Compact Cylinder with Lock Series CLQ

YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no. Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no.

LEC-T1_C

LEC-OM08003 // LEC-T1 Series LEC6 LECPA TB Ver2.1 .5 .7 1. .9 1.1 .9 1.9 2.10 1.2 .11 1.11 2. .12 3. .13 3.1 .13 (1).13 (2)Tree .13 3. .14 (1).14 (2)Tree .15 4.16 5. .17 5.1 .18 5.2 .19 (1).19 (2).19 5.3 .20 (1).21 (1-1) LECPLECA 22 (2) .23 (2-1) LECPLECA 23 (2-1-a) TB Ver1.**. 23 (2-1-b) TB Ver2.**. 25 (2-2) LECPLECA 27 (2-2-a) TB Ver1.**. 27 (2-2-b) TB Ver2.**. 29 (2-3) LECPLECA .32 1

Dedicated Controller

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

I

-25 NPN output NPN open collector 30V, 80mA, residual voltage: 1V or less ZSE401 T1-26 Vacuum Analog output 1~5V (+ 5%F.S.), load impedance : 1k ZSE401 T1-65 PNP output PNP open collector 80mA ISE4L01 T1-25 Positive Pressure NPN output NPN open collector 30V, 80mA, residual voltage: 1V or less ISE4L01 T1-26 100kPa Analog output 1~5V (+ 5%F.S.), load impedance: 1k ISE4L01 T1-65 (14.5PSI) Type

Compact Cylinder with Air Cushion and Lock Series RLQ

T1 Approx. Max. T1 Approx. Max. T2 Approx. Max. T2 Approx. T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 15 for changed part. Number corresponds with the parts number on the construction drawing.

Tamper Proof and Flat Head Screw

1/4" 13.2 23.9 31 18.5 18.5 21 33.1 40.2 10 AS221F-N01-09ST AS221F-02-04ST 5/16" 15.2 25.3 32.4 15 21 10.4 16 4 34.4 25.2 AS221F-N02-03ST AS221F-02-06ST 5/32" 10.4 25.2 34.4 16 12.8 17 6 18.2 40.7 R 1/4 17 1.5 36.7 18.5 7 AS221F-N02-05ST AS221F-02-08ST 18.2 3/16" 11.4 24.9 34.2 17 15.2 18.5 27.2 8 36.4 AS221F-N02-07ST AS221F-02-10ST 18.5 7 33.9 20 40.7 1.5 36.7 NPT1/4 17.5 1/4" 13.2 25.2

Pressure Range: L (0~100kPa), Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: C (Connector Style Lead Wire Length 0.6m)

Pressure Range: L (0~100kPa), Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 55 (PNP Open Collector 1 Output)

Pressure Range: L (0~100kPa), Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: CL (Connector Style Lead Wire Length 3.0m)

Pressure Range: L (0~100kPa), Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: L (Grommet Lead Wire 3m)

Pressure Range: L (0~100kPa), Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: CN (w/o Connector)

Pressure Range: 0~100kPa, Port Size: Single Unit Mounting NPTF 1/8, Output Specification: PNP Open Collector 1 Output, Wiring Specification: Connector Style Lead Wire Length 0.6m

Pressure Range: 0~100kPa, Port Size: Single Unit Mounting NPTF 1/8, Output Specification: PNP Open Collector 1 Output, Wiring Specification: -

Pressure Range: 0~100kPa, Port Size: Single Unit Mounting NPTF 1/8, Output Specification: PNP Open Collector 1 Output, Wiring Specification: Connector Style Lead Wire Length 3.0m

Pressure Range: 0~100kPa, Port Size: Single Unit Mounting NPTF 1/8, Output Specification: PNP Open Collector 1 Output, Wiring Specification: Grommet Lead Wire 3m

Pressure Range: 0~100kPa, Port Size: Single Unit Mounting NPTF 1/8, Output Specification: PNP Open Collector 1 Output, Wiring Specification: w/o Connector

AC Servo Motor Driver

Refer to section 15.1.2 15 2 15.

Series SV

Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Cable with M12 connectors EX500-ACP. 15 Terminal plug EX500-AC000-S Attach a terminal plug when an input unit is not connected. 6 6 EX500 Decentralized Serial Wiring Series SV Valve Manifold Common Specifications Manifold Specification Sheets Valve Manifold Specifications

Series VQ Base Mounted Metal Seal/Rubber Seal

T1 (Terminal block of 1 row): 1-4 stations T2 (Terminal block of 2 rows): 5-8 stations T1 and T2 can be optionally chosen by adopting the combinations of single and double wiring(option spec.)etc.