Air-hydro Unit

Effective oil level stroke (mm) Converter nominal size/stroke (mm) 50, 100, 200, 300, 400, 500 100, 200, 300, 400, 500, 600 200, 300, 400, 500, 600, 700, 800 63 100 160 Specifications Operating pressure 0 to 0.7 MPa Proof pressure 1.05 MPa 5 to 50C Ambient and fluid temperature Fluid Turbine oil (40 to 100 mm2/s) Converter Standard Effective Oil Level Stroke/Effective Volume (cm3) Converter

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

Thermo-chiller

(CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.

XL

Port S (10) remains pressurized and valve S (18) remains open.

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

MY2C16 MY2HT16 Horizontal impact: P = 0.5 MPa Horizontal impact: P = 0.5 MPa 1500 2000 2000 1500 H unit Impact speed mm/s Impact speed mm/s 1000 1000 L unit 500 400 300 400 500 L unit 300 Air cushion Air cushion 200 200 1000.5 1 2 3 4 5 100 10 30 20 0.5 1 2 3 4 5 10 20 30 m2 max. m1 max. m3 max. m1 max. m2, m3 max.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

Transfer

500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2

1

Note 4) Piston speed is ranged from 50 to 500 mm/s. But, for MGQ80, 100 and MGP80, 100, it will be 50 to 400 mm/s. 50 to 200 mm/s for Series MK. Please contact SMC for operating speed of Series CY1B. Note 5) Please contact SMC for Series CQ2 and MGQ with rubber bumper.

Series IDG

800 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow

240

) Lead 10 (LEPY10LJ) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 LEPY10 (Motor size: Basic) Horizontal Vertical 7 3 Lead 5 (LEPY10K) 6 2.5 5 2 Work load [kg] Work load [kg] 4 Lead 5 (LEPY10K) 1.5 3 1 2 Lead 10 (LEPY10J) Lead 10 (LEPY10J) 0.5 1 0 400 300 0 100 Speed [mm/s] 0 400 300 0 100 Speed [mm/s] 200 200 Note) The maximum value of the work load for the positioning

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

MY2

Load weight kg MY2HT25 Horizontal impact: P = 0.5MPa 2000 1500 H unit Impact speed mm/s 1000 L unit 500 400 300 Air cushion 200 100 1 2 3 4 5 10 20 50 40 30 m1 max. m1, m2, m3 max. Load weight kg MY2HT40 Horizontal impact: P = 0.5MPa 2000 1500 H unit Impact speed mm/s L unit 1000 500 400 300 Air cushion 200 1003 5 10 20 30 50 100 200 m1, m2, m3 max.

C76

1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to 100 70 77 101 to 150 82 89 151 to 200 201 to 300 120 127 301 to 400 145 152 401 to 500 170 177 32 40 95 102 6-10-9 10 Series C76 Dimensions with Mounting Bracket [First angle projection] Double acting: Single rod Rod foot (Flange), Rod and head

C76

High Speed Actuation Low friction and the standard elastomer cushion seals allow piston speeds up to 1500 mm/s. Either rubber bumper or air cushions are available.

VFR

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

CC

Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MI W S CEP1 CE1 CE2 No load No load Load ratio Load ratio ML2B C J G5-S Bore size (mm) Bore size (mm) Bore size (mm) CCVL10/11/12/13 4.

Air Cylinder NCQ7 Series Compact Cylinder

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

asilltr

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

Thermo-chiller/Rack Mount Type

Applicable model HRR010/012/018/024/030/050-mm-m-DM Measurement range of electric conductivity 0.1 to 48.0 S/cm Set range of target electric conductivity 0.5 to 45.0 S/cm1 Set range of electric conductivity hysteresis 0.1 to 10.0 S/cm 1 Default setting is set to Electric conductivity set value: 25.0 S/cm and Hysteresis: 5.0 S/cm.