Compressed Air Preparation Filter

rate [L/min (ANR)] Air flow rate [L/min (ANR)] AFF50 AFF60 6 20 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 5 15 Inlet pressure 0.5 MPa Inlet pressure 0.5MPa 4 Pressure drop [kPa] Pressure drop [kPa] Max. flow capacity line 3 10 Max. flow capacity line Accessories Sold Separately/ International Standard 2 5 1 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 500 0 500 2000 1500 1000 2000 2500

Cylinder with Lock

100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

31157 21264 50240 34344 78500 53882 12560 10017 19625 15686 31157 25002 50240 40347 78500 62604 14 11254 7693 17584 12070 27475 18859 43619 29769 70336 48081 109900 75435 17584 14023 27475 21961 43619 35003 70336 56486 109900 87645 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 804 550 1256 862 1963 1347 3116 2126 5024 3434 7850 5388 1256 1002 1963 1569 3116 2500

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM

Ionizer Series IZS40/41/42

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

Table of Contents

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

VQ5000

2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM

The LEF series slider type electric actuator features a low profile height of 46mm *. The actuators main body can be mounted without removing any exterior components, such as the cover, making installation easy. The standard equipped seal band covers the guide, ball screw and belt, preventing grease and external foreign matter from splashing and entering the LEF. There are 2 types of drivers

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

33

2500 25C 2000 2000 1500 1500 35C 35C 1000 1000 40C 500 500 40C 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] 201 HRSE Series Basic Type Pump Capacity 012 018 HRSE -A-20/23 012 018 024 HRSE -A-10 0.14 0.14 14 14 Circulating fluid pressure [MPa] Circulating fluid pressure [MPa] Outlet: 60 Hz Outlet: 60 Hz 0.12 0.12 12 12 0.10 0.10 Pump

Manifold Regulator Modular Type ARM2500/3000 Series

Accessory (Pressure gauge) Body size None (With plug) Nil G1 G2 2500 3000 Back side thread: G33-1001 Vertical side thread: GA33-1001 Pressure gauges are shipped together (but not assembled).

AC

3 2500 3000 A B How to Order (1) When adding n stations to ARM : Regulator n pcs. Bracket ass'y n pcs. (2) When regulators, end plate assembly and bracket assembly are assembled to make the manifold of n stations. Regulator n pcs. Bracket ass'y n pcs.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

V100

Lead wire length 2000 mm -+ Socket Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lead wire Connector Hook For DC V114-5LO SY100-30-4A-20 For AC V114A-1LO SY100-30-1A-20 2.

SX

How to order L/M connector assembly Lead wire length Positive common specifications For single solenoid: SX100 40 4S B port N.C A port N.O Plug position Actuation Nil 300 mm Plug Plug 6 600 mm For double solenoid: For 3 position SX100 40 4D 10 15 20 25 30 50 1000 mm Number of solenoids 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Single Negative common specifications For single solenoid: SX100

Table of Contents

Without lead wire Nil 6 10 15 20 25 30 300 600 1 2 3 Blue (2) For 100 VAC For 200 VAC Another VAC 1000 1500 2000 2500 3000 Socket Hook Red (2) Gray (2) 4 Red: +, Black: For DC Note) When ordering a valve in which the length of the wire is more than 600 mm, be sure to indicate the model number of valve without connector and connector assembly. Ex.)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Without lead wire 300 600 1 2 3 Blue (2) Red (2) Gray (2) For 100 VAC 1000 1500 2000 2500 3000 For 200 VAC Groove Pin Another VAC Cover DC indicator Lever 4 Red: +, Black: For DC How to Order Include the connector assembly part number together with the part number for the plug connector's solenoid valve without connector. (Example) 2000 mm lead wire length. VF3230-5M0-023 pcs.

VZS

Without lead wire Nil 6 10 15 20 25 30 300 600 1 2 3 Blue (2) For 100 VAC For 200 VAC Another VAC 1000 1500 2000 2500 3000 Socket Hook Red (2) Gray (2) 4 Red: +, Black: For DC Note) When ordering a valve in which the length of the wire is more than 600 mm, be sure to indicate the model number of valve without connector and connector assembly. Ex.)

NARM Series

NARM 2500 05 A 02 G1 Optimal for central pressure control. Accessory Regulator for manifold Pressure easily set using the new handle. One-touch lock system.

TABLE OF CONTENTS

Other pin materials available. consult factory PATENTED GAS ORIFICE VALVE PRESSURE RATINGS* SIZE CV FACTOR NUMBER LIQUID ORIFICE VALVE PRESSURE RATINGS* SIZE CV FACTOR NUMBER 3000 1/32 .022 EH21G7DCCM 3000 1/32 .022 EH21G7DCCM 2500 3/64 .041 EH21H7DCCMG 1500 3/64 .041 EH21H7DCCML 1350 1/16 .061 EH21J7DCCMG 850 1/16 .061 EH21J7DCCML 450 3/32 .084 EH21K7DCCMG 300 3/32 .084 EH21K7DCCML OPTIONS