CLQ

M E J 4-N through L G B + Stroke A + Stroke S Retraction locking LOCK V1 For retraction locking (mm) V1 30.5 35.5 40.5 Bore size (mm) 63 80 100 BP unlocking port (unlocks when pressurized) Dust cover (manual unlocking unit) Rod end male threads H1 For rod end male threads (mm) C1 26 32.5 32.5 X 28.5 35.5 35.5 H1 M18 x 1.5 M22 x 1.5 M26 x 1.5 L1 33.5 43.5 43.5 H2 11 13 16 Bore size (mm) 63

MQQ

7 18 10 5 M4 x 0.7 10 to 60 44 34 8 8 36 5.5 16 47 7 10 25.5 5.4 9 M6 x 1.0 7 19.5 10 6 M5 x 0.8 10 to 60 47.5 37.5 10 10 40 5.5 20 52 8 10 28 5.4 9 M6 x 1.0 7 23 10 49.5 7 M6 x 1.0 10 to 50, 75, 100 54 42 12 12 45 8.5 25 60 4.5 10 12 34 5.5 9 M6 x 1.0 7 26 10 57 10 M8 x 1.25 10 to 50, 75, 100 60.5 48.5 13 16 52 8.5 28 69 5 14 12 40 5.5 9 With rod end male thread/MQQ DM Rod end nut H1

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

D-A9, F9 Rod end nut C1 X L1 Rod end male thread (mm) Bore size (mm) C1 X H1 L1 32 20.5 23.5 28.5 M14 x 1.5 40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 (mm) Without auto switch With auto switch A B A B U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

With rod end male thread: MQQ-DM Rod end nut H1 (mm) Bore size (mm) L1 C1 H1 X 10 23.5 10.5 M5 x 0.8 15.5 16 26.5 11.5 M6 x 1.0 16.5 C1 20 28.5 13.5 M8 x 1.25 18.5 Rod end thread adapter X 25 34.5 16.5 M10 x 1.25 22.5 L1 30 40.5 22.5 M14 x 1.5 28.5 40 40.5 22.5 M14 x 1.5 28.5 Refer to page 9 for details regarding the rod end thread adapter and the rod end nut. 5 Compact Low Friction Cylinder

Compact Cylinder with Lock Series CLQ

M E J 4-N through L G B + Stroke A + Stroke S Retraction locking LOCK V1 For retraction locking (mm) V1 30.5 35.5 40.5 Bore size (mm) 63 80 100 BP unlocking port (unlocks when pressurized) Dust cover (manual unlocking unit) Rod end male threads H1 For rod end male threads (mm) C1 26 32.5 32.5 X 28.5 35.5 35.5 H1 M18 x 1.5 M22 x 1.5 M26 x 1.5 L1 33.5 43.5 43.5 H2 11 13 16 Bore size (mm) 63

Compact Cylinder with Air Cushion Series RQ

B + Stroke L K A + Stroke 2 x 4-M6 x 1.0 effective depth 10 M W Rod end male threads H1 Rod end nut C1 X L1 Rod end male threads mm Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Standard type mm A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5

PSxx-OML0002CN

) (H1) (H_1) (H1) (H1) OUT1 OUT2"1""2"() P_1 P_2 -29No.PS-OML0002CN-G [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1] OUT1(2729) 1[-], [F 3] <> [F 3] [F 3] -30No.PS-OML0002CN-G [F 4] <> [F 4] 1000 100 [F 4] [MPa]/[kPa(ZSE)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg] 26[F 0] -31No.PS-OML0002CN-G [F 5] <> [F 5] [F 5] -32No.PS-OML0002CN-G OUT1 AP1 (OUT1AP1 1AP2) OUT1

PSxx-OMM0006CN

) (H1) (H_1) (H1) (H1) : OUT1 OUT2"1""2"() P_1 P_2 -30No.PS-OMM0006CN-E [F 2] OUT2 OUT2 OUT1, ONON 30 <> [F 2] [OFF] [Err] 3 -31No.PS-OMM0006CN-E 24 [P_2] [n_2] "P""n" [P_2] [P2L][P2H] [F 2] OUT2 1 2 2 3Err[F 2]Er23Err 4OUT2OFFOFF -32No.PS-OMM0006CN-E [F 3] <> [F 3] [F 3] -33No.PS-OMM0006CN-E [F 4] <> [F 4] [F 4] -34No.PS-OMM0006CN-E OUT1 AP1 (OUT1AP1 1 AP2) OUT1 OUT1 OUT1

PSxx-OMM0002CN

) (H1) 1.1(MPa)2.2(MPa) 110(KPa) -111(KPa) (H_1) 1.1(MPa)2.2(MPa) 110(KPa) -111(KPa) (H1) (H1) 1.1(MPa)2.2(MPa) 110(KPa) -111(KPa) : OUT1 OUT2 "1""2"() P_1 P_2 -26No.PS-OMM0002CN-F [F 2] OUT2 OUT2 OUT1 , <> [F 2] [F 1] OUT1 (2426 ) [F 3] () <> [F 3] [F 3] -27No.PS-OMM0002CN-F [F 4] / / 0 <> [F 4] -28No.PS-OMM0002CN-F [F 4] / 5ms ooo1 C_5 10 ms o.r1 ( ) OUT2 C_5C_5

Air Slide Table

Stroke Adjusters (Accessories) How to Order Dimensions Metal stopper with bumper MXQA X2202 CS 12 Table P Width across hexagon socket hole C D Metal stopper with bumper Extension stroke end adjuster fixed from the axial direction Size E 8 12 16 20 25 Width across hexagon socket hole B M H1 F G 11 A A1 Metal Stopper with Bumper [mm] Model Adjuster part no.

0.4

Example) -DN Caution Manifold (DIN rail mounting) 4(A) 2(B) 4(A) 2(B) VVQ2000-FPG06 Air leakage from the pipe between the valve and cylinder or from the fittings will prevent the cylinder from stopping for long periods of time. Check the leakage using neutral household detergent, such as dish washing soap.

0.4

Example) -DN 4(A) 2(B) 4(A) 2(B) Manifold (DIN rail mounting) Caution VVQ2000-FPG06 Air leakage from the pipe between the valve and cylinder or from the fittings will prevent the cylinder from stopping for long periods of time. Check the leakage using neutral household detergent, such as dish washing soap.

Compact 5-Port Solenoid Valve

(Wireless compatible) ZK2 Combination Manifold PR S 1 EX600 EX600 1 EN W Version Protocol Protocol Fittings, Replacement Parts, Tools Symbol Description Symbol Description PR PROFIBUS DP DN DeviceNet Symbol SI unit type Description EN Wireless base module EtherNet/IP*1 Nil When MJ, EN, EC, or PN is selected A When PR or DN is selected PN Wireless base module PROFINET*1 SV Wireless remote

Fieldbus System

Features 4 Fieldbus System Series EX600 RoHS How to Order S EX600 SI Unit Version Protocol Symbol Description PROFIBUS DP DeviceNet CC-Link EtherNet/IP Note 1) Symbol Description When MJ or EN or EC is selected When PR or DN is selected PR DN MJ EN EC Nil A EtherCAT Note 1) Output type Symbol Description PNP (Negative common) NPN (Positive common) 1 2 DX EX600 Digital Input Unit Input type

2–4

Printed in Japan. 1st printing September, 2003 D-DN P-120 (DN) Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Compact Type

Printed in Japan. 1st printing June, 2003 D-DN P-120 (DN) Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Electric Actuator with Integrated Guide

Printed in Japan. 1st printing November, 2002 D-DN P-80 (DN) This catalog is printed on recycled paper with concern for the global environment.

High Purity Fluoropolymer

P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

Modular F.R.L. Unit

Printed in Japan. 1st printing March, 2003 D-DN P-120 (DN) This catalog is printed on recycled paper with concern for the global environment.

Table of Contents

How to order manifold VV5Q13 1(P), 3(R) port size: 1/4 08FSO DN 00T P How to order valves VQC VQ1130 5 N7 Cylinder ports Example) VV5Q13-09FS0-D K S SQ Applicable tube O.D. (Inch) 1/8" 5/32" 1/4" N1 N3 N7 Symbol VQ0 DIN Rail Mounting Others, option symbols: to be indicated alphabetically. VQ4 Each manifold can be mounted on a DIN rail.