CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

42

kit: 0.32n + 0.75 S, T kit: 0.32(n2) + 1.8 F, T kit 18 stations Side 1/2 Option SV L F kitD-sub connector L T kitTerminal block box L L kitLead wire L S kitSerial transmission VQ4l00 VQ4l01 L kit 16 stations VQ4000 VV5Q41-lll Direct exhaust with silencer box SYJ S kit 18 stations Not including valve weight.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CRBU2W10-S CRBU2W10-SE A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) 10.5 10.5 M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 -0.004 -0.012 0 -0.036

CL

MNB h + l Z + l + Stroke ZZ + l + Stroke ZZ +Stroke Z +Stroke S +Stroke CNA CNS 125 to 160 CLS CLQ With rod boot A Rc BP lock-up port Unlocked when pressurized CD hole H10 Axis d9 B Rc BP lock-up port 2-Rc P MLGP Width across flats KA RLQ MLU EA D e ML1C Plug cap 2 positions l Dh + l Z + l + Stroke Z + Stroke S + Stroke ZZ + l + Stroke ZZ + Stroke -X 20Data Stroke range (mm) Bore size (

CY1

Model CY1H10 CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 Screw size M6 x 1.0 M4 x 0.7 M5 x 0.8 M8 x 1.25 Bolt dimensions Dimension t l-9 l-7 l-8 l-8 l-12 Nm 4.4 1.37 2.65 13.2 Fastening torque {kgfm} 0.45 0.14 0.27 1.35 Square nut l t 4.

ZP

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

Battery-less

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

MXQ

10 16 12 4 MXQ-CT12(L)-X11 15 32 G MXQ-CT12(L)-X12 25 42 B C MXQ-CT16(L) 5 23 J MXQ16(L) M10 x 1 M5 x 12 MXQ-CT16(L)-X11 15 33.5 35.5 20 12 17 14 5 33 MXQ-CT16(L)-X12 25 43 A K MXQ-CT20(L) 5 27 MXQ20(L) MXQ-CT20(L)-X11 M5 x 14 M12 x 1.25 15 41 44.5 25 23 37 13 17 6 MXQ-CT20(L)-X12 25 47 MXQ-CT25(L) 5 30 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-CT25(L)-X11 15 40 49 53.5 31 15 28 19 6 MXQ-CT25(L)-X12

CL

h + l S + Stroke ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZZ + l + Stroke 125 to 160 With rod boot B Rc BP lock-up port A Rc BP lock-up port Unlocked when pressurized 4-FD 2-Rc P Width across flats KA EB D e Plug cap 2 positions l S + Stroke ZZ

Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M5 x 0.8 3.0 8 LEYG32M L M6 x 1.0 5.2 10 25ALEC LEC S LEC SS-T LEC Y LEC Y 3.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Possible to transfer a workpiece at low-speed.

(Example) For M5: L1 = 10 Applicable shaft types: S, W Equal dimensions are indicated by the same marker.

Electric Actuator with Integrated Guide

SETUP I PORTOPORTLOOP SEC mm2/s LABEL PRO Main modes ALM mm/s L C Directs a program operation. RUN Operation mode ACTUATOR & CONSTRUCTION SYSTEM CONTROLLER POWER ALARM STOP Executes a JOG operation. JOG JOG operation mode HOLD /BS UP L R Monitors operating condition. MON Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear.

One-touch Fittings Series KQ2

S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2

ZX

Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

CXWM/CXWL

M L CX Plate mounting style with auto switch: CDPXW S M L Table (1) DHousing mounting style with auto switch: CDBXW M -X M L Table (2) 20Data Table (1) Plate Mounting Style with Auto Switch (CDPXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material CDPXW 10SM L CDPXW 16SM L CDPXW 20SM L CDPXW

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Model CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 CY1H10 Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t Nm 4.4 1.37 2.65 13.2 Tightening torque Square nut l t 4.

CQS

Nil S n 2 pcs. 1 pc. n pcs.