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Set range is 1 to 99. to Communication speed (MODBUS) Setting and checking 11. Press the [SEL] key once. The set screen of communication speed (MODBUS) is displayed on the digital display. PV SV 12. Select communication speed (MODBUS) from the table below with [] key or [] key, and confirm by pressing SEL.

Set range is 1 to 99. to Communication speed (MODBUS) Setting and checking 11. Press the [SEL] key once. The set screen of communication speed (MODBUS) is displayed on the digital display. PV SV 12. Select communication speed (MODBUS) from the table below with [] key or [] key, and confirm by pressing SEL.

Set range is 1 to 99. to Communication speed (MODBUS) Setting and checking 11. Press the [SEL] key once. The set screen of communication speed (MODBUS) is displayed on the digital display. PV SV 12. Select communication speed (MODBUS) from the table below with [] key or [] key, and confirm by pressing SEL.

Setting of slave addresses for simple communication protocol Setting range: 1 to 99 to Setting/Checking: Communication speed (simple communication protocol) 15. Press the [SEL] key once. Setting screen of communication speed (simple communication protocol) is displayed on the digital display. PV SV 16.

Setting of slave addresses for simple to communication protocol Setting range: 1 to 99 Setting/Checking: Communication speed (simple communication protocol) 15. Press the [SEL] key once. Setting screen of communication speed (simple communication protocol) is displayed on the digital display. PV SV 16.

Setting of slave addresses for simple communication protocol Setting range: 1 to 99 to Setting/Checking: Communication speed (simple communication protocol) 15. Press the [SEL] key once. Setting screen of communication speed (simple communication protocol) is displayed on the digital display. PV SV 16.

The step No. of program which is being performed is displayed. 0 to 120 18 Settling time The settling time is displayed. 0 to 999 ms 19 Oscillation detection frequency The frequency at oscillation detection is displayed. 100 to 4500 Hz 20 Tough drive times The times moving to the tough drive are displayed. 0 to 99 times 79 - 6.

M4 16 - (1)D (100 ) (2)2mm 2 D (3) 40 30mm 50mm ()60mm 0mm 16 *LEH 10mm 25 30mm 30mm 50mm DIN 60mm 17 - 4 4.1 Node Address/Data Rate 1 DeviceNet MSD LSD Data Rate *1 PGM DeviceNet *2 010 *3 PGM DeviceNet Node Address MSD LSD Data Rate Node Address Data Rate MSD LSD 0 125kbps 10) 1) 1 250kbps 0 0 0 2 500kbps 0 1 1 3 PGM *1 0 2 2 9 6 2 62 6 3 63 6 4 PGM *1 9 9 2 PGM 64-99

. / . 96 13.1 . 96 13.2 . 97 13.3 . 97 13.4 . 98 13.5 . 99 13.6 . 100 14. . 100 14.1 / . 100 14.2 . 101 14.3 . 102 3 No.SFOD-OMT0009CN-B 14.4 . 102 14.5 . 102 14.6 . 103 14.7 . 103 15. . 104 15.1 . 104 15.2 . 106 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 4 No.SFOD-OMT0009CN-B JXC73/83 Series/

90%RH ) 2(0.5G) 4.9m/s IP20 200g() 220g(DIN ) 11 - 32 1 LED 2 ADDRESS X1X10 3 B RATE IF X100 4 CN2 SW IF CN2 5 CN4 EMG 6 CN3 Profibus 7 CN2 TB/PC LEC (LEC-T1)(LEC-W2) 8 CN1 CONT IF LEC 12 - 33 1LECGPR1 () (DIN ) DIN (35mm) () 2DIN LECGPR1D DIN (35mm) 13 - 34 1 DIN 2 LECGPR1 DINLECGPR1D DIN 2M4 2.1 Nm DIN A DIN ADIN 2 40 14 - 4 41 ADDRESS,B RATE LEC 0~99

13 7 59 4.5 118 114 140 19.5 11 L1 Rod end nut 100 53.5 13 7 71 6 137 136 162 23 12.5 Front flange type: CLQF/CDLQF FV M Front flange type (mm) A + Stroke L FT B + Stroke G 4-FD FZ FX With auto switch Without auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M A A B B 36 92 10 to 50 63 102 46 9 9 80 92 108 38 18 43.5 60 46 102 75, 100 43.5 106.5 10 to 50 80 116.5 53.5 11 11 99

D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 30 6 26 46 42 46 42 26 30 10 28 32 48 44 48 44 28 32 15 17.5 21.5 76.5 72.5 56.5 60.5 20 19.5 23.5 87.5 83.5 39.5 35.5 67.5 71.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25 to 63 A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 18 97 99

a = 2000 Pitching Mep m m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 100 L1 0 10 30 20 Transfer load m (kg) 300 L2 200 Mer m Rolling Yawing 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 1000 a = 500 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page 145 for deflection data. 98 99

a = 2000 Pitching Mep m m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 100 L1 0 10 30 20 Transfer load m (kg) 300 L2 200 Mer m Rolling Yawing 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 1000 a = 500 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page 145 for deflection data. 98 99

Specifications Compressed air 1.0MP Fluid Max. operating pressure Through the adoption of an element that is used exclusively for removing water drops and the provision of ample housing interior space, a 99% water removal rate has been achieved.

1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 12.5 3 15 20 32 15 17.5 20 4 25 30 30 12.5 15 3 (mm) L Max. 32 Max. 31.5 20 Size 32 40 15 40 17.5 20 4 Possible to change the specification from standard to"-X5" 25 Specify the part number for hexagon socket head cap screw for angle adjustment referring to the list below. 30 30 Size

Y: 4.5 to 7 D: 6 to 8 78.3 2(A) 2(A) 63 19 (A port) Rc1/2 Stations L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-15

2 VVFS5000-3A-1 3-8-98 99 For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS6000 Model VK Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics (1) (2) (3) Max. operating cycle (cpm) Port size Rc Response time (ms) Type of actuation VZ Weight (kg

Note 3) When two or more symbols are specified, indicate them alphabetically. 2-5-27 Base Mounted 28 Series VQ4000 Kit (Serial transmission unit) for I/O S 23 75.5 Mounting hole for 2-M5 8 61.5 143 10 1.6 14.5 99 32 U side 8 (128.5) L2 (In the case of DI unit, 1pc: 8 number of inputs) Min. 0 to max 4 unit (0 to 216 mm) DI unit 54 SI unit P = 25 44 n B A 8 2 4 B A C12: One-touch fitting for

Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 3 78 69 63 80 71 65 Station 20 350 341 335 369 360 354 4 94 85 79 97 88 82 5 110 101 95 114 105 99 6 126 117 111 131 122 116 7 142 133 127 148 139 133 8 158 149 143 165 156 150 9 174 165 159 182 173 167 10 190 181 175 199 190 184 11 206 197 191 216 207 201 12 222 213 207 233 224 218 13 238 229 223 250 241 235 14 254 245 239 267 258 252