JXCx-OMT0061CN

() 2 () * ) () 3 11.1 12 64 ()() No. 1 2 mm 2 2 mm/s mm mm/s mm/s % % mm mm mm/s % 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 47 - () TB No. No. 063 No.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

and speed of 500mm/s.

0.5

New New [mm] 300 2 s 4 s 6 s 8 s 0 300 Compact fan types 0 200 800 1600 2000 2400 Installation distance sPage 21 When neutralizing static electricity from 1000 V to 100 V at a distance of 300 mm from the workpiece (front surface). When air flow of IZF31 is maximum.

Modular Design with Uniform Body Style

1500 2000 Flow rate [L/min (ANR)] 0 1000 2000 3000 4000 Flow rate [L/min (ANR)] AC40-D Rc1/2 AC40-06-D Rc3/4 0.8 0.8 0.7 0.7 0.6 0.6 Outlet pressure [MPa] Outlet pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 1000 2000 3000 4000 5000 6000 7000 Flow rate [L/min (ANR)] 0 1000 2000 3000 4000 5000 6000 7000 Flow rate [L/min (ANR)] AC60-D Rc1 AC50-D Rc1 0.8 0.8 0.7 0.7 0.6 0.6 Outlet

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

For 4 Axes Step Axis Movement mode Speed Position Acceleration Deceleration Positioning/ Pushing Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 Axis 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 Axis 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 1 INC 500 250.00 1000 1000 1 0 0 20.0

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Maximum acceleration: 2000mm/s Positioning time (sec.) Positioning distance (mm) 1000 500 100 10 1 10 100.4 50.4 10.4 1.4 0.5 100 10.4 5.4 1.4 0.5 0.4 Speed (mm/s) 150 7.1 3.8 1.1 0.5 0.4 300 3.8 2.2 0.8 0.5 0.4 Values will vary slightly depending on the operating conditions.

PF2A/PF2W

or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.

Short Stroke Electric Actuator Series LX

Allowable Moment (Nm) Allowable dynamic moment Allowable static moment Pitching Rolling Yawing LXF Model Load movement direction 4 3 4 a = 1000 2000 a Mep a = 2000 L1 (mm) Pitching Rolling Yawing a = 3000 m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment 1000 m L1 3 0 1 2 Transfer load m (kg) a = 1000 300 L2 (mm

LEC-OM02904

PB08 PG2 12 No.PA083 37 rad/s 1 1000 PB09 VG2 12 PA083 823 rad/s 20 50 PB10 VIC 12 PA083 33.7 ms 0.1 1000.0 PB11 VDC No.PB243No.PB240 980 0 1000 PB12 OVA C4MR Configurator2 0 0 TM % No.PA0145No.PB120 5% 100 PB13 NH1 1 1 No.PB01()1 4500 Hz 100 4500 No.PB010 5 15 5 No.

17

400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Select the load mass from within the range of limits shown in the graphs.

1

Note 2) The standard type of CY1L can produce max. piston speed of 1000 mm/s. Note) Please contact SMC in the case of using in a clean room.

5

S 1 pc. n n pcs.

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

SFOD-OMT0005CN

Movement Speed Position Acceleration Deceleration Area 1 Area 2 In pos force Force speed force 2 2 mode mm/s mm mm/s mm/s mm mm mm Value mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () (1)No.

LECA6_C

M INPOFF BUSYON DRIVEOFF 100mm 60mm 50mm 0mm 5 INPON No.2 ON (OUT1ON) BUSYOFF 10mm 37 - 9.2 )100mm/s 100mm (No.1 ) 100mm ,10mm/s 50% (5mm) (INPON )50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () No.1(IN0ON) DRIVEON No.1 DRIVE No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

LECP6_C

mm mm/s mm/s mm mm mm mm/s 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 28 - TB No.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

A

www.stevenengineering.com I 5.15 AIR PREPARATION MODULAR TYPE ACCESSORIES SPACER H O W T O O R D E R S PA C E R D I M E N S I O N S S PA C E R Y10 (1000 S E R I E S) Y20 (2000 S E R I E S) Y30 (3000 S E R I E S) Y40 (4000 S E R I E S) Y50 (4000-06 S E R I E S) Y60 (5/6000 S E R I E S) Model A Applicable Model Y10 8 NAC100~NAC1040 Y20 10 NAC2000~NAC2040 Y30 11 NAC2500~NAC2540 NAC3000~NAC3040