Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Connector Type: S (M12 connector type), Bracket: A5 (Bracket E for M12 Connector Type)

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Connector Type: S (M12 connector type), Bracket: A5 (Bracket E for M12 Connector Type)

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Connector Type: S (M12 connector type), Bracket: A5 (Bracket E for M12 Connector Type)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)]

Modular Type Regulator Series AR

Contact P/A when using the regulator between a solenoid valve and an actuator.

Compact and Lightweight

V Port: Screw-in P/E Port: One-touch Fitting ZX Model H2 L4 Connection thread 2 ZM ZH05DA-06-01-06 12 26 Rc1/8 ZH07DA-06-01-06 ZH10DA-06-01-08 ZH13DA-08-02-10 17 36.3 Rc1/4 ZH15DA-08-03-10 19 37.1 Rc3/8 ZH18DA-10-03-12 39.1 ZH20DA-10-04-12 24 44.1 Rc1/2 ZL Metric ZH ZH ZH ZH05DA-07-N01-07 12.7 26 NPT1/8 ZH07DA-07-N01-07 ZH10DA-07-N01-09 ZH13DA-09-N02-11 17.46 36.3 NPT1/4 ZH15DA-09-N03-11

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

VEX1

Refer to p.5.3-1 for details. 5.1-36

VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

TABLE OF CONTENTS

H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

VT307

VV307-01-3--F P = 26 (Applicable cable O.D.)

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

PSxx-OML0002CN

10(P-P)10() 40 mA NPN PNP 1 NPN PNP 2 80 mA 28 V(NPN ) 1 V (80 mA ) 2.5 ms (2010050010002000 ms ) 0.2F.S. 1 digit 0 1 () 15 V2.5F.S. 0.65 V2.5F.S. 2 1F.S. 1 k () 420 mA2.5F.S. 2.420 mA2.5F.S. 1F.S. 12 V 300 24 V 600 50 3 4 7 LCD 2 (/) 2 F.S.1 digit(253 ) ON OUT1 OUT2 IP40 050 -1060 () 3585RH AC1000 V 1 50 M (DC500 V ) 2F.S.(25 ) 3 3.52 m 4 0.15 mm 2(

Booster Regulator/Air Tank

V 10 T = t x = 89 x = 89 (s).

VXA21/22

Note 2) Value on option V, M (Non-leak, Vacuum). Port A Port P Pilot Pressure Port P (N.O.) Model Pressure (MPa) 0.25 to 0.7 VXA31 4 VXA32 4 Option Material No.

PSxx-OMU0002CN

kPa -0.1001.000 MPa / 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050 MPa / 0.1 kPa 0.001 MPa 500 kPa 1.5 MPa DC1224 V10 (p-p)10 35 mA 2F.S. 1digit(253 ) 0.2F.S.1 digit 2.5F.S.(253 ) 1F.S. 2%F.S.(25) NPN PNP 2 80 mA (NPN) 28 V () 1 V (80 mA ) 1 1.5 ms (20,100,500,1000,2000,5000 ms ) 0 2 15 V 0.65 V 1 k 420 mA 2.420 mA 12 V 300 24 V 600 50 0.4 V 5 ms -75No.PS-OMU0002CN-D

ZSE30A(F)/ISE30A

For vacuum/ compound pressure ZSE30A 01 N M ISA2 Option 3 Note) Calibration certificate Nil Y K T Note) Operation manual ISE35 Symbol Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa PSE Piping specifications IS 01 Note) All texts in both English and Japanese.