Electric Actuator with Integrated Guide

Positioning distance (mm) 600 300 100 10 1 10 60.5 30.5 10.5 1.5 0.5 100 6.5 3.5 1.5 0.6 0.5 Speed (mm/s) 150 4.5 2.5 1.2 0.6 0.5 300 2.6 1.6 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

CL

Lock-up direction 2.3mm 3mm 200mm/s Lock-up Unit Style 40 50 63 80 100 Bore size (mm) CL-40 CL-50 CL-63 CL-80 CL-100 Lock up unit part No.

JXCx-OMU0004

2000 100 2000 100 2000 LEHS LEHS10 LEHS20 LEHS32 LEHS40 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 5 100 5 100 1 7 150 10 150 10 150 10 150 2 10 200 15 200 15 200 15 200 3 12 300 20 300 20 300 20 300 4 15 400 25 400 25 400 25 400 5 20 500 30 500 30 500 30 500 6 25 600 35 600 35 600 35 600 7 30 700 40 700 40 700 40 700 8 35 800 45 800 45 800 50 800 9 40

CL

-XC18 NPT finish piping port 2 mm 1.2 mm 100 mm/s -X50 Large bore lock-up cylinder Lock-up direction direction One direction (Lock direction can be changed.) 3 mm 2.3 mm 200 mm/s -X51 Both-directions lock-up cylinder Lock-up Unit Model 40 50 63 80 100 Applicable bore size (mm) Lock-up unit part no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

CL

-XC18 NPT finish piping port 1.2 mm 2 mm 100 mm/s -X50 Large bore lock-up cylinder Lock-up direction direction One direction (Lock direction can be changed.) 2.3 mm 3 mm 200 mm/s -X51 Both-directions lock-up cylinder Lock-up Unit Model 40 50 63 80 100 Applicable bore size (mm) Lock-up unit part no.

Compact 5-Port Solenoid Valve

500 100 300 500 Cylinder speed [mm/s] Cylinder speed [mm/s] Cylinder speed [mm/s] Refer to pages 9 to 12 for detailed conditions regarding the above cylinder speeds.

Slider Type Ball Screw Drive/11-LEFS Series

LECSB2-S 200 to 230 V V V C1 LECSC1-S 100 to 120 V V C2 LECSC2-S 200 to 230 V V V S1 LECSS1-S 100 to 120 V V S2 LECSS2-S 200 to 230 V V V Note 1) The motor and encoder cables are included.

Environment

500 600 Speed [mm/s] Speed [mm/s] LEY32m LEY32m for acceleration/deceleration: 2000 mm/s2 90 50 Lead 4: LEY32C 80 Lead 4: LEY32C 40 42 Horizontal work load [kg] Vertical work load [kg] 70 Lead 8: LEY32B 60 30 40 45 50 Lead 8: LEY32B 21 20 Lead 16: LEY32A 30 20 10 Lead 16: LEY32A 10 0 0 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] Graph of Allowable Lateral

Rotary Actuator/Vane Type

Single vane D: Double vane S D S D S D S D Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Side ported Side ported Side ported Side ported Side ported Side ported Side ported Side ported Port location Side ported (Nil) Axial ported (E) 90 Rotating angle 100 Standard/Free mount type 180 270 Single shaft S Double shaft W Long shaft with

CJ2

extend Bore size CJP 10 16 10mm 16mm Standard stroke (mm) CJ2 10 16 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 CM2 Mounting Spring return Basic Axial foot Front flange Double clevis B L F D Action C85 S T Single acting/Spring return Single acting/Spring extend CG1 MB CJ2K L 16 45 S Standard C95 CA1 CDJ2K L S 16 45 C73 With auto switch CS1 Number of switches S n With auto switch (Built-in

Aluminum High Vacuum Angle Valve

Main exhaust solenoid valve O-ring for S valve sliding Port 1(P) (Pressure port) t XLDV-40 to 160 30 Initial exhaust valve conductance L/s (viscous flow) XLD-100 XLD-160 25 20 XLD-63 XLD-80 r i 15 XLA XLD-50 10 XL XL z Initial exhaust valve opening adjustment The initial exhaust rate should be adjusted without applying the pilot pressure to the pilot port S before operation

Auto Switch Guide

Main circuit of switch C J G5-S OUT Black Switch operating range (mm) Cylinder speed (mm/s) Switch detecting time CV Ex.) Cylinder speed 1000 mm/sec. Sequencer response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

LEY-OM007

g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 80.00 3000 3000 80 40 30 100 70.00 100.00 25.00 No.00[mm] 80[mm] 1AREA [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 0 [%] f 40 40[%] INPON ON INP OFF P.41 7.2 0 10 20 30 40 50 60 70 80 90 100 [mm] 102 2AREA AREA1 2 [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 40 0 [%] f 170[mm] 2100[mm] AREAON

LEC-OM07605CN

PA24 A-4] 3(_ _ _ 1) 0 1 2 0h _ x _ _ 0h x _ _ _ 0h PB03 TFBGN 6rad/s6rad/s 18000 0 [rad/s] 18000 PB04 FFC 100%0 100%1s 0 0 [%] 100 PB06 GD2 [Pr. PA08] 0.00100.00 7.00 [] 0.00 300.00 Pr. PA08 _ _ _ 0(21()) _ _ _ 1(1) _ _ _ 2(2) _ _ _ 3() _ _ _ 4(22) PB07 PG1 [Pr. PA08] 15.0 1.0 [rad/s] 2000.0 Pr.

Compact Guide Cylinder

/MGPKM Horizontal Mounting m m MGPKFM12 to 50 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 100 100 50 50 50 50 32, 40 32, 40 32, 40 10 10 32, 40 25 25 Load mass m [kg] Load mass m [kg] 20 20 25 20 16 16 25 20 12 12 16 1 1 16 12 12 0.1 10 30 50 51 100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 100 100 50 50 50 50

Table of Contents

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

MLGP

Bearing MLGPM20 to 100 25 l2 = 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100

MLGP

Bearing MLGPM20 to 100 25 l2 = 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100