Quick Exhaust Valve Series AQ

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can be

Speed Controller with One-touch Fittings Series AS In-line Type 1

AK ASS ASR ASF 15-9-11 3 Series AS Construction Component Parts No. q w e r t y u i o !0 !

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

AK ASS ASR ASF 15-9-25

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

ASV AK ASS ASR ASF 15-9-73 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: AG01 (G1/8, Direct Mounting, Male Thread)

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: AG02 (G1/4, Direct Mounting, Male Thread)

Adapter Material: S (Stainless Steel, Stainless Steel 304), Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: A20 (M20 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN02 (NPT1/4, Female Thread)

Electro-Pneumatic Positioner NIP600.NIP610

For rewrse operation mode, in wf|ich the valve stem mo!

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 40 (ø40), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: AG03 (G3/8, Direct Mounting, Male Thread)

Residual Pressure Release Valve

Pressure in the cylinder MPa D L1 Q Condition: Cylinder I.D. 100 Stroke 200 mm ASP 0.5 B A D 0.4 8 4.2 ASN Applicable tubing W (mm) 0.3 M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M AQ 0.2 KEA06 KEA08 KEA10 KEA12 12.8 15.2 18.5 20.9 24 27 29 31 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22 10 15 22.5 29.5 ASV 0.05 MPa 0.1 0.05 AK

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Material 14284 NBR Description O-ring ASP y ASN AQ ASV AK ASS ASR ASF 15-9-35

Cooling Capacity: 100 (10 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 150 (15 kW), Cooling Method: W (Water-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 100 (10 kW), Cooling Method: A (Air-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)