High Vacuum Angle Valve, XL Series

A cm Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1D3/L l/sec, at an air temperature of 20C. ON OFF Short pipe conductance From the Clausings factor K and the hole conductance C in the drawing below (Clausings factor drawing), the short pipe conductance CK is easily found as CK=KC.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1D3/L l/sec, at an air temperature of 20C. Short pipe conductance From the Clausings factor K and the hole conductance C in the Drawing 1. (Clausings factor drawing), the short pipe conductance CK is easily found as CK=KC.

This is a legacy product, and replaced byIS10E-30F03-6L-A, PRESSURE SWITCH/REED TYPE, INSTRUMENTATION, IS/NIS PRESSURE SW FOR FRL, EA, NIS1000E/M 3/8 PT, .25194 lb

This is a legacy product, and replaced byIS10E-40F04-6L-A, PRESSURE SWITCH/REED TYPE, INSTRUMENTATION, IS/NIS PRESSURE SW FOR FRL, FA, NIS1000E/M 1/2 PT, .40124 lb

Emitter Cartridge Type: D (High Speed Static Neutralization Cartridge), High Voltage Cable Length: 2 (2m), One-touch Fitting: 6L (ø6 Elbow), Power Supply Cable Direction, Length: T (Entry Direction: Angled, Length: 5 m), Communication Cable Entry: T (Entry Direction: Angled, Length: 5 m), Nozzle Bracket: F (Angle Adjustment Bracket), DIN Rail Mounting Bracket: U (Controller: Included; Supply

Reservoir for filter series FN1; Tank capacity: Model 4102=6L; Port size: Rc 2; Material (bowl & cover): SUS304; Material (O-ring): NBR or FPM

Reservoir for filter series FN1; Tank capacity: Model 4102=6L; Port size: Rc 2; Material (bowl & cover): SUS304; Material (O-ring): NBR or FPM

This is a legacy product, and replaced byIS10M-40-6L-A, PRESSURE SWITCH, REED, MODULA, INSTRUMENTATION, IS/NIS PRESSURE SW FOR FRL, 2X, NIS1000E/M NO (MISC./OTHER), .33803 lb

high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less, Ambient fluid temperature: -10 to 50C, GASKET FOR (PVQ13-6L

This is a legacy product, and replaced byIS10M-30-6L-A, PRESSURE SWITCH, REED, MODULA, INSTRUMENTATION, IS/NIS PRESSURE SW FOR FRL, 2X, NIS1000E/M NO (MISC./OTHER), .13668 lb

Emitter Cartridge Type: L (Energy Saving Static Neutralization Cartridge), High Voltage Cable Length: 3 (3m), One-touch Fitting: 6L (ø6 Elbow), Power Supply Cable Direction, Length: K (Entry Direction: Straight, Length: 5 m), Communication Cable Entry: K (Entry Direction: Straight, Length: 5 m), Nozzle Bracket: B (L-bracket), DIN Rail Mounting Bracket: U (Controller: Included; Supply Module

XL

A cm Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1D3/L l/sec, at an air temperature of 20C. ON OFF Short pipe conductance From the Clausings factor K and the hole conductance C in the drawing below (Clausings factor drawing), the short pipe conductance CK is easily found as CK=KC.

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Temperature oC 0 5 l0 l5 20 25 30 35 40 g/m'n *(Standard) 4.98 6.99 9.86 t3.76 18.99 25.94 35.12 47.19 OJ.UJ 3 g/m (Atrnospheric) 4.98 6.E6 9.5 t 13.04 17.69 23.76 3t.64 41.83 54.11 Temperrture oC 0 -5 -10 -t5 -20 -25 -30 -35 40 g/m'n (Standard) 4.98 3.36 2.28 1.52 1.00 0.u 0.4 0.25 0.15 g/m (Atmospheric) 4.98 l.6l 1.08 0.7 0.45 o.29 0.18 Temperstur oF 32 40 60 60 100 120 140 160 lm giftr

MXS

Refer to p.3.11-7 3.11-28 Air Slide Table Series MXS Dimensions MXS 6L/Symmetric style ZZ Z Basic style 20 0.5 18 CL 5 M 2.5 (With stroke adjuster at retraction end) MLGC 3H9 deep 2.5 +0.025 0 2.5 deep 3H9 +0.025 0 CNA N -1 X F 2 11 2-M3 X 0.5 thread 5 deep CB 10 F 9.5 (With stroke adjuster at extension end) CV/MVG 4-M2.5 X 0.45 thread 3.5 deep CXW 24 32 18 CXS 12 4 CXT 0.5 5.5 3 (With stroke

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f NVZ522O NVZ524O i,L4l/_t_\lb 4ltr a.t# *rFi NVZ532O NVZ534O ^mr'=rrn",fi#+nrh^ @ll++4JllF q4r+*filru NVZ5420 NVZ5440 ".,iT7T[TNTM 6l/rlirt r\16 NVzsr4GoG-gr, NVZ5540 NVZ5520 ModeI Body Fodd type Bas mountd typ with subplate ifications Fluid 2O-10OPS| (1.5 7 ksl / cm'1) 15-100PSl (,1.O Tkst / cm'.)

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Cassette base Nole)ln se or D0, only OIN 6l litings a anached rail length Lateral Nole 1) Double wiring specrRcanon: Single, double and 3 position solenoid vlves can be used on a Imaniiold slatrons Note 2) Specilied layout Indicate wrng specificatons on a manto d specdrcation sheer Nole thal double and 3 position va ves cannol be used where single solenod rviing has been specilied Pilot soecitication

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When sp4l4ng two or more oplons, 6l symbols r alphabelicalorder Exampl:.BRS Nole 1) When using lhe back pressure check valve lirr lhe necessarystalions on y enterlhe back pressure clrekEl@ part no and indcale the nlmber of hanilold strlons n the spfcaton sheet Nole2) ForspecralDlN ra lenglh. ndicate DlE.terthe numberol slalons Insde ll) 1 to 10 (20) Top ported elbow Wilh 032 Onelouch lilting

Modular F.R.L. Units

series, refer to the IS10 series section of the SMC website: http://www.smcworld.com Separate spacers are required for modular unit.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Model AMR3000 AMR4000 AMR5000 AMR6000 Model name 1 4 3 8 1 2 : E4-02 : E4-03 : E4-04 1 4 1 2 : E6-06 : E6-10 3 4 : E3-02 : E3-03 : E5-04 : E5-06 Adapter assembly (7) 3 8 3 4 1 AD33-X203 AD33-X202 AD33-X210 AD33-X201 Float type auto drain (AMR 100) (8) IS10-01 (0.4 MPa setting) Compact pressure switch 135510 135613 Elbow (R x Rc) (9) Note 5) in the gauge part number (e.g.

SMC's IS10 pressure switch is 16% lighter, and 11% smaller when compared to the IS1000.  The IS10 is RoHS compliant and CE marked.  Set pressure range is 0.1 to 0.4MPa (optional 0.1 to 0.6 MPa).