Thermo-chiller

No anchor bolt is included. *10 Weight when the circulating fluid is not included. *11 The capacity is 60 Hz even in the 50 Hz area when option C is selected. *12 The capacity is 60 Hz even in the 50 Hz area when option P is selected. *13 The weight will increase by 4 kg when option C and P is selected. 12 A HRLE Series Compact Dual/Basic Type for Lasers Cooling Capacity HRLE050-A-20

High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 0.35 45 XLA Construction/Operation XL XL Internal control

0.4

4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

A A R P R A A 62.3 (DIN: 63.6) 30 R P R 61.5 (DIN: 62.8) 21 21 83.7[85.9] 84.5[86.7] 21 60 B B B B B 1/4 (P, R port) (Pitch) P = 19 Manual override 23.5 (Station n) (Station 1) (Light/surge voltage suppressor) + + + + + 58[65] 42.6 26 B B 19 40 A A 1/8 (A, B port) 2 (Pitch) P = 19 23.5 L plug connector (L) M plug connector (M) DIN Terminal (D) M8 connector (WO) Applicable cable O.D. 3.5 to

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

MY1

Bore size (mm) Unit A H A A L H A L H A L H A L H Tightening torque MY1B80 Horizontal collision: P = 0.5 MPa 0.3 10 2000 1500 0.6 16 Collision speed (mm/s) Collision speed (mm/s) Air cushion Caution Use caution not to get your hands caught in the unit.

CA2

100 12 60 162 Note) This assembly drawing is provided as a reference.

Free Mount Cylinder

Applicable bore size (mm) d H1 B1 C1 Width across flats L 2-P through 4-T counterbore S + Stroke Z + 2 x Stroke W + Stroke 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 5.5 6.4 A' A' M4 x 0.7 2.4 7 8.1 M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 Bore size (mm) A GB H A' B J C K D L MM E NN GA P Q QA 6 10 16 20 25 32 15 16.5 16.5

Air Cylinder

ZZ + Stroke H 40 P 32 to 40 (Rod side pressure port) 4 x FD (mm) Mounting hole Bore size A AL B1 B2 C2 D F FB FD FT FX FY FZ G H H1 H2 I K KA MM N NA NN P Q QY S Z ZZ 20 18 15.5 13 26 30 8 13 34 7 4 60 75 41 5 8 28 5 6 M8 x 1.25 15 24 M20 x 1.5 1/8 19.8 14 62 37 103 25 22 19.5 17 32 37 10 13 40 7 4 60 75 45 6 8 33.5 5.5 8 M10 x 1.25 15 30 M26 x 1.5 1/8 22 14 62 41 107 32 22 19.5 17 32

Refrigerated Air Dryers

p. 38 Dust-protecting filter set *3 For preventing a decline in the performance of air dryers, even in a dusty atmosphere.

CY1

Do not use a load that generates surge voltage. If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K L M C D E H I A A B F 5.5 P M5 x 0.8 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 14 7 34 33 Rc 1/8 7.5 10.5 13 16 45 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 14 7 40 Rc 1/8 8 11 13 16 52 69 11 8 M10 x 1.5 50 Rc 1

VZ100/300/500

M plug connector (M) 1 8 24 VAC 50/60 Hz 48 VAC 50/60 Hz VFN 110 VAC 50/60 Hz Non-locking push type 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC Locking type (Slotted) VZ300 DIN terminal (D) Locking type (Manual) 1.2 2 3 (A R) 1 8 VZ500 2.7 2 3 (A R) 1 8, 1 4 4-6-1 2 Series VZ100/300/500 Manifold Variations A port size One-touch fitting P/R port size Applicable tubing O.D.

CL

If the lock is applied at a desired position of a stroke and compressed air is applied to only one side of the cylinder, the piston will lurch at a high speed the moment the lock is disengaged. In such a situation, there is a risk of injury to humans, or equipment damage. To prevent the piston from lurching, use a balance circuit such as the recommended pneumatic circuit (P . 9-2-6).

CM2

+ 2 x Stroke Z + 2 x Stroke CP95 NCM Built-in One-touch fittings One-touch fitting port size P Spring return One-touch fitting port size P Spring extend NCA D-X 20Data H1 H G FZ FY FX FT FD AL B1 F MM A B2 C2 H2 I B D E K N NN P Bore size (mm) NA 0 0.033 0 0.033 20 41 8 75 60 4 7 13 18 34 8 5 15.5 13 26 30 5 8 28 M8 x 1.25 15 24 M20 x 1.5 1/8 20 25 45 8 75 60 4 7 13 22 40 10 5.5 19.5 17

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts JSX (Stainless steel/Brass) p. 7 JSX (Aluminum) p. 9 JSX (High flow/ Power saving) p. 11 JSXD p. 25 JSXZ p. 35 JSXM p. 39 The solenoid coil assembly is shipped with a name plate with the valve part number printed on it.

7ND9071en

Fig. 10 Control wiring, ND9000F/P, Ex ia for Zone 0 / Division 1 7 ND90 71 en 19 N O I T A C O L S U O D R A Z A H N O I T A C O L S U O D R A Z A H N O N ND9000F/P Valve Positioner FISCO ic Power Supply / Barrier Fieldbus Input X102 Ui (Vmax) = 32 V Ii (Imax) = 380 mA Pi (Pmax) = 5.32 W Li = 10 uH Ci = 5 nF + 1 Uo (Voc) 32 V Io (Isc) 380 mA Po 5.32 W 2 NOTE 1 NOTE 1 NOTE 1 3 SHD Earthing

Table of Contents

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Applicable connector: Flat ribbon cable connector (20P) (Conforming to MIL-C-83503) VQZ D side n Stations 8 7 6 5 4 3 2 1 U side VQD P P A A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting