XL

1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 2000mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: A (10m), Driver Type: B2 (LECSB2, 200 to 230 Power Supply Voltage), I/O Connector: H (Connector)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 2000mm, Motor Option: B (Lock), Cable Type: S (Standard), Cable Length: A (10m), Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢ Card), I/O Connector: 1 (1.5m)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 3000mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: A (10m), Driver Type: B2 (LECSB2, 200 to 230 Power Supply Voltage), I/O Connector: H (Connector)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 2000mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: 5m

A high rigidity, slider type electric actuator, series LEJ is available in both ball screw, LEJS, and belt drive, LEJB models.  The LEJ offers 2 types of motor cables, standard and robotic (flexible).  Seal bands, equipped as standard, cover the guide preventing grease from splashing, and external foreign matter from entering.  LEJS (ball screw drive) can be used for both horizontal and

A high rigidity, slider type electric actuator, series LEJ is available in both ball screw, LEJS, and belt drive, LEJB models.  The LEJ offers 2 types of motor cables, standard and robotic (flexible).  Seal bands, equipped as standard, cover the guide preventing grease from splashing, and external foreign matter from entering.  LEJS (ball screw drive) can be used for both horizontal and

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 3000mm, Motor Option: B (Lock), Cable Type: S (Standard), Cable Length: 2m, Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢ Card)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 3000mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: 2m, Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢ Card), I/O Connector: 1 (1.5m)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 3000mm, Motor Option: B (Lock), Cable Type: S (Standard), Cable Length: 2m, Driver Type: 92 (LECSN2-T-9, 200~240V, Absolute, EhterNet/IPâ„¢ Card), I/O Connector: 1 (1.5m)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 1000mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: A (10m), Driver Type: E2 (LECSN2-T-E, 200~240V, Absolute, EtherCAT® Card)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 1000mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: A (10m), Driver Type: E2 (LECSN2-T-E, 200~240V, Absolute, EtherCAT® Card), I/O Connector: 1 (1.5m)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 1000mm, Motor Option: None, Cable Type: R (Robotic, Flexible), Cable Length: A (10m), Driver Type: E2 (LECSN2-T-E, 200~240V, Absolute, EtherCAT® Card), I/O Connector: H (Connector)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 600mm, Motor Option: B (Lock), Cable Type: R (Robotic, Flexible), Cable Length: 5m

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 1500mm, Motor Option: None, Cable Type: S (Standard), Cable Length: 5m

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 1500mm, Motor Option: B (Lock), Cable Type: S (Standard), Cable Length: 5m

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 1500mm, Motor Option: B (Lock), Cable Type: S (Standard), Cable Length: A (10m)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 1000mm, Motor Option: None, Cable Type: S (Standard), Cable Length: 5m

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 3000mm, Motor Option: B (Lock), Cable Type: R (Robotic, Flexible), Cable Length: 5m, Driver Type: S2 (LECSS2-T, 200~240V Absolute, SSCNETIII/H)

Size: 63, Motor Type: T7 [AC Servo Motor (Absolute Encoder) 200W], Stroke: 2000mm, Motor Option: B (Lock), Cable Type: S (Standard), Cable Length: 2m