Series: LEFB (Belt Drive), Size: 40, Motor Mounting Position: Top Mounting Type, AC Servo Motor: S4 (400W Output, Incremental Encoder), Lead: S, Stroke: 300mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: R (Robotic Flexible Cable), Cable Length: 2 (2m)

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: S2 (100W Ouput, Incremental Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 300mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable, Flexible Cable), Cable

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: S3 (200W Output, Incremental Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 300mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable, Flexible Cable),

Series: Belt Drive, Size: 40, Motor Mounting Position: Top Mounting Type, AC Servo Motor: 400W Output, Incremental Encoder, Lead: S, Stroke: 300mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: Robotic Flexible Cable, Cable Length: 2m, Driver: -, I/O Connector: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: 100W Ouput, Incremental Encoder, Lead: LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 300mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Robotic Cable, Flexible Cable, Cable Length: 2m, Driver

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 300mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Robotic Cable, Flexible Cable, Cable Length: 2m, Driver

XM, XY

changed part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (Positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5

VZA2000

258-9200-www.stevenengineering.com Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 3 position exhaust center: VZA4441--01 02 Pilot port (B side) Body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 body side Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA7 MSUA7-S, SE Scale: 60% Top ports/MSUA7-SE C 8-M4 x 0.7 depth 8 A port B port 67 13 2-M5 x 0.8 14 B 41 50 33 37 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 +0.030 0 3-4H9 depth 4 ( A , B , C ) 4 3 2-5.5 through 3-R2 3-R2 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2

VER2000/4000

P A (Supply air) B R2 (Exhaust air) A (PA Setting) B R2 (Exhaust air) Thereafter F1 = F2: See figure w. 14-9-19 4 Series VER2000/4000 CurrentPressure Characteristics Selecting Electro-pneumatic Proportional Valve How to Find the Flow Rate Air temperature of 20C The horizontal axis of the characteristics represents the output amperage of the power amplifier VEA25.

Exhaust Cleaner for Vacuum Pump AMV Series

R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789

AXTS-OMY0007

Configuration symbol AXTS040*-2(B)-X2 Symbol for internal pilot fluid passage Fig.1 Symbol for internal pilot fluid passage. 1(P) Port:IN Port SUP.Air(for air blow 4(A) Port:OUT Port 3(R2) Port: Released to atmosphere (pilot exhaust port with silencer) AXTS040*-3(B)-X2 Symbol for internal pilot fluid passage Fig.2 Symbol for external pilot fluid passage. 3(R2) port: IN Port SUP. air (

Interface Regulator for VQ4000 5 Port Solenoid Valve

Pressure gauge SMC 1 P 5 3 R2 R1 D side PE Pressure Setting Caution 1. Set the pressure of an interface regulator using a flat head screw driver. 2. The pressure adjustment is increased by turning clockwise and decreased by turning counter clockwise. Perform pressure setting by increasing from low pressure to the desired setting. 3.

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: 100W Output, Incremental Encoder, Lead: LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 300mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 2m, Driver Type: -, I/O Connector: -

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: S2 (100W Output, Incremental Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 300mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: R [Robotic Cable (Flexible Cable)], Actuator Cable Length: 2 (2m)

CJP

Applicable bore (mm) 6 Applicable bore (mm) 6 NX NDH10 B L1 R1 R2 U A Part no. A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.

XLAQ/XLDQ

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

CJP

Applicable bore (mm) 6 Applicable bore (mm) 6 NX NDH10 B L1 R1 R2 U A Part no. A B L L2 MM R1 R2 U L2 MM L1 NDd9 3 NDH10 3 NX Part no.