Compact 5-Port Solenoid Valve

Specification External pilot (SUP/EXH block assembly) q e r t w y u i q Series w Type 10 Side ported e Wiring 1 JSY1000 3 JSY3000 5 JSY5000 TC Spring type terminal block box T Terminal block box r Valve stations t P, E port entry U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 24 stations) TC: Spring type terminal block box T: Terminal block box Symbol Stations

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

Series VQ Metal Seal/Rubber Seal Body Ported

P kit F kit T kit PS (Side entry) FS (Side entry) Note 1) S kit is composed of a flat cable housing assembly (AXT1002PU20) of q SI unit and w P kit (20 pin).

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: J, K, T (mm) (mm) L2 + (3 x P) L2 = L2 + (3 x P) L2 = Q1 Q2 Shaft type Shaft type J K T J K T Q1 = M Size Size L1 + (3 x P) L1 = 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 Q2 = M Q2 = M M3, M4, M5 M3, M4, M5 30 30 K axis (T axis) J axis M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped

Sine Rodless Cylinder Series REA/REB

of load mass and operating pressure First tentative bore size determination W D 1.6 x P First tentative bore size determination 0.1 x Wcos + Wsin D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load mass & pressure Inclined operation W WV P PV (For vertical operation, refer to page 1012.)

Table of Contents

VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W D 1.6 x P 0.1 x W + W D 5.0 x P 20Data W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-64.)

Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

1

e, r, t, y q, w, t, y t Hexagon socket head plug r Plate mounting bolt MB Specifications and external dimensions other than above are the same as standard type.

Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L2 = 6 Applicable shaft types: K, T L2 + (3 x P) L2 = (mm) (mm) K axis T axis Q1 Q2 Q1 = M L1 = L1 + (3 x P) Shaft type Shaft type J K T K T Size Size 50 50 M3, M4, M5, M6 M3, M4, M5, M6 L2 + (3 x P) L2 = 63 63 M4, M5, M6 M4, M5, M6 Q2 = M Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6, M8 100 100 M5, M6, M8, M10 M5, M6, M8, M10 Symbol: A35 Machine female threads into the long

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

Fieldbus System

1 A, B port size q Series 3 5 Standard (101 psi (0.7 MPa)) Quick response type (101 psi (0.7 MPa)) High pressure type (145 psi (1.0 MPa)) Nil B K Thread piping SY3000 SY5000 Symbol Port size M5 x 0.8 1/8 Applicable series M5 01 SY3000 SY5000 Only metal seal type is available for the high pressure type. w Type of actuation One-touch fitting (Metric) SY3000 P P P P SY5000 Symbol A and B port

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

110VAC 4 220VAc 5 24VDC 6 12VDC 9 Others (Special Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 2.71 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O N P A R T S A S S E M

CY1

D1.6x P First tentative bore size determination 0.1xWcos+Wsin D5.0x P 0.1xW+W D5.0x P W W>WV P>PV Determination of allowable load weight & pressure Inclined operation (Refer to p. 39 for vertical operation.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

5 Port Solenoid Valve

R2) 1 (P) 5 (R1) 3 (R2) q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC5200 VQC5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQC5301 VQC5401 (A) 4 (B) 2 (A) 4 (B) 2 VQC5300 VQC5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQC5500 (A) 4 (B) 2 VQC5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

w P kit (20 pins).