0.4

Combination of [B] and [K] is not possible. Manifold VP4 1 Plug-in unit How to Order Vacuum Pressure Switches VQ 1/2 VQ 1/2 ZSE1 Wiring specifications CL 00 15 VQ 4/5 Switch spec.

•

F G J V , w K I KA l w LH LS 43 15 M14 x 1.5 15 17 15 27 I 19 85 188 15 I' 27 I Hi 100 188 17 I 34 I 19 106 206 43 15 M14 x 1.S ., 15' 1?

LX

to cross section C-C. 27.5 T-slo B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

Air Slide Table

14.9 16.7 M8 x 1 2.5 MXQ12B 27 13 5 20 20.2 21.9 M10 x 1 3 MXQ16B 30 16 6 27 25.5 28.1 M12 x 1 4 MXQ20B 31 17 6 27 32.3 34.8 M14 x 1.5 5 Model C F J K L1 L2 M N MXQ12 29 11 7 16.2 21.9 23.7 M8 x 1 2.5 MXQ12A, MXQ12C 18.9 20.7 MXQ16 30 11 9 20 27.2 28.9 M10 x 1 3 MXQ16A 25.2 26.9 MXQ20 26 6 9 27 34.5 37.1 M10 x 1 4 MXQ20A 31.5 34.1 MXQ25 45 25 12 27 41.3 43.8 M14 x 1.5 5 MXQ25A 38.3 40.8 MXQ8B

Battery-less

How to Order LEFS 25 H R B E 200 C N K R1 CD17T q w e r t u y i o !0 !1 !

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K)

New

IN), 2(OUT) port 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N Terminal part Faston connector 250 Series 0.90 K K 0.44 0.36 0.26 J H H J 0.59 (inch) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 0.55 0.55 0.75 0.87 0.55 0.75 0.87 1.19 1.19 1.56 1.88 1.19 1.56 1.88 0.59 0.59 0.79 0.94 0.59 0.79 0.94 2.46

&snac

Z b K g ( ! ' / i t h A u t o D r a i n : 1 . 3 5 k S ) _ M A S S k s 0 . 2 5 k s ( ! / i t h B r a c k e t : 0 . 3 1 k s ) D i m e n s i o n s 0 n e t o u c h f i t t i n s f o r P u r g e a i r e x h a u s t ( 0 P t i o n : P , P s ) c h e c k e r 9 8 d i a m e t e r i n c h ) p u t ' g i n o a i r D e w p o i n t l n o u t e r 8 rn m(5/16 D l i 0 n : .!.

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

Compact Manifold Regulator

t y u A B N 1.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

Modular Type Regulator Series AR

Specifications Applicable models X465 ISE30---L 0.1 to 1 0.001 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Part number suffix Model Set pressure range (MPa) Model AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K)AR60(K) 3/4, 1 1 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 1/8, 1/4 Port sizes Pressure switch Set and display resolution (MPa) Power supply voltage

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 16 M12 x 1.75 Bore size [mm] K KA LZ M MM N P PG PH PL PW S Without rod boot

XM, XY

Bonnet assembly Handle assembly Bonnet & Handle assembly/Construction part number: 1 Model Valve size Temperature specifications Indicator 16 25 40 50 63 80 XLA16-30-1 XLA25-30-1 XLA40-30-1 XLA50-30-1 XLA63-30-1 XLA80-30-1 General use XMA XYA XLA16A-30-1 XLA25A-30-1 XLA40A-30-1 XLA50A-30-1 XLA63A-30-1 XLA80A-30-1 XLA16-30-1H XLA25-30-1H XLA40-30-1H XLA50-30-1H XLA63-30-1H XLA80-30-1H High

CNA

2 stroke Z + l + 1/2 stroke MM MM Data W V TY D e D E H1 AL AL A A F BN TT K K 8 f l N C h + l B ZZ + l + 2 stroke S + Stroke H + Stroke ZZ + 2 strokes H TX TZ With rod boot on both sides ZZ + 2 l + 2 stroke Bore size (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14

CNA

2 stroke Z + l + 1/2 stroke MM MM Data W V TY D e D E H1 AL AL A A F BN TT K K 8 f l N C h + l B ZZ + l + 2 stroke S + Stroke H + Stroke ZZ + 2 strokes H TX TZ With rod boot on both sides ZZ + 2 l + 2 stroke Bore size (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

SQ1000/2000

(K) (Y) 5 6 5 6 5 6 u 4 For single VQ110LJ2-1 Negative COM: VQ110NJ2-1 5 For double (latching) SQ1C41 SQ1B41 SQ1A41 4 2 4 2 4 2 For double (double solenoid) on A side (K) (Y) 5 6 6 VQ110 (N)J3(B)-1 For 3P, dual 3 port on A side N.C. N.C. N.O. N.O. 1 5 3 1 5 3 N.O.