Made to Order

125, 150, 175, 200, 250 94 M5 x 0.8 M5 x 0.8 109 M5 x 0.8 M5 x 0.8 20, 30, 40, 50, 75, 100, 125, 150 175, 200, 250, 300, 350, 400 109.5 M6 x 1.0 M6 x 1.0 135.5 M8 x 1.25 M8 x 1.25 25, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 142 M8 x 1.25 M8 x 1.25 155 M10 x 1.5 M10 x 1.5 160 M10 x 1.5 M10 x 1.5 OA OB OL P N TF 23 24 28 34 42 50 66 80 Bore size (mm) PA PB X XA YY YL Z PW XB S R T

MY1

x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M14 x 2 M16 x 2 K 10 12 9.5 16 15 28 32 LH 22.5 23 27 35 38 29 32.5 L 80 100 102 132 162 200 230 LD 3.6 4.8 5.6 6.8 8.6 11 13.5 MW 66 80 96 HG 13.5 17 22 27 34.5 45 59 MM M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 Model MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 U section detail dimensions P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G H K L M N R S1 S2 T U V W X Y E (g6) F (h9) Model CRBU2WU15-D 0 0.043 5 0.004 0.012 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 3.2 34 25 21.2 18 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 4 42 34.5 25 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8 29 4.5 42 52 69 4.5 50 47.5

Vacuum Module Series ZX

Port size M3 M5 M3 x 0.5 M5 x 0.8 Pilot port/External release port Pilot valve DC: 1 W (With indicator light: 1.05 W) Nil Note) In the case of ZX1VJ114, M, MN and MO cannot be used. AC DC: 0.45 W (With indicator light: 0.5 W) Y Caution 24 VDC and 12 VDC are applicable to 0.45 W. Note) Screw length of VJ100 and VJ300 for series ZX is different from that of the standard model.

ZP3

w q ZP3 T N 04 B5 e Connection thread (Female thread) M5 x 0.8 Width across flats D B5 M5 x 0.8 5 Model A B C2 D Vacuum inlet direction q Pad dia.

0.4

pressure release manual override 2 x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Stations 1 2 3 D side U side 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 152 141 130 119

Basic type / Direct mount type Series CY3B/CY3R

0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 M6 x 1 M32 x 2 0.007 0.037 M8 x 1.25 M8 x 1.25 M8 x 1.25 M10 x 1.5 P (Piping port) W X Y ZZ Model Mounting Nut/Included in the package (2 pcs).

CG5-S

female x M5 female x M5 male 4/2.5 x M5 MS-5AU-4 MS-5UT For piping soft nylon and polyurethane tubing Reducer bushing Connects Rc 1/8 to M5 fitting MS-5B R 1/8 x M5 female 6/4 x M5 MS-5AU-6 For piping soft nylon tubing For piping polyurethane tubing Plug Barb elbow for soft tube 3.18/2.18 x M5 Closes the unused M5 port MS-5P MS-5ALHU-3 3.18/2 x M5 Unrestricted 360 positioning and fastening

CG5-S

female x M5 female x M5 male 4/2.5 x M5 MS-5AU-4 MS-5UT For piping soft nylon and polyurethane tubing Reducer bushing Connects Rc 1/8 to M5 fitting MS-5B R 1/8 x M5 female 6/4 x M5 MS-5AU-6 For piping soft nylon tubing For piping polyurethane tubing Plug Barb elbow for soft tube 3.18/2.18 x M5 Closes the unused M5 port MS-5P MS-5ALHU-3 3.18/2 x M5 Unrestricted 360 positioning and fastening

Base Mounted Metal Seal/Rubber Seal Series VQ

Note 1) Cylinder port Symbol Port size Symbol Port size C3 C4 C6 M5 CM L3 L4 Note 2) With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch fitting for 6 M5 thread With mixed size/with port plug (1) L6 L5 B3 B4 B6 B5 LM W/ elbow One-touch fitting 6 for top piping Elbow M5 thread for top piping W/ elbow One-touch fitting 3.2 for bottom piping W/ elbow One-touch fitting

Air Fittings & Tubing

For soft nylon tube Universal elbow Body rotates at 360 around the stud axis MS-5UL Barb fitting 3.18/2.18 X M5 M5 female X M5 male MS-5AU-3 For polyurethane tube 3.18/2 X M5 P.2.3-23 For soft nylon and polyurethane tube Universal tee Body rotates at 360 around the stud axis MS-5UT M5 female X M5 female X M5 male P.2.3-23 4/2.5 X M5 MS-5AU-4 Bushing For reducing Rc(PT) female to M5 female

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-83503) C8 [3(R) EXH port] C8: 8 One-touch fitting R R 63.5 61 DIN rail clamp screw 40.7 25 B B B B B B B B X X 9.3 P P 7.7 18.7 13 A A A A A A A A P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2 L n Dimensions Formula L1 = 10.5n + 45.5, L2 = 10.5n + 63

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

-83503) C8 [3(R) EXH port] C8: 8 One-touch fitting R R 63.5 61 DIN rail clamp screw 40.7 25 B B B B B B B B X X 9.3 P P 7.7 18.7 13 A A A A A A A A P = 10.5 31.5 18.1 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2 L n Dimensions Formula L1 = 10.5n + 45.5, L2 = 10.5n + 63

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 Series Assembly part no.

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 max Q2 Size (mm) Q1 = M Q2 = M 10 X L1 max Q1 7 to 8 Size Y-3 M4 Y = 10 15 8.5 to 9 9 to 14 X-5 M4 Y-3.5 M5 L2 = L1 = 15 20 10 11 to 18 X-6 M5 Y-4 M6 20 30 X = 13 13 to 20 X-7 M6 Y-5 M8 30 40 15 16 to 22 X-8 M8 Y-6 M10 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

Modular F.R.L. Units

T-Spacer: (T) M5 x 0.8, 1/8, 1/4, 3/8, 1/2 Using a T-spacer facilitates the branching of air flow.

Proposals for Energy Saving

Y, Z directions for 2hrs. each 980m/s in X,Y,Z directions 3 times each Connector type Grommet type Heat resistant vinyl cord 1.55, 0.31mm,4 wire Oil resistant vinyl heavy duty cord -21, -23: 3.5, 0.14mm,4 cores -22, -24: 3.5, 0.15mm, 5 cores Lead wire Weight 40g (with 0.6m lead wire ) R 1/8, M5 x 0.8, NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Port size R 1/8, M5 x 0.8, NPTF 1

ZX

x 0.8 OXY: M6 x 1.0 Vacuum supply port 2-3.3 mounting hole Vacuum pad connecting port OX: M5 x 0.8 OXY: M6 x 1.0 OX: M5 x 0.8 OXY: M6 x 1.0 OX: M5 x 0.8 OXY: M6 x 1.0 13-2-16 16 Vacuum Module: Ejector System Series ZX Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1S B Adsorption Confirmation Switch Specifications Small diameter nozzle/0.3 to 1.2 ZSP1-S ZSP1-B Air 20 kPa

CV/MVGQ

Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 11 4 7 8.1 3.2 12.7 M8 x 1.0 M4 x 0.7 SNJ-016B NTJ-015A 14 4 8 9.2 4 16.2 M10 x 1.0 M5 x 0.8 NDd9 NDH10 R1 NX U1 Part no.

CV/MVGQ

Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 8.1 11 12.7 M8 x 1.0 4 7 M4 x 0.7 3.2 SNJ-016B NTJ-015A 9.2 14 16.2 M10 x 1.0 4 8 M5 x 0.8 4 NDd9 NDH10 R1 NX U1 Part no.