CA2

are the same as the standard type.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Reference dimensions of 10-32 UNF and NPT threads after installation. 586 Series AS1F-D Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type Dimensions Universal type L6 D4 AS TMH ASD Applicable tubing O.D. d AS H D1 AS-FE KE (Hexagon width across flats) AS-FG AS-FP M1 AS-FM L3 AS-D AS-T AS-D AS-T A L4 ASP L5 D3 ASN AQ ASV AK VCHC L1 D2 ASS

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Note 3) 10 to 15 in decimal number are displayed as follows in the 7-segment LED. Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock. 576 Programless Controller LECP1 Series Controller Details e r No.

CL

CG-020-24A CG-025-24A CG-032-24A CG-040-24A 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 8 +0.036 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 20 25 32 40 10 10 10 10 (29.3) (33.1) (40.4) (49.2) 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 10+0.036 0 10 12 14 12+0.036 0 14+0.043 0 Tube dia. (mm) Tube dia.

HRX-OM-X037

Applicable Model HRL300-A-40-T3 CH1 CH2 Rated flow rate (Outlet) L/min Same as standard product 380.45MPa Maximum flow rate L/min Same as standard product 60 Pump Maximum lifting height m Same as standard product Same as standard product Minimum operating flow rate L/min Same as standard product 10 Tank capacity L Same as standard product 12 It differs from the standard cooling capacity.

OMU0023

Maximum value for the LAT3-10: 10 [m]) The minimum values vary depending on the movement mode as described below. Minimum value in REL operation: Card Motor stroke [m] x -1 (e.g. Minimum value for the LAT3-10: -10 m) Minimum value in ABS operation: 0 Note 2: Refer to the following examples for how to set the pushing speed.

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

HRX-OM-W002

Power supply If Option T is selected, Option T1 cannot be selected. 10 Single-phase 100VAC (50/60) *4 Power supply -10 (100V type) is UL standards as standard.

SX

For more than 10 stations, supply pressure through the P ports at both ends of the manifold exhaust through both ends as well.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5 CY1R50 25 110 8.6 10 M8 x 1.25 15 Rc 1/4 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63 CY1RG Bore size

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

How to mount on the same manifold is shown on the following pages. 10-SYJ3000, 10-SYJ300 P. 301 10-SYJ5000, 10-SYJ500 P. 330 10-SYJ7000, 10-SYJ700 P. 360 When using 4/5 port valves as a 3 port valve The 10-SYJ3000/5000/7000/9000 series can be used as normally closed (N.C.) or normally open (N.O.) 3 port valves by closing one of the cylinder ports (A or B) with a plug.

Free Mount Cylinder

4.5 9.5 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 10 16.5 16.5 12.5 16 20 20 16 20 24 24 20 25 26.5 26.5 22.5 23.5 32 27.5 27.5 Note 1) Figures in the table above are used as a reference when mounting the auto switches for stroke end detection.

VFR

Max. 10 Other dimensions are the same as the grommet type.

CXS

B Model A B C D E F G CXS6 9 2.1 3.25 6.5 7 1.2 x 12 10 CXS10 9 2.1 5 10 7 2.5 x 14 10 G CXS15 12 2.1 6 12 7 3 x 16 13 CXS20 15 3.1 7 14 10 4 x 20 16 CXS25 20 3.1 7 14 10 5 x 22 21 CXS32 26 4.1 9 18 12 6 x 32 27 Dimensions other than those listed above are the same as for the standard type. 6 -XC18 NPT finish piping port Specifications CXS XC18 Bore size Stroke Auto switch Slide bearing

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 2.2-10 Series SYJ300 Base Mounted (With sub-plate) Grommet (G), (H): SYJ3l4-l G H ll-M5 14 5 10 SY SYJ 28 2-3.2 17 3 (Mounting holes) VK Manual override 2.5 Depress and turn to operate and lock override.

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Universal Metric size 04 06 08 10 12 Inch size 01 KE 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 03 05 07 09 11 AS-FG With One-touch fitting AS-FP AS-FM M5 Port size AS-D AS-D M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 AS-T ASP Caution U10/32 N01 N02 N03 N04 ASN Be sure to read this before handling the products.

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.