3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000 VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.
CA1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 CS1 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.
212.5 108 118.5 129 139.5 150 160.5 171 181.5 192 13.5 14.5 15.5 16.5 17.5 12.5 13.5 14.5 15.5 Manual override (Press and turn for the locking type.)
Refer to p.4.1-48, 4.1-49 for specifications and models.
E F F E E B C Cross interface E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model AC10 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC20 22 40 40 40 AC25, AC30 28 48 43 49 AC40 Cautions in Mounting 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use a
Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 32 to 50 25, 50, 75, 100, 125, 150, 175, 200 Manufacturing of Intermediate Strokes Refer to page 24 for cylinders with auto switches.
10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.
50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501
50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501
Option Specifications 24, 48, 110, 220 VAC (50/60 Hz) 6, 12, 48 VDC Locking type (Tool required) With light/surge voltage suppressor Note) Coil rated voltage Manual override Option Plug-in type Note) Plug-in, K plug connector type is standard with light/surge voltage suppressor.
Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.
Mass mn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 5mm 0mm 65mm 0.88kg 210 65 111 Z Wb 42.5mm 0mm 150mm 4.35kg 150 Wc 42.5mm 111mm 150mm 0.795kg Wd 42.5mm 210mm 150mm 0.5kg Y 42.5 5 n = a, b, c, d 3 Composite center of gravity calculation m = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525kg 1 m X = x (mn x Xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5mm 1 m Y = x (mn x
Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/
Form w 1 Material e Vacuum inlet r Mounting Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs Deep Type Connection M5 x 0.8 thread B 10 B5 41 25 2.5 M5 x 0.8 5 16 42 26 25 48 30 3.5 10 N S U F GN GS N4 N6 U4 U6 41 25 2.5 M6 x 1 6 16 42 26 25 48 30 3.5 40 57 39 6 25 B8 48 30 3.5 M8 x 1.25 8 40 57 39 6 ZP Y D C2 B6 Construction p. 117 Adapter Assembly p. 123 Dimensions Per Vacuum
Note2) The standard strokes of CKG1 are 50, 75, 100, 125 and 150 mm.
56 16 20 22 30 28 28 28 30 47.6 53 67.7 78.7 Clevis style: CLG1DN Clevis Style Bore size (mm) BZ CZ L RR TE TF TH TT TV TW TX TY TZ CDH10 8 0.058 0 10 0.058 0 12 0.070 0 14 0.070 0 20 25 32 40 44 52.5 57.5 66 29 33 40 49 14 16 20 22 11 13 15 18 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 3.2 3.2 4.5 4.5 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 43.4 48 59.4 71.4 Clevis pin and
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68
(Wn) Weight (mn) Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 5 mm 0.88 kg 0 mm 65 mm 111 Wb 42.5 mm 4.35 kg 0 mm 150 mm Y 210 Y Wc 42.5 mm 0.795 kg 111 mm 150 mm Wd 42.5 mm 1.0 kg 210 mm 150 mm n = a, b, c, d 3 Calculation of composite center of gravity m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg 1 m3 X = x (mn x xn) 1 7.025 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1
-X 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 For long strokes, it will be made-to-order.
or less 4.72 (4.55) VFR631 VFR630 39 0.17 9.3 39 0.15 9.3 3 4 (B) (A) 4 2 (B) (A) 4 2 42 [40] 0.12 [0.15] 9.6 [9.4] Exhaust center 4.72 (4.55) VFR641 VFR640 38 0.14 8.9 1 3 4 150 or less Pressure center 38 [20] 0.10 [0.44] 8.7 [5.7] 9.3 150 or less 4.72 (4.55) VFR651 VFR650 3 4 1 40 0.16 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 Pressure center Model Port size Type of actuation Effective area