VQ4000

check (A) 4 (B) 2 Note) 6 Light/Surge voltage suppressor 1 (P) 5 (R1) 3 (R2) Nil E Yes Without light, with surge voltage suppressor Note) For double check style, refer to page 2-5-36.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

HRX-OM-X084

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

VK300

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc G NPT NPTF 01 1 station Nil None 00F 00N 00T F With bracket (Not mounted) VT 20 20 stations P port: Rc 1/8 R port: Rc 1/8 VP Type 40: Base mounted (A port bottom ported) How to Order Applicable solenoid valve VK334Applicable blanking plate assembly VK300-42-1A Bracket VK300-43-1A VG VV3K3 05 40 01 VP P port: Rc 1/8 Thread

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

NCQ8

J M2 bolt circle W M1 E I dia.

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch (ZSE2) ZX1-K1-E Adsorption confirmation switch (P) (Release to atmospheric pressure) Pressure sensor Spacer 1 (For side mounting) Manual override (Non-locking

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

•

IMalo9ltofNd I P>oIIo, __"",, vtdlt ICfOSS Hats rhm NoII!) Ncrnnal !U~ 01 ,-"" 1/6 7 (09 2(12.7 150 ,,, 12 to 14 17 17.5) 200 31B 221024 19 200 2.

VXA21/22

Caution Check Safty Instructions on p.0-33 and common precautions on p.0-37 to 0-40. 4.0-14

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Booster Regulator/Air Tank

SRH SRP SRF ITV Pilot regulator IC ITVH P ITVX IN OUT PVQ E VY1 The outlet pressure is twice the pilot pressure.

Compact and Lightweight

V Port: Screw-in P/E Port: One-touch Fitting ZX Model H2 L4 Connection thread 2 ZM ZH05DA-06-01-06 12 26 Rc1/8 ZH07DA-06-01-06 ZH10DA-06-01-08 ZH13DA-08-02-10 17 36.3 Rc1/4 ZH15DA-08-03-10 19 37.1 Rc3/8 ZH18DA-10-03-12 39.1 ZH20DA-10-04-12 24 44.1 Rc1/2 ZL Metric ZH ZH ZH ZH05DA-07-N01-07 12.7 26 NPT1/8 ZH07DA-07-N01-07 ZH10DA-07-N01-09 ZH13DA-09-N02-11 17.46 36.3 NPT1/4 ZH15DA-09-N03-11

VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

NVZseies

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

3 Way,3 Port Solenoid Valve NVZ Series

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Refer to dimensions on p.4.6-11 and p.4.612 for details. Chrome treatment (Epoxy coating on inner surface) Housing Body q w e Tempered glass Sight glass AMD850 is aluminum casting Replacement Parts AMD450 Part No. Description Material No.