Valve Single Unit

SX (Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(M): SY3140(R)-M-01-Q VQ5 VQZ VQD VFS VS VS7 VQ7 1.2-33 Base Mounted Type Series SY3000 Dimensions Note)< >: Values with surge voltage suppressor 2 position double Grommet (G), (H): SY3240(R)-01-Q Scale: 35% G H With interface regulator 141 15 68.5 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01-Q M type plug connector (M): SY3240(R)-M-01-Q 1.2-34 Base

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receipt of order. 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) IC circuit 5 V, 12 V 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since there are other

Modular/F.R.L. Units Series AC

0.5 m 0.5 m 0.5 m 3 m 3 m 3 m 3 m Option 500 Note) This product is for overseas use only according to the new Measurement Law.

5 Port Solenoid Valve Series VQZ1000/2000/3000

T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage Electrical entry Light/surge voltage suppressor Manual override VQZ1000

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M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

reduces flow setting time

1/4 V V V V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS-FP AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS-T AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS3ll1FSGl-l02 1/4 V V V V V V V AS3ll1FSGl-l03 3/8 V V V V V V V AS-FP AS4ll1FSGl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSGl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSGl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSGl-G02 1/4 V V V V G Face seal AS3ll1FSGl-G03 3/8 V V V V AS-T AS4ll1FSGl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

I

01) and oilfree air supplied to the pilot port. 8. M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Direct Operated

Add an in front of the part numbers for solenoid valves, etc. to be mounted. 1 2 3 4 7 8 J 5 6 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V U side 1 2 3 4 5 n Station D side AC Note) Note) Enter the products part number in order, counting the 1st station from the left in the m a n i f o l d arrangement, when viewing the individual port in front.

60

m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

CG5-S

R V Basic type (B)/CG5BAS : With air cushion WA WB GA GB 2-P W 10 H1 Width across flats B1 M BM Max.

Modular F.R.L. Unit

(The SI unit type is provided for use in Japan.) 01 02 03 04 06 10 1/8 V 1/4 V V V 3/8 V V 1/2 V 3/4 V V 1 V 17 Series AC Spacers and Brackets Accessories Spacer (X) D Center of F.R.L. body C 1 X-X B X RELEASE 2 Y200 Y400 X Applicable model A 6 3 4 5 5 B 27 35.5 47 57 61 C 15 18.5 26 31 33 D 33 48 59 65 70 Model Y100 Y200 Y300 Y400 Y500 Seal AC10, AC10A, AC10B AC20 AC25, AC30 AC40 AC40-

A

E N S I O N S 5K8-10P/4P/2.5P D I M E N S I O N S 4K8-10P/4P/2.5P D I M E N S I O N S G27-10-R1 VACUUM GAUGES H O W T O O R D E R V A C U U M G A U G E S Scale in mmHg Center Back Mount 18 or 14 Connection 42mm Diameter Face GZ46 A T H R E A D T Y P E Rc(PT) N NPT M O U N T I N G Standard C Panel Mounting C O N N E C T I O N T H R E A D 01 1/8 02 1/4 M M5 (10-32Nom) Female I N T E R N A L

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

SMC Electronic Switch Series Variations

F.S. = 5[V] 1[V] = 4[V] 3[%F.S.] = 4 X 0.03 = 0.12[V] Detection Analog output voltage [V] Pressure indication [kPa] Switch The output error induced by the temperature change can be as much as 0.12[V]. 1.12 1 0.88 P3 0 Vacuum Pressure Rated pressure P1 P2 103 100 97 Pressure display = 100[kPa] Temperature characteristic = 3[%F.S.]

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T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

5 Port Solenoid Valve

Lead wire length 0 1 2 0.6 m 1.5 m 3.0 m Electrical Characteristics Item Property Conductor resistance /km, 68F ( 20C) Sheath Color: White 65 or less Voltage limit V, 1 min, AC Polarity Terminal no.