Flow Control Equipment Air Flow/Effective Area Model AS12l1FM AS13l1FM AS22l1FM-01 AS23l1FM-01 AS22l1FM-02 AS23l1FM-02 6, 8 Tube O.D.
56.6 73.2 BUS IN 8.7 PWR PWR 4.7 (9.5) (Fitting for the type with P/E ports on U and/or D sides) 48.2 18 (Pitch) P = 16 (20.5) [External pilot] 18 31.8 4.7 (20) 50.5 39.7 15 3/5 E 3/5 E B 2 B 2 B 2 B 2 B 2 PE B A 3/5 14 A B A 14 A P 1 A 4 P 1 A 4 A 4 A 4 A 4 1 X E Cut dimensions for panel mounting Refer to panel cut dimensions for details. (59.8) P (31.7) 12 B 12 One-touch fitting [1(P),
-206) CC-Link WDT E <> *1 (RWr)code"01-***""*** 10.1.2 (RWr RWw)(P.38) 76 - 17.
Refer to external dimensions in pages 1-6-44 to 1-6-46, and then mount it. 1-6-43 SX7000: SS5X7-20Stations Grommet (G) 2n2-One-touch fittings (A, B port) 2n1-Rc 1/4 (A, B port) 6-Rc 1/4 L1 L2 Applicable tubing O.D.: 8 (Mounting hole) 4-4.5 10 (P, EA, EB port) 10 16.5 11.5 22.4 76.8 19.5 19 20.5 B A B A B A B A B A B A B A 20 20 EA EB P EB EA P 21 21 62.5 67.7 21 60 128.6 115.6 30 99.5 28.2
IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric Nil B L None With bracket With bottom bracket Inch Note 1) Accessories are shipped together.
Body size Port size Port M5 01 Nil M5 01 1(P), 2(A), 3(R) M5 IR-A A Body ported 8 1 Without sub-plate M5 IR Base mounted B Position for port P1 8 1 IRV 3 VEX1 3 10 G 5 VEX VEX SRH Regulator valve Option Bracket Foot Pressure gauge Silencer for bleed port Dimensions of port P1
(A) 2 110 VAC 220 VAC 1/8 1/4 AC L With light/surge voltage suppressor 3.8 1 (P) 3 (R) 240 VAC N.O. DIN (EN1753 01-803) terminal (A) 2 VP500 1 (P) 3 (R) External pilot N.C. 1/4 3/8 P. 8 8.8 Push-turn locking lever type (A) 2 1 (P) 3 (R) Conduit terminal VP700 X N.O.
B (D) K J F H K J (D) F H 2 x P Port size 2 x P Port size Conduit terminal: T DIN terminal: D M N E (N) (M) E C C 25 32 31.5 (44) A A G1/2 L L G1/2 OUT IN OUT IN Applications B B (D) F H (D) F H K J K J 2 x P Port size Cable 6 to 12 2 x P Port size With bracket e a g d Bracket h b i (mm) Model A B C D E F H J K Port size P N.C. 1/4, 3/8 1/2 3/4 1/1 40 52 65 70 22 29.5 36 40.5 20 26 32.5 35
SYJ712M--01 SYJ722--01 SYJ722M--01 Applicable blanking plate assembly SYJ700-10-2A A port 1/8 SS3YJ7-20 -05 -A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -+ -+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than
p>. .-~ --_1 124 (5000) ,/ /. / --/./-.P: 2 ;;; 900 (4000) !
Sealant/Gasket seal P.554 P.667 P.554 P.554 M/UNF/R/NPT More space beneath the tube. Easier installation/removal of the tube.
2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1 (P) 3
(Tightening torque of 0.3 to 0.4 Nm) Clamp screw B 2.10-23 3 Port Solenoid Valve VQZ100/200/300 Valve Single Unit Base Mounted Plug Lead Unit How to Order Valve VQZ100 VQZ 1 1 5 5 M 01 Series 1 VQZ100 Body width10mm Port size {2(A)port} Without sub-plate Rc(PT)1/8 01 CP Configuration (A) 2 N.C. 1 1 (P) 3 (R) Manual override B: Locking style (Slotted) : Non-locking push style (Flush) Body
With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)
20 20 stations Rc 1/4 Built-in One-touch fittings Applicable tubing O.D. 6 C6 Manifold specifications/Single base type B mount (P/E port size) Built-in One-touch fittings Applicable tubing O.D. 8 C8 Applicable valve model Piping P, E port Port size Symbol VV3Z4-S50: only C6 & C8.
P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R A, B port size (inch) A, B port size (metric) P, E port Applicable series P, E port Applicable series A, B port A, B port Symbol C4 C6 C8 C8 C10 C12 M Symbol N3 N7 N9 N9 N11 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting
A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1
VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .
Metal bowl B B B B B Dimensions B B N.C.: Gray N.O.: Black B 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 17 Width across flats 17 Standard specifications Bracket mount Model Port size A B C D P E F G H1 H2 J K L L M (1) (1) (1) (1) ACG20 ACG30 ACG40 1/8, 1/4 126 87 36 60 28.5 41.5 43 30 24 5.5 3.2 1/4, 3/8 167 115 41 80 30 55 57 41 35 35
11 Specifications p. 12 Set Pressure Range and Rated Pressure Range p. 13 Functions p. 13 Internal Circuits and Wiring Examples p. 14 Dimensions p. 15 How to Order p. 19 Specifications p. 20 Set Pressure Range and Rated Pressure Range p. 21 Functions p. 21 Internal Circuits and Wiring Examples p. 22 Dimensions p. 23 Function Details p. 29 Made to Order Specifications p. 33 Safety Instructions