MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) Width across flats B1 H1 2 x NN MM MM NA 2 x Eh8 20, 25 D D Standard port Width across flats KA 45 45 1.5 A AL K Relief port (10-, 21-) H + Stroke A AL K 1.5 Vacuum port (11-, 22-) ZZ + 2 x Stroke S + Stroke F H F (mm) Female Rod End Female rod end 2 x M5 x 0.8 Relief port (10-) Vacuum port (11-) A1 20 20 20 21 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x

Air Slide Table

A) MXQ12B 50 28 20 27 18 MXQ20(A) MXQ16B 57 31 20 30 19 MXQ25(A) MXQ20B 64 32 21 31 20 -X11 is not available for the MXQ6(A, B) and MXQ8(A, C).

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Battery-less

35 40 to 50% 160 140 Lead 2.5: LEY16EC 120 Lead 5: LEY16EB LEY32E A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEY16EA 80 LEY40E A 24 to 30 50 to 65% B/C 21 to 30 60 40 Min. 20% 0 20 10 0 20 30 40 50 60 70 Pushing force set value [%] Max. 65% Model LEY16mE LEY25mE LEY32mE LEY40mE Lead A B C A B C A B C A B C Ambient

Tie-rod Type Hydraulic Cylinder

16 47 125 15 340 1/2 77 140 12 20 16 55 160 20 375 3/4 94 159 12 24 20 60 421 CHAW Series Dimensions Rod flange type: CHAWF 4 x FD 4 x J 2 x Rc P T T V V Cushion adjustment screw GA Air release GA M Width across flats G Width across flats G MM MM R (max.) d d W W D E E D FY B C MA a a FT MA B F NA NA F K A A K H + Stroke S + Stroke FX H ZZ + 2 strokes FZ (mm) Bore size (mm) A B C a B E D

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M20 x 1.5 20 B J M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M24 x 1.5 31.5 C series rod K M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M30 x 1.5 31.5 A M8 x 1.25 M10 x 1.5 185 145 95 80 50 40 25 26 M39 x 1.5 40 Note) The pin, keeper plate and cap bolt are included with a double knuckle joint.

F

G A S K E T C O N S T R U C T I O N A g a s k e t m a d e o f s t a i n l e s s s h e e t c o v e r e d w i t h l a m i n a t e d N B R o n b o t h s i d e s i s s e a t e d o n t h e chamfer of a female thread to materialize a perfect sealing construction irrespective of the difference in thread diameters due to the difference in the types of female threads, variation in tolerance, difference

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto

•

(mm) I ~ I ~ T --= (mm) Model A .8 .c H:M5 XO.8 H:M6 Xl .K .L Y 0 E 0 E Model A .8 C 0 E HM6Xl H:M8Xl .K .L Y F G 69.5 12.4 25 1 0.5 15 70 15.6 28 1 0.5 75 1 8.9 37 14 F G ZPY06B 6 7 2.5 20 45 25 50.5 3.3 9.1 4 ZPY08B 8 9 4.7 10.1 ZPY20B 20 22 23.5 33.5 53.5 1 79 . 5 ZPY25B 25 27 24 34 54 25 ~ ZPY32B 32 34 29 39 59 85 Apphcable tube Applicable tube P Q .

One-touch Fittings Series KQ2

O e b u t ) m m ( e l b a c i l p p A e z i s g n i t t i f d . o N t r a P D L1 L2 P Q A M n o l y N e n a h t e r U 2 . 3 2 . 3 9 9 3 2 U 2 Q K 6 . 9 0 5 5 . 7 1 6 . 9 9 5 3 5 . 5 1 4 . 3 9 . 2 6 4 4 9 9 4 0 U 2 Q K 4 . 0 1 5 . 1 5 8 1 4 . 0 1 7 . 9 5 . 5 3 6 1 2 . 4 2 . 4 2 1 6 6 9 9 6 0 U 2 Q K 8 . 2 1 5 . 5 5 0 2 8 . 2 1 7 . 1 1 5 . 8 3 7 1 4 . 3 1 4 . 3 1 9 1 8 8 9 9 8 0 U 2 Q K 2

1

A Series MGC 20 to 50 SZ + Stroke B D port C port A, B port B port A C port A port D port A View A-A GD GD Front mounting flange SB + Stroke B SA + Stroke A ZZ + Stroke A + Stroke B Bracket mounting With R Without R Stroke A stroke Stroke A + Stroke B ( ) Bore size (mm) W1 W2 SB SA GD ZZ GC SZ availability 30 30 Up to 200 96 50 9 176 21 20 35 st or more 89 110 30 30 96 50 9 183 21 25 60 st

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight, Water-jet-proof 2 L n Dimensions Formula L1 = 16n + 118.5, L2 = 16n + 131 n: Station (Maximum 20 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 (L3) (L4) 150.5

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight, Water-jet-proof 2 L n Dimensions Formula L1 = 16n + 118.5, L2 = 16n + 131 n: Station (Maximum 20 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 (L3) (L4) 150.5

ARM10/11

Common supply bushing 136144-S Individual supply bushing 136144-K Single unit regulator / Port plug for regulator block 136144-S 136144-K Option A-A A Nil X17 None A-A A Oil-free 12 12 10 A A 8 8 15 15 10 14-4-38 21 Regulator Single Unit Type Series ARM10 How to Order F.R.L. ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

Common supply bushing 136144-S Individual supply bushing 136144-K Single unit regulator / Port plug for regulator block 136144-S 136144-K Option A-A A Nil X17 None A-A A Oil-free 12 12 10 A A 8 8 15 15 10 14-4-38 21 Regulator Single Unit Type Series ARM10 How to Order F.R.L. ARM10 06 B Z 1 AV AU 1 2 3 4 1.

LJ1H

Mep a = 1000 2000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer L2 (mm) L3 (mm) m Rolling Yawing 200 L2 Mer 0 10 20 30 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

LX

(A contact) N.O. (A contact) Specifications N.O. (A contact) N.O.

0.4

A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight, Water-jet-proof 2 L n Dimensions Formula L1 = 16n + 118.5, L2 = 16n + 131 n: Station (Maximum 20 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 (L3) (L4) 150.5