB sP0101/sP01r r 1/B s S sPot0zsP0112 S sP01m/sP0113 1/6 9B S/B S/B s/B S/B sPoto4/sP0114 1/. B B B sPor05/sP011s la S S S Electrictl Conncllons: Class 1 suFplates provide access of alectri(El solenoid leads from the vatue bass inlothe conduitcavitywithinthe sub-platediecasting.

3 Way,3 Port Solenoid Valve NVZ Series

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

NVZseies

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

3

L/min 2100 L/min PFMC7202 Rated flow range Set flow rate range Displayable range Analog Output Flow/Analog Output Output A B C Voltage output 1 V 1.04 V 5 V C Current output 4 mA 4.16 mA 20 mA Model Minimum flow of rated flow range Maximum flow of rated flow range PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min B A 0 Flow Minimum flow of rated flow range

HRX-OM-W032

20 15 15 10 10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Air Pilot Operated Series NVSA

I$ODEL NO. 2 , 1 3 (s4) S P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s I 2 MTNG HOLES .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?

ZL3-OM00801

to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1) 2) 3) 1. 2. 3. 4) 1. 2. 3. 4. 2 - No.ZL3-OM00801-A /ZL3ZL6 / 1)1 1.5 *3) 2) 3 3)1 1 () 3 - No.ZL3-OM00801-A () -() 4 No.ZL3-OM00801-A 1.

I

B: Wall mount, DIN rail Mass A: Approx 90g.

MHx-OMM0057

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / 1 1.5 *3) *3)1 1 () 3 - 2

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: JS (w/Automatic Fluid Fill Function + Conforming to CE/UL Standards)

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: w/Automatic Fluid Fill Function + Conforming to CE/UL Standards

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: w/ Earth Leakage Breaker + w/ Automatic Fluid Fill Function + Applicable to Deionized Water Piping

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Conforming to CE/UL Standards

Cooling Method: Water-cooled Refrigeration, Pipe Thread: Rc, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Conforming to CE/UL Standards

Cooling Method: Water-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Applicable to Deionized Water Piping + Conforming to CE/UL Standards

Cooling Method: Water-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Conforming to CE/UL Standards

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Applicable to Deionized Water Piping

Cooling Method: Air-cooled Refrigeration, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: Applicable to Deionized Water Piping + Conforming to CE/UL Standards

Cooling Method: Water-cooled Refrigeration, Pipe Thread: Rc, Power Supply: 3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz, Option: w/Automatic Fluid Fill Function + Conforming to CE/UL Standards