Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

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w u w t e r !

VQ5000

side U side U side D side U side D side 107.8 106 Station Nos.

V100

VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimension 1.5 m 3 m 5 m Mounting direction D side mounting U side mounting D U Note) The number of manifold stations cannot be changed.

High Vacuum Angle Valve

D-G

Electric Actuator/Slider Type

8 q @1 u A A i o @0 !6 @0 !1 !5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

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ends a w t o u i Resin materials eliminated Laser marking is employed for the model designation. d t o o g e a n L c 2 s u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

side U side U side D side U side D side 107.8 106 Station Nos.

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D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

<D-Side End Plate Assembly> ty D-side end plate assembly no. VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

<D-Side End Plate Assembly> ty D-side end plate assembly no. VVQ2000-3A-1<U-Side End Plate Assembly> u U-side end plate assembly no.

7

E U 300 1.2 7.5 T 5.5 5.5 A b a IN OUT B 2 x P Port size 4.5 4.5 L K D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet

0.4

SZ VF <D-Side End Plate Assembly> rt D-side end plate assembly no. VVQ2000-3A-1<U-Side End Plate Assembly> y U-side end plate assembly no.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

216 16 Stations L1 L2 L3 L4 VFN U D VV4Z1-25FUStation -00C (2 to 10 stations) VV4Z1-25F Station B-00C (2 to 10 stations) VV4Z1-25F Station -00C (11 to 20 stations) U D D side U side D side U side (Pitch) (Pitch) (Station n)(Station 1) (Station n)(Station 1) VV4Z1-25FD VV4Z1-25FU (mm) (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

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u u Drain Drain Drain Component Parts Material No.

Hydraulic

U B D-F9BAL A Auto switch mounting heights (mm) D-A7H D-A80H D-J79 D-J79W D-F7 D-F7F D-F7NTL D-F7BAL D-F7W D-A73C D-A80C D-F7WV D-A7 D-A80 D-F9V D-F9WV D-F9BAL D-J79C D-A79W D-A9V D-F7V D-F7BAVL Bore size (mm) U U U U U U U U U 31 24.5 25.5 31.5 28 20 27 32 38 29 31.5 32.5 38.5 35 34 26.5 27 40 41.5 32.5 35 36 42 38.5 37.5 30 30.5 50 47.5 38.5 41 42 48 44.5 43.5 36 36.5 63 54 42 47.5 48.5

Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

VQ4000

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)