Compact Manifold Regulator Series ARM5

X 12.5 X X Y Y X X Y X 5 5 5.5 5 X Y Fitting size Fitting size Fitting size Fitting size 4, 5/32 4, 5/32 6 6 3 11.5 19 19 20 6 6 8, 5/16 8, 5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

Air Slide Table Series MXJ

Operating port 2 x M3 x 0.5 J I Vacuum port M3 x 0.5 (Plugged when the product is a symmetric type.) (Not plugged in the case of the clean series) 3.5 4 MXH MXU 3 8 K MXS 4 x M3 x 0.5 thread depth 5.5 Note 2), Note 3) 2 x M3 x 0.5 thread depth 3.5 17 5 MXQ MXF Note 1) Use an optional stepped positioning pin. (See page 175.)

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Mount of single unit 24 or more 0 0.4 31 31 x n pcs. + 3.5 x (n pcs. 1) ZSE ISE 31 0 0.4 0 0.4 31 ZSP PS ISA PSE IS ISG ZSM Vertical stacking mount of multiple units (n pcs.) 0 0.4 31 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 851 Series PSE300 Dimensions PSE3T 38 8 x M3 3 x 7.2 (= 21.6) Front protective cover (Option) 2 x 3.4 mounting hole (Rotate 90 to mount) 6.4 2 x 6.4 1 2 3 4 35.5 28

PFxx-OMJ0005CN

/C6L/C8L/N7L 2 -68No.PF-OMJ0005CN-I PFM7S-C4/C6/C8/N7 2 -69No.PF-OMJ0005CN-I PFM7S-C4L/C6L/C8L/N7L 2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-33-D (ZS-33-F) -72No.PF-OMJ0005CN-I INOUT X693 IN OUT X694 IN OUT 10 PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 A B A B C4 4(5/32) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

Step Motor Controller

. 1 2 3 Circuit Cable color U V W Red White Black Connector A2 terminal no.

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

90

E x F x G x H 3600 Power consumption of existing product: 75,938 yen/year for 18,750 of total operation hours.

Thermo-con/Rack Mount Type

Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density g: 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 6 Thermo-con/ Rack Mount Type

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

D2 L1 L1 L4 L4 H H (Hexagon width across flats) (Hexagon width across flats) AS D3 D3 ASP L5 A1 L5 A1 A2 D1 D1 ASN A2 AQ T ASV T AK ASS Inch Size ASR L4 L5 A1 A2 M1 Max.

Series AS-FM/AS-M/ASD-FM

H (width across flats) D3 D3 L5 A1 L5 A1 A2 D1 D1 A2 T T Inch sizes L4 L5 A1 A2 M1 Max.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

tubing O.D. d L2 L3 M1 L2 L3 M1 TMH ASD AS D2 D2 L1 L1 AS-FE KE L4 AS-FG L4 AS-FP H (Hexagon width across flats) H (Hexagon width across flats) AS-FM AS-FM D3 D3 AS-D L5 A1 L5 A1 A2 D1 D1 AS-T A2 ASP T ASN T AQ ASV Inch Size AK L4 L5 (1) A1 (2) A2 (2) M1 Max.

Rotary Cylinder Series MRQ Size: 32, 40 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F1 = x A1 x P (1) F2 = x A2 x P (2) A1 = D2 (3) 4 A2 = (D2 d2) (4) 4 F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area

S Couplers Series KK/KKH/KK13

x 1.5 24.5 32 62.6 16 13.0 25.0 106.2 125.0 171 Series KK Dimensions/Socket (S) Male thread type (mm) Effective area mm2 L1 Min. bore size A1 Body size H Width across flats A2 When connected T Connection port size Mass g L2 When connected KK2 Model D A2 T KK2 A1 8 2.5 24.7 KK2S-M5M 26.2 23.7 M5 x 0.8 6.1 3.8 21.7 10.0 M5 10 4.7 24.4 -01MS 25.9 22.8 R 1/8 9.1 5.8 6.0 36.6 KK3S-01MS 39.1

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

A1 D1 L5 D1 AS-D A2 AS-T T ASP T ASN AQ Metric Size ASV L4 (1) L5 (1) A1 (2) A2 (2) M1 Weight (g) Max.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Wall LEF x y LEJ LEJ x z LEL x 2. Bottom 4. Vertical LEM z y x y z LEY Example LES 1. Operating conditions Model: LEJS Size: 40 Mounting orientation: Horizontal Acceleration [mm/s2]: 5000 Work load [kg]: 20 Work load center position [mm]: Xc = 0, Yc = 50, Zc = 200 2. Select the graph on page 127, top and left side first row. LEPY LEPS 3. Lx = 220 mm, Ly = 210 mm, Lz = 430 mm 4.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Axis 1: Target position X Axis 2: Target position Y Axis 3: Rotation center position X Axis 4: Rotation center position Y CIR-R*1 u With Axis 1 assigned to the X-axis and Axis 2 to the Y-axis, it moves in the counter-clockwise direction by circular interpolation.

AS-FG/ASD-FG

A1 D1 L5 D1 A2 T T Metric size L4 L5 A1 A2 M1 Max.

EtherNet/IP TM Compatible Fieldbus System

(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.

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. 1 2 3 Circuit Cable color U V W Red White Black Connector A2 terminal no.

F/ISE

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations