VXA21/22

Caution Check Safty Instructions on p.0-33 and common precautions on p.0-37 to 0-40. 4.0-14

AZ1000

Refer to gauge guide (P.94).

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

VP300/500/700

(Non-locking) Manual override 69.4 (30.5) 24 13.5 2-6.5 (For mounting) (X port) (M5 x 0.8) (R port) Rc 1/4 101.6 26.7 (17.5) 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) 3(R) 27 50 V100 1(P) MAX.10 D: 112.8 26.7 Y: 112.3 101.6 102.4 MAX.10 112.8 (P port) Rc 1/4 SY SYJ 300 (Pitch) Pg9 Pg9 85.6 95.6 27.5 28 (Lead wire length) 95.1 105.1 Y: 97.6 114.6 L1 L2 7.5 90.1 100.1 D: 95.6 112.6 Applicable lead wire

Fieldbus System

P P P P P P P P SY5000 P P P P P P P P SY5000 P P P P C2 C3 C4 C6 C8 CM N1 N3 N7 N9 CM 2 One-touch fitting 1/8" One-touch fitting 3.2 One-touch fitting 5/32" One-touch fitting P P P P P P P P P P P P P P Straight Elbow Straight Elbow 4 One-touch fitting 1/4" One-touch fitting 6 One-touch fitting 5/16" One-touch fitting 8 One-touch fitting Straight port, mixed sizes LN3 LN7 LN9

Clean Gas Filter

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 NPT 1/ 4 (Female

3 Port Solenoid Valve Metal Seal Series VZ200 1

BG-VZ402 BG-VZ403 VQ VKF BG-VZ405 VQZ How to Order Manifold Base VZ 1 06 30 VV3Z4 VS VFN A port size on base side Series VZ400 Manifold Model Symbol VV3Z4-S50 VV3Z4-50 Symbol Stations Symbol Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) 01 02 Rc 1/8 1 Common Common Top, Side Type 20, 30 and 50

Hydraulic

Bore size (mm) NN P S X Y ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 49 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Front flange type: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4-FD H1 H2 2-NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S +

VCC

.: XT13-406-X200) Note) Applicable to special manifold, too. 644 Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve) VCC Series VCC Series I N D E X P.646 How to Order P.648 Specifications/Weight P.650 Dimensions Single valve unit P.651 Manifold P.652 SUS316L Stainless steel fittings P.654 Special Tools VNA VNB Disassembly/Assembly/ Maintenance Procedure P.656 SGC

Pressure Gauge Guide

VE 3 Bleed port Model (Made to Order) Pressure range Note) Indication unit Connection thread VY1 Note Model MPa G43-2-01 to 02-X2 G43-4-01 to 02-X2 G43-6-01-X2 G43-7-01 to 02-X2 G43-10-01 to 02-X2 G43-2-01 to 02-X3 G43-4-01 to 02-X3 G43-6-01-X3 G43-7-01 to 02-X3 G43-10-01 to 02-X3 G43-2-01 to 02-X4 G43-4-01 to 02-X4 G43-6-01-X4 G43-7-01 to 02-X4 G43-10-01 to 02-X4 0 to 0.2 0 to 0.4 0 to 0.6

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in

Thermo-chiller

9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17 Communication Functions. p. 18 Options. p. 19 Optional Accessories. . p. 20 VCooling Capacity Calculation Required Cooling Capacity Calculation. p.

VFRA3000

+ 0.1) to 0.9, P: Operating pressure 0.1 to 0.9 3 position (0.6 x P + 0.1) to 0.9 P: Operating pressure Ambient and fluid temperature (C) 10 to 60C (No freezing.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M A L1 H/DL L/LL D1 D2 L2 KC H Connection threads KK Male Branch: KPQU, KPGU (M5) KK130 Effective area mm2 D Model L TPH TPS A (M5) 2 x Applicable tubing Connection thread R M H (width across flats) Note1) Applicable tubing O.D. mm Weight g P M P DM D M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Basic Style with Bottom Mounting: CG1KRN 2-Rc P Width across flats B1 S + Stroke ZZ + Stroke Stroke range (mm) Up to 150 Up to 200 Up to 200 Up to 300 Up to 300 Up to 300 Bore size (mm) 20 25 32 40 50 63 H1 ZZ H Y GB X B1 GA L MM S AL E KA LX P A D I LD LH N 104 111 117 135 155 161 27 32 32 39 45 45 11 12 13 16 17 19 10 10 10 10 12 12 38 44 45 55 62 64 20 22 26 30 33 39 75 77 83 94 108 114

VQ5000

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

Electric Actuators

Driver for Non-standard Motor Regenerative Absorption Unit Series LC7R Teaching Box Dedicated AC Servomotor Controller Series LC1 P. 205 P. 200 P. 185 P. 196 Features 5 Electric Actuator Line-up of Products Short Stroke Electric Actuator Series LX Series LX Stepper motor High Rigidity Slide Table Type Series LXS Low Profile Slide Table Series LXF Guide Rod Type Series LXP P. 250 P. 210 P

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel